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    Electron beam machining device
    42.
    发明专利
    Electron beam machining device 失效
    电子束加工设备

    公开(公告)号：JPS5940450A

    公开(公告)日：1984-03-06

    申请号：JP15220482

    申请日：1982-08-30

    Applicant: Mitsubishi Electric Corp

    Inventor： YASUNAGA MASASHI ,  HARA KATSUNORI

    IPC: H01J37/06 ,  H01J37/24 ,  H01J37/248 ,  H01J37/315

    CPC classification number: H01J37/241

    Abstract: PURPOSE:To make a device small-sized and perform a stable control by using an insulated transformer to feed a high potential portion accelerating an electron beam and controlling a beam control system with a negative-feedback circuit including a light emitting element, an optical transmission path and a photosensing element. CONSTITUTION:A main power supply 1 is stepped up 1, rectified 3 and applied to a cathode 27. An auxiliary power supply 50 is fed to a filament 9, a bombard power supply 14 and a bias power supply 25 through an insulated transformer 51. An electron beam 30 machines a work 31 and the current value of the beam 30 is detected by a resistor 15. The detected value is compared with the output of a current setter 16 and fed to a PIP regulator 18. The output of the regulator 18 is converted into a light signal by a light emitting diode 52 and fed to a photosensing transistor 54 through an optical fiber cable 53 to be converted into an electric signal. An amplified 55 output is fed to a power transistor 56 to control the input voltage of a transformer 58, and a rectified 23 output is applied across the cathode 27 and a Wehnelt electrode 28. Accordingly, the device can be made small-sized and perform a stable control.

    Abstract translation: 目的：通过使用绝缘变压器对加速电子束的高电位部分进行放电，并利用包括发光元件的负反馈电路控制光束控制系统，使设备小型化并进行稳定的控制，光传输 路径和光敏元件。 构成：主电源1升压1，整流3并施加到阴极27.辅助电源50通过绝缘变压器51馈送到灯丝9，轰击电源14和偏置电源25。 电子束30对工件31进行加工，并且由电阻器15检测光束30的当前值。将检测值与电流设定器16的输出进行比较并馈送到PIP调节器18.调节器18的输出 通过发光二极管52转换为光信号，并通过光纤电缆53馈送到感光晶体管54，以转换成电信号。 放大的55输出被馈送到功率晶体管56以控制变压器58的输入电压，并且整流的23输出施加在阴极27和Wehnelt电极28上。因此，该器件可以制成小尺寸并执行 稳定的控制。

    Ion gun of ima
    43.
    发明专利
    Ion gun of ima 失效
    IMA的离子枪

    公开(公告)号：JPS5935346A

    公开(公告)日：1984-02-27

    申请号：JP14470682

    申请日：1982-08-23

    Applicant: Hitachi Ltd

    Inventor： IZUMI EIICHI

    IPC: H01J37/08 ,  H01J3/04 ,  H01J27/02 ,  H01J37/24 ,  H01J37/252

    CPC classification number: H01J37/241

    Abstract: PURPOSE:To obtain a well-controllable ion gun of IMA by impressing to a control electrode, added voltage consisting of the primary ion acceleration voltage to be preset according to the ions supplied to a sample and the voltage to be preset in a certain relation to the acceleration voltage. CONSTITUTION:An ion gun is composed of a cathode electrode 1, an intermediate electrode 2, an anode electrode 3 and a control electrode 4. The primary acceleration power supply 8 is connected to the electrode 3 while the control power supply 7 is connected to the electrode 4. The output voltage of the power supply 8 is set up by a voltage setter 11 while the output voltage of the power supply 7 is set up by an adder 13. The adder 13 produces voltage 3V by adding voltage V1 of setter 11 to voltage V2 of setter 12. In this way, the control voltage is changed in proportion to the primary ion acceleration voltage thus enabling to obtain a well-controllable ion gun of IMA.

