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    Appearance inspection device having scanning electron microscope and image formation method using scanning electron microscope
    38.
    发明专利
    Appearance inspection device having scanning electron microscope and image formation method using scanning electron microscope 有权
    具有扫描电子显微镜的外观检查装置和使用扫描电子显微镜的图像形成方法

    公开(公告)号：JP2009032445A

    公开(公告)日：2009-02-12

    申请号：JP2007193244

    申请日：2007-07-25

    Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    Inventor： MIYAI YASUSHI ,  OONAMI YUSUKE ,  GUNJI YASUHIRO

    IPC: H01J37/28 ,  H01J37/22

    CPC classification number: G01N23/225 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24495 ,  H01J2237/2487 ,  H01J2237/2817

    Abstract: PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method using a scanning electron microscope which detects an highly-accurate electron beam image and excludes limitation of an AD conversion element for a sampling rate as a subject matter.
    SOLUTION: A sampling signal is obtained by sampling an analog brightness signal formed by a secondary electron detector at a designated sampling rate. N digital values are added in sequence per every continuous N digital values included in the sampling signal, and the digital brightness signal at one Nth frequency of the sampling frequency is formed. Then, a digital signal made of digital values of the bit number same as the bit number of the sampling signal is formed by dividing each digital value of the digital brightness signal by N. An image signal wherein each digital value of the digital signal becomes one pixel is formed.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种使用扫描电子显微镜的检查装置和检查方法，该扫描电子显微镜检测高精度的电子束图像，并且排除作为主题的采样率的AD转换元件的限制。 解决方案：通过以指定的采样率对由二次电子检测器形成的模拟亮度信号进行采样来获得采样信号。 N个数字值依次包含在采样信号中的每个连续的N个数字值，并且形成采样频率的第N个频率的数字亮度信号。 然后，通过将数字亮度信号的每个数字值除以N来形成由数字值与采样信号的位数相同的数字值的数字信号。数字信号的每个数字值变为1的图像信号 形成像素。 版权所有（C）2009，JPO＆INPIT

    Image forming method and electron microscope
    39.
    发明专利
    Image forming method and electron microscope 有权
    图像形成方法和电子显微镜

    公开(公告)号：JP2008226742A

    公开(公告)日：2008-09-25

    申请号：JP2007065979

    申请日：2007-03-15

    Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    Inventor： NAGAOKI ISAO ,  NAKAYAMA YOSHIHIKO ,  ISHII RYOICHI

    IPC: H01J37/22 ,  H01J37/26

    CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/226 ,  H01J2237/2487 ,  H01J2237/2611 ,  H01J2237/2617 ,  H01J2237/262 ,  H01J2237/2802

    Abstract: PROBLEM TO BE SOLVED: To provide an image forming method and an electron microscope capable of accurately or effectively acquiring information required for comparison regarding an image forming method accompanying with comparison among images such as three-dimensional image construction and a device for forming such images.
    SOLUTION: In the image forming method for forming the image on the basis of the comparison among a plurality of images obtained by irradiation of electron beams through different inclined angles on a testpiece, a first transmission image obtained by the electron beam irradiated from the first direction and a second transmission image in a zone different from a peripherally blur zone caused by an inclination as a second direction are obtained, and the first transmission image can be searched by using the second transmission image.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种图像形成方法和电子显微镜，其能够准确或有效地获取与图像形成方法相关的比较所需的信息，所述图像形成方法伴随着诸如三维图像构造的图像与形成装置之间的比较 这样的图像。 解决方案：在用于通过在试件上通过不同倾斜角照射电子束而获得的多个图像之间的比较的图像形成方法中，通过从试验片上照射的电子束获得的第一透射图像 获得与作为第二方向的倾斜引起的与周边模糊区域不同的区域中的第一方向和第二透射图像，并且可以通过使用第二透射图像来搜索第一透射图像。 版权所有（C）2008，JPO＆INPIT

    High-energy ion implantation device controlling electrode voltage phase by applying digital frequency synthesis and phase synthesis, and method for correctly calibrating electrode voltage phase
    40.
    发明专利
    High-energy ion implantation device controlling electrode voltage phase by applying digital frequency synthesis and phase synthesis, and method for correctly calibrating electrode voltage phase 审中-公开
    通过应用数字频率合成和相位合成控制电极电压阶段的高能离子植入装置，以及正确校准电极电压相位的方法

    公开(公告)号：JP2007265966A

    公开(公告)日：2007-10-11

    申请号：JP2007009456

    申请日：2007-01-18

    Applicant: Axcelis Technologies Inc ,  アクセリス テクノロジーズ インコーポレーテッド

    Inventor： BERNHARDT DAVID K

    IPC: H05H9/00 ,  G21K5/00 ,  G21K5/04 ,  H01J37/317 ,  H01L21/265 ,  H03B28/00

    CPC classification number: H01J37/3172 ,  H01J37/248 ,  H01J2237/2487 ,  H01J2237/30411

    Abstract: PROBLEM TO BE SOLVED: To provide an LINAC improved by utilizing direct digital synthesis (DDS) techniques to obtain precise frequency and phase control and automated electrode voltage phase calibration; and to provide an HE ion implantation system using it. SOLUTION: A DDS controller 130 may be used on an implantation process using a multi-stage linear accelerator to synchronize the frequency and phase of the electric fields to each electrode within each stage of the accelerator. The DDS controller includes digital phase synthesis (DPS) circuits 138 for modulating the phase of the electric field to the electrodes, and a master oscillator that uses digital frequency synthesis or DFS 134 to digitally synthesize a master frequency and a master phase applied to each of the DPS circuits. This method for automatically calibrating phase and amplitude of the RF electrode voltage of each stage is provided as well. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：通过利用直接数字合成（DDS）技术提供改进的LINAC，以获得精确的频率和相位控制和自动电极电压相位校准; 并提供使用它的HE离子注入系统。 解决方案：DDS控制器130可以在使用多级线性加速器的注入过程中用于使电场的频率和相位与加速器的每个阶段内的每个电极同步。 DDS控制器包括数字相位合成（DPS）电路138，用于将电场的相位调制到电极;以及主振荡器，其使用数字频率合成或DFS134来数字地合成主频率和主相， DPS电路。 还提供了用于自动校准每个级的RF电极电压的相位和幅度的方法。 版权所有（C）2008，JPO＆INPIT

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