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    Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus
    2.
    发明公开
    Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus 审中-公开
    Elektronenkanone，Lithographievorrichtung，Artikelherstellungsverfahren undElektronenstrahlgerät

    公开(公告)号：EP2390896A1

    公开(公告)日：2011-11-30

    申请号：EP11167638.3

    申请日：2011-05-26

    申请人： CANON KABUSHIKI KAISHA

    发明人： Imaoka, Nobuo

    IPC分类号： H01J37/063 ,  H01J37/065 ,  H01J1/02 ,  G03F7/20

    CPC分类号： H01J37/063 ,  H01J1/02 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/06316

    摘要： An electron gun includes a cathode (1), a bias electrode (4a,4b), and an anode (6) disposed along a common axis in order thereof. In the electron gun, an electron emitting surface of the cathode has such an aspherical shape that brightness of a crossover is more uniform than that in a case that both a first region including a point on the axis and a second region located outside the first region have a first radius of curvature.

    摘要翻译： 电子枪包括阴极（1），偏置电极（4a，4b）和阳极（6），其沿着公共轴依次布置。 在电子枪中，阴极的电子发射表面具有这样的非球面形状，使得交叉的亮度比在包括轴上的点的第一区域和位于第一区域之外的第二区域的情况下都更均匀 具有第一曲率半径。

    Electron beam gun
    4.
    发明公开
    Electron beam gun 审中-公开
    Elektronenstrahlkanone

    公开(公告)号：EP1830382A2

    公开(公告)日：2007-09-05

    申请号：EP07250767.6

    申请日：2007-02-23

    申请人： THE BOC GROUP, INC.

    发明人： Kroneberger, Cris Keith ,  Chang, Ping

    IPC分类号： H01J37/065

    CPC分类号： H01J37/065 ,  H01J3/027 ,  H01J37/07 ,  H01J2237/06308 ,  H01J2237/3132

    摘要： An electron beam gun with an arched shaped beam former as an integral part of a massive cathode block which conducts heat away from the beam former and with a filament mounted to the cathode block for improved alignment.

    摘要翻译： 电子束枪（100），其具有拱形成形梁形成器（104），其作为大块阴极块（103）的整体部分，其将热量远离成束器并且安装到阴极块（103）上的灯丝（109） ）以改善对准。

    Elektronenkanone.
    5.
    发明公开
    Elektronenkanone. 失效
    电子枪。

    公开(公告)号：EP0698907A3

    公开(公告)日：1996-05-01

    申请号：EP95111043.6

    申请日：1995-07-14

    申请人： Mishnarodnij Zentr Elektronno-Promenewich Technologij IES im. E.O.Patona NAN Ukraini

    发明人： Movchan, Boris A. ,  Timashov, Viktor A. ,  Pijuk, Evgenii L.

    IPC分类号： H01J37/065

    CPC分类号： H01J37/067 ,  H01J37/065 ,  H01J2237/06308

    摘要： Die Erfindung betrifft eine Elektronenkanone mit einer linienförmigen Glühkathode (11) in einem Kathodenblock, der über Hochspannungsisolatoren (3) mit Abstand zu einer Beschleunigungsanode (1) angeordnet ist und einen Rahmen (2) aufweist, der zwei Kathodenhalter (8, 17) aufnimmt, von denen einer (8) über eine stromführende, die Glühkathode (11) spannende Blattfederanordnung (7) und einen Isolator (4) am Rahmen (2) gehalten ist, wobei eine die Glühkathode (11) übergreifende und achsparallel zu dieser angeordnete Fokussierelektrode (20) vorgesehen ist. Hierbei sind die mit einer Klemme zum Anlegen eines Fokussierpotentials verbundene Fokussierelektrode (20) über eine erste starre stromleitende Platte (21) und den Isolator (4) und der zweite Kathodenhalter (17) über eine zweite starre stromleitende Platte (16) am Rahmen (2) befestigt, wobei die Glühkathode (11) in der Vertikalebene durch die Längsachse der Fokussierelektrode (20) durch Verstellung der Blattfederanordnung (7) und der zweiten Platte (16) im Relativabstand gegenüber der Beschleunigungsanode (1) und der Fokussierelektrode (20) einstellbar ist.

    Thermoionic emissive cathode method of fabricating the same thermoionic emissive cathode and electron beam apparatus
    6.
    发明公开
    Thermoionic emissive cathode method of fabricating the same thermoionic emissive cathode and electron beam apparatus 失效
    热离子发射阴极，这样的热发射阴极和电子束装置的制造工序。

    公开(公告)号：EP0637046A1

    公开(公告)日：1995-02-01

    申请号：EP94111883.8

    申请日：1994-07-29

    申请人： NEC CORPORATION

    发明人： Kawase, Yutaka, c/o NEC Corporation ,  Nakamura, Tsuyoshi, c/o NEC Corporation ,  Ishida, Toshinori, c/o NEC Corporation ,  Sugimura, Toshikazu, c/o NEC Kansai, Ltd. ,  Narita, Maki, c/o NEC Kansai, Ltd.

