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公开(公告)号:JP6305703B2
公开(公告)日:2018-04-04
申请号:JP2013164427
申请日:2013-08-07
IPC: H01J37/29 , H01J37/20 , H01J37/22 , H01L21/66 , G01N23/2251 , G01N23/203 , G01N23/2206 , H01J37/28
CPC classification number: H01J37/241 , H01J37/265 , H01J37/29 , H01J2237/047 , H01J2237/226
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公开(公告)号:JP6275575B2
公开(公告)日:2018-02-07
申请号:JP2014141481
申请日:2014-07-09
Applicant: 住友重機械イオンテクノロジー株式会社
IPC: H01J37/12 , H01L21/265 , H01J37/317
CPC classification number: H01J37/241 , H01J37/3171
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公开(公告)号:JP5959326B2
公开(公告)日:2016-08-02
申请号:JP2012132103
申请日:2012-06-11
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01J37/067 , H01J37/16 , H01J37/248
CPC classification number: H01J37/04 , H01J27/024 , H01J29/485 , H01J37/026 , H01J37/067 , H01J37/073 , H01J37/241 , H01J37/248 , H01J2237/16 , H01J37/16
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公开(公告)号:JP2009530792A
公开(公告)日:2009-08-27
申请号:JP2009501446
申请日:2007-03-09
Applicant: アクセリス テクノロジーズ, インコーポレイテッド
Inventor: イェ,ジョン , ウェイグォ,チェ , スプリンター,パトリック , タオ,デイヴィッド , ホアン,ヨンザン
IPC: H01J37/317 , H01J27/02 , H01J37/08
CPC classification number: H01J37/3171 , H01J37/241 , H01J37/248 , H01J37/304
Abstract: The present invention is directed to a circuit and method for quickly quenching an arc that may form between high voltage extraction and/or suppression electrodes associated with an ion source of an ion implantation system to shorten the duration of the arc and mitigate non-uniform ion implantations, for example. The circuit and method also facilitates repainting the ion beam over those areas where an arc was detected to recover any dose loss during such arcing. A high voltage high speed switching circuit is added between each high voltage supply and its respective electrode to quickly extinguish the arc which may otherwise substantially discharge a HV capacitor of the supply and disrupt ion beam current which slowly recovers. The high voltage switch is controlled by a trigger circuit which detects voltage or current changes to each electrode. Protection circuits for the HV switch absorb energy from reactive components and clamp any overvoltages to protect the HV switches.
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公开(公告)号:JP2009187950A
公开(公告)日:2009-08-20
申请号:JP2009027512
申请日:2009-02-09
Applicant: Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh , アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー
Inventor: FROSIEN JUERGEN
IPC: H01J27/26 , H01J37/08 , H01J37/317
CPC classification number: H01J37/08 , H01J27/26 , H01J37/241 , H01J37/243 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/0827 , H01J2237/28 , H01J2237/317
Abstract: PROBLEM TO BE SOLVED: To provide a focused ion beam device with a simpler structure and its operation method. SOLUTION: The focused ion beam device includes an ion beam column including a case for housing a gas electric field ion source emitter with an emitter area for generating ions, an electrode for extracting ions from the gas electric field ion source emitter, one or more gas inlets adapted to introduce a first gas and a second gas to the emitter area, an objective lens for focusing the ion beam generated from the first gas or the second gas, a voltage supply for supplying a voltage between the electrode and the gas electric field ion source emitter, and a controller for switching between a first voltage and a second voltage of the voltage supply for generating an ion beam of ions of the first gas or an ion beam of ions of the second gas. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题:提供具有更简单结构的聚焦离子束装置及其操作方法。 解决方案:聚焦离子束装置包括离子束柱,其包括用于容纳具有用于产生离子的发射极区域的气体电场离子源发射器的壳体,用于从气体电场离子源发射器提取离子的电极, 或更多的气体入口适于将第一气体和第二气体引入到发射器区域,用于聚焦从第一气体或第二气体产生的离子束的物镜,用于在电极和气体之间提供电压的电压源 电场离子源发射器和用于在电压源的第一电压和第二电压之间切换的控制器,用于产生第一气体的离子离子束或第二气体的离子离子束。 版权所有(C)2009,JPO&INPIT
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16.
