摘要:
A transfer device is provided for substrate transfer along a transport direction and for change between a first transport path and a second transport path extending along the transport direction. The first transport path is displaced with respect to the second transport path in a switch direction perpendicular to the transport direction. The transfer device includes a first substrate support assembly defining a first track to support a substrate or substrate carrier in a chamber. The transfer device further includes a second substrate support assembly defining a second track to support a substrate or substrate carrier in the chamber. The first substrate support assembly and the second substrate support assembly are moveable relative to each other at least in the switch direction.
摘要:
Device for processing a substrate in a processing plant, comprises at least one process tool (3) exhibiting two oppositely arranged substrate planes, that are oriented at least approximately perpendicular, and arranged in at least one processing area (2). The device is adapted for processing at least two substrates simultaneously in the processing area with the process tool. The substrates are arranged in the substrate planes such that the coatings of the substrates face each other and a quasi-closed process space is formed between the substrates at least during the processing. An independent claim is also included for processing coated substrates in a processing plant comprising at least two substrates in the processing area arranged in the oppositely arranged substrate planes, where the substrate exhibits coatings.
摘要:
Insulating glass (2) is produced by forming an assembly (8) having at least two facing glass sheets (3) (4) and at least one inner spacer frame (5) separating the glass sheets, and by depositing a bead (7) of sealant on an outer peripheral edge of the assembly (8); the sealant being deposited by keeping the assembly (8) stationary in a vertical position, and moving a dispenser head (14) along an endless path (18) about the assembly (8); the dispenser head (14) being moved about the assembly by resting at least one glass sheet on underlying movable supporting members (31), detaching the supporting members (31) successively from the assembly (8) to let the dispenser head (14) through, and moving the supporting members (31) back onto the assembly (8) once the dispenser head (14) has passed.
摘要:
The invention relates to a device for conveying insulating glass panes which are slightly inclined in relation to the vertical line. The inventive device comprises a level transporter (2) and a support (15) which extends above the level transporter (2) and parallel thereto. One or more support elements of the support (15) define a pane running plane (16). The insulating glass panes are placed on the level transporter (2) and rest against the support elements. The level transporter (2) has supporting surfaces (10, 11) at two conveying elements (7, 8) which are parallel to each other and which can be driven in a synchronous manner. The supporting surfaces (10, 11) are essentially vertical to the pane running plane (16). The distance of one conveying element (7, 8) to the other conveying element (8, 7) is variable. The two conveying elements (7, 8) can be displaced independently from each other and crosswise to the pane running plane (16).
摘要:
The invention provides a coater, and methods of using the coater, for depositing thin films onto generally-opposed major surfaces of a sheet-like substrate. The coater has a substrate transport system adapted for supporting the substrate in vertical-offset configuration wherein the substrate is not in a perfectly vertical position but rather is offset from vertical by an acute angle. The transport system defines a path of substrate travel extending through the coater. The transport system is adapted for conveying the substrate along the path of substrate travel. Preferably, the transport system includes a side support for supporting a rear major surface of the substrate. The preferred side support bounds at least one passage through which coating material passes when such coating material is deposited onto the substrate’s rear major surface. Preferably, the coater includes at least one coating apparatus (e.g., which is adapted for delivering coating material) on each of two sides of the path of substrate travel. The coating apparatuses preferably are adapted for depositing coatings onto both of the generally-opposed major surfaces of the substrate in a single pass of the substrate along the path of substrate travel.
摘要:
The invention relates to a device for transporting a flat substrate through a coating plant consisting, for example of a plurality of different sputtering cathodes to which flat substrates, for example glass plates, are successively transported in vacuum. The aim of said invention is to avoid abrasion between said glass plates and a support. For this purpose, a glass plate is distanced from the support by a compressed gas coming through relatively few-numbered and small-sized orifices arranged in a gas channel. As far as small sizes of said orifices prevent any rapid pressure compensation between the gas channel and the rest of said coating plant when it is at atmospheric pressure on in vacuum, said gas channel is separated from the rest of the plant and provided with an individual gas pipe which makes it possible to introduce into the gas channel or pumped out therefrom.
摘要:
A device for working material plates (1), such as glass sheets, comprises a supporting device (25, 26, 29) for the material plate (1) and a tool (12, 18) for working the material plates (1). The supporting device (25, 26, 29) has supporting elements (25', 25', 26', 26', 29', 29'), which are provided in pairs and which have supporting surfaces (27', 27', 30', 30'). These supporting surfaces face one another, and the material plate (1) is held therebetween. Openings (31) for liquid (1) that exits while under pressure are provided inside the supporting surfaces (27', 27', 30', 30'). The material plate (1), particularly a glass sheet, is not mechanically supported as is customary in the prior art, but is supported instead with the aid of a liquid film that is formed under pressure inside the gap between the material plate (1) and the supporting surfaces (27', 27', 30', 30') of the supporting elements (25', 25', 26', 26', 29', 29').
摘要:
1. An apparatus for a slipless conveyance of two plates, particularly of glass plates, which are held to be coextensive and in register and parallel to each other and spaced apart and are supported at one of their broadsides and are conveyed in its plane (which will subsequently be described as the plane of travel of a given plate) and are conveyed in any desired position, particularly in an inclined, vertical or approximately vertical position, characterized in that at least two vacuum-applying conveyors (100) are provided, which are adapted to by driven in synchronism and extend parallel to each other and are disposed opposite to each other and spaced apart and intended to engage the two plates (31, 21) at those of their broadsides which are remote from each other.