    IPC分类号： H01J1/14

    CPC分类号： H01J1/14 ,  H01J2237/06308

    摘要： A thermoionic emissive cathode formed from a sintered mixture of at least one high melting point refractory and ion sintered durable substance selected from a group consisting of a metal having melting point equal to or higher than 2400°C, an alloy containing the metal as a main constituent thereof, a carbide of the metal, a boride of the metal, zirconium carbide and zirconium boride and at least one electron emissive substance having low work function, selected from borides or oxides of a metal selected from a group consisting of lanthanum, yttrium, cerium and cesium, said sintered mixture being prepared by heating and pressing, is used in an electron beam apparatus. In this electron beam apparatus, it is possible to stably irradiate electron beam with heating temperature of the thermoionic emissive cathode being about 1500°C to 1800°C under a vacuum pressure in the range of 10⁻² to 10⁻³ Pa.

    摘要翻译： 从一组由金属具有熔点等于或高于2400℃下的选择的至少一个高熔点耐火和离子烧结耐用物质的烧结混合物形成的热离子发射阴极进行合金含有金属作为主要 其组成部分，金属的碳化物，从一组自由镧中选择的金属，碳化锆和硼化锆和至少一种电子具有发射物质低功函数的硼化物，从硼化物或金属的氧化物，钇， 铈和铯，所述制备通过加热和加压烧结混合物，在电子束装置中使用英寸 在该电子束设备，它能够稳定地照射电子束与所述热离子发射阴极是在10的范围内的真空压力下约1500℃至1800℃的加热温度< - > <2>〜10 < - > <3>帕。

    Electron gun used in a particle beam device
    7.
    发明授权
    Electron gun used in a particle beam device 有权
    电子枪用于粒子束装置

    公开(公告)号：EP2264738B1

    公开(公告)日：2017-12-06

    申请号：EP09163176.2

    申请日：2009-06-18

    申请人： Carl Zeiss NTS Ltd. ,  York Probe Sources Limited

    发明人： Hayn, Armin ,  El-Gomati, Mohamed

    IPC分类号： H01J37/063

    CPC分类号： H01J37/063 ,  H01J2237/06308 ,  H01J2237/06341 ,  H01J2237/06375

    摘要： The invention relates to an electron gun (101, 201) used in a particle beam device, for example in an electron microscope. The electron gun (101, 201) has a relatively good brightness and may be operated under vacuum conditions which can be easily achieved (i.e., for example, at a residual pressure of about 10 -6 or 10 -7 mbar). The electron gun (101, 201) comprises an electron source (300) having an electron emission surface (306). Furthermore, the electron gun (101, 201) comprises a first electrode (301) configured to control a path of electrons emitted from the electron emission surface (306), a second electrode (304) which is configured to suppress emissions of electrons from a side surface of the electron source (300) and a third electrode (305) configured to accelerate electrons emitted from the electron source (300) to a final energy. A first voltage, a second voltage and a third voltage are adjusted to avoid any crossover of electrons emitted from the electron emission surface (306).

    ELECTRON GUN, ELECTRON GUN CONTROL METHOD AND CONTROL PROGRAM, AND THREE-DIMENSIONAL SCULPTING DEVICE
    10.
    发明公开
    ELECTRON GUN, ELECTRON GUN CONTROL METHOD AND CONTROL PROGRAM, AND THREE-DIMENSIONAL SCULPTING DEVICE 审中-公开
    ELEKTRONENKANONE，ELEKTRONENKANONENSTEUERUNGSVERFAHREN UND-TEUERUNGSPROGRAMM UND VORRICHTUNG ZUR DREIDIMENSIONALEN FORMUNG

    公开(公告)号：EP3065161A1

    公开(公告)日：2016-09-07

    申请号：EP15778595.7

    申请日：2015-01-09

    申请人： Technology Research Association For Future Additive Manufacturing

    发明人： SATO, Takashi

    IPC分类号： H01J37/06 ,  H01J37/04

    CPC分类号： H01J37/065 ,  B22F3/1055 ,  B22F2003/1056 ,  B22F2003/1057 ,  B22F2999/00 ,  B33Y30/00 ,  H01J3/08 ,  H01J3/12 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/06308 ,  H01J2237/0653 ,  Y02P10/295 ,  B22F2203/03 ,  B22F2202/06 ,  B22F2202/11

    摘要： When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.

    摘要翻译： 当发射电流改变时，防止电子束的亮度降低。 电子枪包括发射热电子的阴极，聚焦热电子的Wehnelt电极，从所述阴极的远端提取热电子的控制电极，加热热电子并用热电子照射粉末作为电子束的阳极 以及最佳条件收集控制器，其改变要施加到所述Wehnelt电极的偏置电压和要施加到所述控制电极的控制电极电压中的至少一个，并且将所述偏置电压和所述控制电极电压的组合 电子束的亮度达到峰值。