公开(公告)号:JP2007529091A
公开(公告)日:2007-10-18
申请号:JP2006554300
申请日:2005-02-18
Applicant: エフ イー アイ カンパニFei Company , オーストラリアン・ナショナル・ユニヴァーシティ
Inventor: ケラー,ジョン , サザーランド,オーソン , スミス,ノエル , チャールズ,クリスティン , ボズウェル,ローデリック , ローレンス,シピオニー
IPC: H01J27/16 , C23C16/00 , H01J37/08 , H01J37/317
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: 本発明では、プローブ形成光学素子との組み合わせ使用に適し、ソース源によって誘起される速度エネルギーの振動が生じない、誘導結合式磁気増幅イオンビーム源が提供される。
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公开(公告)号:JPS59211950A
公开(公告)日:1984-11-30
申请号:JP8681183
申请日:1983-05-16
Applicant: Mitsubishi Electric Corp
Inventor: YABUNAKA FUMIHARU , MURAKAMI EISHIN
IPC: H01J37/06 , H01J37/24 , H01J37/30 , H01J37/315
CPC classification number: H01J37/241
Abstract: PURPOSE:To keep off the occurrence of any machining damage to a workpiece due to the runaway flow of an electron beam current, by detecting the input or output of a grid power source and comparing it with a reference value, while controlling the output of a high tension power source for an electron gun according to this compared value. CONSTITUTION:An output current of a grid power source 7 is detected by a resistor 21 and converted into a frequency signal by a VF converter 22, then further converted into an optical signal by a luminous element 31 via an amplifier 23. This optical signal is transmitted to a light receiving element 33 at a low potential part from a high potential part via an optical fiber cable 32 and reconverted into a voltage signal by both of the light receiving element 33 and a VF converter 41. A comparator 43 compares the output signal of a reference signal setter 42 with the output signal of the FV converter 41, and when the output signal of the FV converter 41 grows larger than the output of the reference signal setter 42, the comparator 43 outputs a signal to cope with that. And, when an increase in the output current of the grid power source 7 is detected by a main power output intervention discriminator 46, a cable way switch 51 is controlled by the output of the said discriminator 46 and a cable way between the main power source and a boosting transformer 2 is cut off.
Abstract translation: 目的:通过检测电网电源的输入或输出并将其与参考值进行比较,以防止由于电子束电流的失控而对工件造成任何加工损坏,同时控制a的输出 根据这个比较值,电子枪的高压电源。 构成:电网电源7的输出电流由电阻器21检测,并由VF转换器22转换为频率信号,然后经由放大器23由发光元件31进一步转换为光信号。该光信号为 经由光纤电缆32从高电位部分向低电位部分的光接收元件33传输,并通过光接收元件33和VF转换器41被转换成电压信号。比较器43将输出信号 具有FV转换器41的输出信号的参考信号设置器42,并且当FV转换器41的输出信号增大到大于参考信号设置器42的输出时,比较器43输出一个信号。 而且,当通过主电力输出干预鉴别器46检测到电网电源7的输出电流的增加时,电缆方式开关51由所述鉴频器46的输出和主电源 并且切断升压变压器2。
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公开(公告)号:JPS59119665A
公开(公告)日:1984-07-10
申请号:JP23158282
申请日:1982-12-24
Applicant: Nec Corp
Inventor: KOBAYASHI HIDEKI
IPC: H01J37/315 , B23K15/02 , H01J37/24
CPC classification number: H01J37/241
Abstract: PURPOSE:To stabilize beam acceleration voltage relatively cheap by using an automatic correction device of beam acceleration voltage in which the automatic voltage correction function is made to stop for a period of electron beam projection. CONSTITUTION:Input of a high voltage generation device 1 is connected with a variable transformer 3 of an automatic correction device 2 of beam acceleration voltage while parting beam acceleration voltage to be impressed between a cathode 5 and an anode 6 of the electron beam generation part 4 by resistance 7 as well as turning and reversing a motor 12 in comparison with an instruction signal 8 in order to control beam acceleration voltage. Further, an electromagnetic clutch 17 is provided to be projected into only for a period in which emission of an electron beam 13 is stopped in order to operate the automatic correction device 2. Accordingly, the fluctuation of line voltage is gentle when emitting beam 13 so that the voltage is stabilized during this time without control thus enabling the automatic correction device 2 to be used relatively cheap.
