Abstract:
PROBLEM TO BE SOLVED: To provide a mass spectroscope device with raised controllability of an addition amount of water molecules which can reduce device contamination and avoid enlarging and complicating the device, and moreover, to provide a mass spectroscope device using an irradiation device which can emit both primary ions and particles for water molecule addition.SOLUTION: A mass spectroscope device, which irradiates a sample with primary ions to perform mass spectrometry of secondary ions emitted from the sample, includes a chamber for placing the sample, irradiation means for irradiating the sample with particles, and an extraction electrode for guiding the secondary ions emitted from the sample to mass spectrometry means. The irradiation means is means for switching between a first mode of radiating the primary ions for emitting the secondary ions from the sample and a second mode of emitting particles containing water molecules to be adhered to the sample, thereby irradiating the sample with the particles.
Abstract:
PROBLEM TO BE SOLVED: To provide a mass distribution analysis method which can reduce an influence to a mass analysis result due to time variety of irradiation of an ionized beam to a sample and measure a mass distribution having high reliability.SOLUTION: There is provided a mass distribution analysis method which irradiates a sample with a primary ion beam and detects generated secondary ions, in which the primary ion beam has a spread in a direction perpendicular to an advancing direction, and an orbit of the primary ion beam is deflected so as to adjust a path length from a primary ion source of each of primary ions included in the primary ion beam to a sample surface, and then the primary ion beam is injected inclining to the sample surface.
Abstract:
PROBLEM TO BE SOLVED: To provide a sample analysis method for making the intensity distribution information of Raman vibration obtained from Raman spectroscopy accurately associated with the mass information obtained from mass spectroscopy, which has not been known while a method for superimposing a mass distribution image and an image from an optical microscope using a maker is known.SOLUTION: A sample is disposed on a substrate, and a marker having a three-dimensional shape with a height equal to or higher than the surface of the sample is disposed at the periphery of the sample. The sample and the marker are analyzed by Raman spectroscopy and mass spectroscopy. The obtained intensity distribution information of Raman vibration and the mass information are aligned based on the information of the marker.
Abstract:
PROBLEM TO BE SOLVED: To prevent degradation of an electron emission device by suppressing a rise in potential on an insulated face on a substrate without using an antistatic film or the like in an image display apparatus having the electron emission device. SOLUTION: A shortest distance L (μm) from any point on the insulated face exposed on the substrate to a conductive member on the substrate and a surface resistivity Rs (Ω/square) at any point satisfy Rs×L 2 22 (Ω×μm 2 ). COPYRIGHT: (C)2010,JPO&INPIT