    Abstract translation: 目的：为了通过对控制电极施加压力来获得IMA的良好控制的离子枪，添加的电压由根据提供给样品的离子预设的初级离子加速电压和与预定的电压成一定关系 加速电压。 构成：离子枪由阴极电极1，中间电极2，阳极电极3和控制电极4构成。主加速电源8与电极3连接，同时控制电源7连接到 电源8的输出电压由电压设定器11建立，而电源7的输出电压由加法器13设定。加法器13通过将设定器11的电压V1加到 以这种方式，控制电压与初级离子加速电压成比例地改变，从而能够获得IMA的良好控制的离子枪。

    Power transformer
    44.
    发明专利
    Power transformer 失效
    电力变压器

    公开(公告)号：JPS58223249A

    公开(公告)日：1983-12-24

    申请号：JP10486582

    申请日：1982-06-18

    Applicant: Jeol Ltd

    Inventor： TOMITA TAKESHI

    IPC: H01J37/248 ,  H01F30/00 ,  H01J37/24 ,  H05H5/00

    CPC classification number: H01J37/241

    Abstract: PURPOSE:To make a device compact by arranging an insulation transformer on both sides of an acceleration tube and using the split resistor of the acceleration tube additionally as that of the transformer so that a magnetic field can be formed on an axle. CONSTITUTION:An insulation transformer consists of two series of serially connected insulation transformers 8a1-8e1 and 8a2-8e2. These transformers are arranged symmetrically with respect to an electron beam optical axis Z on both sides of the peripheral section of an acceleration tube 14. Ring-type transformer cores 12a1-12e1 and 12a2-12e2 are connected to ring-type acceleration electrodes 15a-15f and the split resistors 18a-18f connected to the electrodes are used additionally as the split resistors for the transformer. As a result, the space of the transformer can be saved and the split resistors for the transformer and a part of housing can be removed. Besides, a device can be made compact and power can safely be transmitted.

    Abstract translation: 目的：通过在加速管的两侧配置绝缘变压器，并且使用加速管的分压电阻作为变压器的分压电阻，使得可以在轴上形成磁场，使装置紧凑。 构成：绝缘变压器由两系列串联的绝缘变压器8a1-8e1和8a2-8e2组成。 这些变压器相对于加速管14的周边部分的两侧的电子束光轴Z对称地配置。环形变压器铁心12a1-12e1和12a2-12e2连接到环形加速电极15a-15f 并且连接到电极的分离电阻器18a-18f另外用作变压器的分离电阻器。 因此，可以节省变压器的空间，并且可以去除变压器的分离电阻和外壳的一部分。 此外，可以使设备紧凑，并且可以安全地传输电力。

    Field discharge type electron gun
    45.
    发明专利
    Field discharge type electron gun 失效
    现场放电型电子枪

    公开(公告)号：JPS5778757A

    公开(公告)日：1982-05-17

    申请号：JP15362280

    申请日：1980-10-31

    Applicant: Jeol Ltd

    Inventor： SAITOU SHIYUUICHI ,  OOYAMA JIYUNICHI

    IPC: H01J3/02 ,  H01J37/073 ,  H01J37/24

    CPC classification number: H01J37/241

    Abstract: PURPOSE:To reduce the frequency of flashing by compensating the lowering of the emission due to the contamination of the emitter face such that the control electrode potential is brought near to the anode potential while the accelertion voltage is increased. CONSTITUTION:An acceleration power source 4 between an anode 3 and an emitter 1 and a bias power source 5 between the emitter 1 and a control electrode 2 are controlled through drive circuits 12, 14 by detecting the emission current through a resistor 6 then comparing with the referential power source 10 by means of differential amplifiers 7, 8. At first switches 11, 13 are turned to the side (a) to set the acceleration voltage and when the emission current reaches to 80% of the setting level they are switched by a coincidence circuit 9 to transfer to the stabilization due to the control electrode potential control. Consequently the acceleration voltage can be increased accordingly even if the contamination on the emitter surface is promoted thereby it can be started continuously under high efficiency.

    Abstract translation: 目的：通过补偿由于发射体面的污染引起的发射的降低来降低闪烁频率，使得在加速电压增加时控制电极电位接近阳极电位。 构成：通过检测通过电阻器6的发射电流，通过驱动电路12,14来控制在发射极1和控制电极2之间的阳极3与发射极1之间的加速电源4和偏置电源5，然后与 参考电源10通过差分放大器7,8进行。首先开关11,13转向侧面（a）以设定加速电压，并且当发射电流达到设定电平的80％时，它们被切换 由于控制电极电位控制而转移到稳定的符合电路9。 因此，即使促进了发射体表面的污染，也可以相应地增加加速电压，从而能够以高效率连续地起动。

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