FILM-FORMING COMPOSITION INCLUDING FLUORINE-CONTAINING SURFACTANT
    7.
    发明公开
    FILM-FORMING COMPOSITION INCLUDING FLUORINE-CONTAINING SURFACTANT 审中-公开
    迷迭香ZUSAMMENSETZUNG MIT FLUORHALTIGEM TENSID

    公开(公告)号:EP3106921A1

    公开(公告)日:2016-12-21

    申请号:EP15749601.9

    申请日:2015-01-30

    摘要: There is provided a film with reduced formation of an edge reservoir at a periphery of a film in which the edge reservoir causes an unnecessary residue that cannot be removed by an etching process, and a method for forming the film. A film forming composition for use in a lithography process, the film forming composition comprising a surfactant containing a polymer and an oligomer having a C 3-5 perfluoroalkyl partial structure. The perfluoroalkyl partial structure preferably has a carbon number of 4. The perfluoroalkyl partial structure may further include an alkyl partial structure, and the polymer and the oligomer are preferably a (meth)acrylate polymer and a (meth)acrylate oligomer, respectively. The surfactant is contained in an amount of 0.0001% by mass to 1.5% by mass based on the total solid content of the film forming composition. The film forming composition further comprises a coating film resin, and the coating film resin is a novolac resin, a condensation epoxy resin, a (meth)acylic resin, a polyether-based resin, or a silicon-containing resin, etc. The formed film can be used as a resist underlayer film or a resist overlayer film.

    摘要翻译: 提供了一种薄膜,其在边缘储存器的周围形成边缘储存器,其中边缘储存器引起不能通过蚀刻工艺去除的不必要的残留物,以及用于形成膜的方法。 一种用于光刻工艺的成膜组合物,所述成膜组合物包含含有聚合物的表面活性剂和具有C 3-5全氟烷基部分结构的低聚物。 全氟烷基部分结构优选碳数为4.全氟烷基部分结构还可以包括烷基部分结构,聚合物和低聚物分别优选为(甲基)丙烯酸酯聚合物和(甲基)丙烯酸酯低聚物。 表面活性剂的含量相对于成膜组合物的总固体成分为0.0001质量%〜1.5质量%。 成膜组合物还包含涂膜树脂,涂膜树脂是酚醛清漆树脂,缩合环氧树脂,(甲基)酰基树脂,聚醚基树脂或含硅树脂等。形成的 膜可以用作抗蚀剂下层膜或抗蚀剂覆盖膜。

    POLYMER COMPOSITION CROSSLINKABLE WITH ULTRAVIOLET
    10.
    发明公开
    POLYMER COMPOSITION CROSSLINKABLE WITH ULTRAVIOLET 无效
    UV-VERNETZBARE POLYMERZUSAMMENSETZUNG

    公开(公告)号:EP1227134A4

    公开(公告)日:2002-11-05

    申请号:EP00955053

    申请日:2000-08-28

    申请人: DAIKIN IND LTD

    摘要: A polymer composition crosslinkable with ultraviolet which comprises a polymer containing 0.001 to 10 wt.% iodine and/or bromine and, incorporated therein, a photoinitiator as a crosslinking agent and a polyfunctional unsaturated compound as a crosslinking aid. By using iodine and/or bromine as crosslinking sites, various polymers including fluoropolymers, which have conventionally been extremely difficult to crosslink with ultraviolet, can be crosslinked with ultraviolet and can be easily applied in situ at low temperatures.

    摘要翻译: 用紫外线交联的聚合物组合物,该聚合物组合物包含含有0.001-10重量%碘和/或溴的聚合物,并在其中引入作为交联剂的光引发剂和作为交联助剂的多官能不饱和化合物。 通过使用碘和/或溴作为交联位点,包括含氟聚合物的各种聚合物(其通常非常难以与紫外线交联)可以与紫外线交联并且可以容易地在低温下原位施用。