Abstract:
PROBLEM TO BE SOLVED: To provide an angular velocity sensor in which deterioration in detection accuracy of angular velocity is suppressed.SOLUTION: An angular velocity sensor has: a vibrator 11 which is positioned on an x-y plane defined by an x-direction and a y-direction which are in an orthogonal relation; a substrate 12 which is apart from the vibrator 11 in a z-direction perpendicular to the x-y plane; an anchor 13 extending from the substrate 12 to the x-y plane on which the vibrator 11 is positioned; a connecting beam 14 which connects the anchor 13 with the vibrator 11 and can be twisted about the y-direction; an excitation section 50 which vibrates the vibrator 11 in the z-direction; and a detecting section 70 which detects angular velocity based on a displacement of the vibrator 11 in the x-direction. A connection portion P1 with the connecting beam 14 in the vibrator 11 is a portion which becomes a node when the vibrator 11 vibrates in the z-direction.
Abstract:
An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.
Abstract:
PROBLEM TO BE SOLVED: To provide a gyro sensor which is reduced in size.SOLUTION: A gyro sensor 10 includes an outer mass portion 40 equipped with a first detecting portion 42; a second mass portion 20 equipped with a second detecting portion 22; first driving portions 70a and 70b for vibrating the first mass portion 40 in a first axis direction; and a force converting portion 80 fixed by an anchor portion 90. The first mass portion 40 and the second mass portion 20 are connected by the force converting portion 80. The force converting portion 80 displaces about the anchor portion 90 as an axis, and vibrates the second mass portion 20 in a second axis direction intersecting the first axis in a plane view.
Abstract:
PROBLEM TO BE SOLVED: To provide a driving circuit, a physical quantity detector, an angular speed detector, an integrated circuit device, and an electronic apparatus, which reduce a time until an oscillator is stably oscillated and also can maintain the stable oscillation.SOLUTION: A comparator 210 (driving signal generating section) generates a driving signal 22 based on such a signal that an oscillation current 24 of an oscillator 100 inputted through a first signal line is converted to a voltage by an I/V conversion circuit 200 (current/voltage converting section), to supply it to the oscillator through a second signal line. An oscillation detecting circuit 270 (oscillation detecting section) detects whether the oscillation current 24 reaches a specified value or not, from the time the oscillator 100 starts the oscillation. A starting oscillation circuit 280 (starting oscillation section) assists the oscillating operation of the oscillator 100 until the oscillation current 24 reaches the specified value. A switch 218 separates off a capacitor 216 from the second signal line until the oscillation current 24 reaches the specified value, and connects the capacitor 216 to the second signal line after the oscillation current 24 reaches the specified value.