Abstract translation: 目的:通过使用自动电压校正功能停止一段电子束投影的光束加速电压的自动校正装置来稳定光束加速电压相对便宜。 构成:高电压发生装置1的输入与光束加速电压的自动校正装置2的可变变压器3连接,同时将分压光束加速电压施加到电子束产生部4的阴极5和阳极6之间 通过电阻7以及与指令信号8相比转动和反转电动机12以便控制光束加速电压。 此外,为了操作自动校正装置2,电磁离合器17被设置为仅投射电子束13的发射停止的时间段。因此,当发射光束13因此,线电压的波动是平缓的 在此期间电压稳定而没有控制,从而使自动校正装置2能够相对便宜地使用。
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19.
公开(公告)号:JPS5940449A
公开(公告)日:1984-03-06
申请号:JP15220382
申请日:1982-08-30
Applicant: Mitsubishi Electric Corp
Inventor: MURAKAMI EISHIN , YASUNAGA MASASHI
IPC: H01J37/06 , H01J37/24 , H01J37/248 , H01J37/315
CPC classification number: H01J37/241
Abstract: PURPOSE:To make a device small-sized and perform a stable control by providing a bias circuit tap on the secondary winding of an insulated transformer for heating a cathode and controlling the bias voltage through a negative-feedback circuit of a pulse width-modulated light signal. CONSTITUTION:A main power supply 1 is stepped up 2, rectified 3 and applied to a cathode 5, which is heated by a heating power supply 10 connected to an insulated transformer 25. An electron beam 7 machines a work 8 and the current value of the beam 7 is controlled by a current control device 24. The current value is detected by a resistor 13, compared with a reference power supply 15 and fed to a PID regulator 17. The output of the regulator 17 is fed to a light emitting diode 27 through a PWM circuit 26. A light signal is sensed by a photosensing diode 29 through an optical fiber cable 28. The sensed signal is demodulated and controls the input voltage of a bias transformer 35 through a transistor 33. The output of the transformer 35 is rectified and applied across the cathode 5 and a Wehnelt electrode 12. Accordingly, the device can be made small-sized and perform a stable control.
Abstract translation: 目的:通过在绝缘变压器的二次绕组上设置偏压电路抽头来加热阴极,并通过脉冲宽度调制光的负反馈电路控制偏置电压,使器件小型化并进行稳定的控制 信号。 构成:主电源1被升压2,整流3并施加到阴极5,阴极5由连接到绝缘变压器25的加热电源10加热。电子束7将工件8加载到电流 光束7由电流控制装置24控制。与参考电源15相比,电流值被电阻13检测并馈送到PID调节器17.调节器17的输出被馈送到发光二极管 光信号由光敏二极管29通过光纤电缆28感测。所感测的信号被解调并通过晶体管33控制偏置变压器35的输入电压。变压器35的输出 被整流并施加在阴极5和Wehnelt电极12上。因此,该器件可以制成小尺寸并且执行稳定的控制。
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公开(公告)号:JPS5750757A
公开(公告)日:1982-03-25
申请号:JP12580780
申请日:1980-09-10
Applicant: Mitsubishi Electric Corp
Inventor: HARA KATSUNORI , HOSONO ISAMU
IPC: H01J37/248 , H01J37/24 , H02J1/00
CPC classification number: H01J37/241
Abstract: PURPOSE:To reduce the cost by employing single insulated transformer while controlling the grid voltage at high potential by means of an electron beam current controller thereby reducing the size and simplifying. CONSTITUTION:Each power sources A, B, C, for filament, shock and grid to be connected to the electron beam acceleration voltage are power supplied from three secondary windings of single common insulation transformer 1d. The electron beam current controller 7b is connected to the secondary winding for the grid power source of the transformer 1d thus to peroform the control of the grid voltage under high potential. When employing a common insulation transformer in such a manner, the common insulation level is achieved while the size is reduced and when reducing the required number of the insulated transformer the wiring work is simplified resulting in the reduction of cost.
Abstract translation: 目的:通过使用单个绝缘变压器,通过电子束电流控制器控制高电位电网电压,从而减小尺寸和简化,降低成本。 构成:用于灯丝,电击和电网连接的电子束加速电压的每个电源A,B,C由单个公共绝缘变压器1d的三个次级绕组供电。 电子束电流控制器7b连接到变压器1d的电网电源的次级绕组,从而在高电位下实现电网电压的控制。 当采用公共绝缘变压器时,在大小减小的同时实现公共绝缘水平,并且当减少所需数量的绝缘变压器时,布线工作简化,从而降低成本。
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