公开(公告)号：JP2006318263A

公开(公告)日：2006-11-24

申请号：JP2005141036

申请日：2005-05-13

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TOYOSHIMA TETSURO

IPC: G05B19/418 ,  G06Q50/00 ,  G06Q50/04

CPC classification number: Y02P90/22 ,  Y02P90/30

Abstract: PROBLEM TO BE SOLVED: To provide an information analysis system capable of easily and surely specifying an explanatory variable affecting a criterion variable about the criterion variable related to quality of a product and the explanatory variable related to production of the product. SOLUTION: With respect to a production process of a semiconductor device, history information related to a processor used in each the process is stored in a process information collection part 3 as the explanatory variable of multi-valued information. A value of a yield that is the criterion variable is also stored in the process information collection part 3. When the yield that is the criterion variable is reduced as compared to a predetermined reference value, the history information of the process information collection part 3 is converted into a matrix of binary information by a cross totaling part 4. The matrix of the binary information is once stored in a data storage part 5, and an influence degree to the criterion variable is calculated by an analysis part 6. Contents of the influence degree that is a calculation result is displayed on a contribution description part 7 associatively to the explanatory variable. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种信息分析系统，其能够容易且可靠地指定影响关于产品质量的标准变量的标准变量的解释变量和与产品生产相关的说明变量。 解决方案：关于半导体器件的生产过程，与每个过程中使用的处理器相关的历史信息被存储在作为多值信息的解释变量的过程信息收集部分3中。 作为标准变量的收益的值也存储在处理信息收集部分3中。当作为标准变量的收益率与预定参考值相比减小时，处理信息收集部分3的历史信息是 通过交叉合成部分4将二进制信息的矩阵转换成二进制信息的矩阵。二进制信息的矩阵一旦存储在数据存储部分5中，并且通过分析部分6计算对标准变量的影响程度。影响的内容 作为计算结果的度被显示在与说明变量相关联的贡献描述部分7上。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007080963A

公开(公告)日：2007-03-29

申请号：JP2005264086

申请日：2005-09-12

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： DAITO MASAFUMI ,  SHIMIZU KAZUHISA ,  TOYOSHIMA TETSURO

IPC: H01L21/203 ,  C23C14/24 ,  C23C16/52 ,  C30B23/08 ,  H01L21/205

Abstract: PROBLEM TO BE SOLVED: To provide a method and a unit to form a thin film which is formed in its stabilized quality.
SOLUTION: In a crystal growth step, the thin film is formed using a thin film forming apparatus 11. The characteristic value of the thin film formed in this step includes a process error w. In a measuring step, measured characteristic of the formed thin film is measured with a measuring unit 12. The measured characteristic value measured in this step includes a measuring error ν. In a virtual crystal growth step, characteristic value of the thin film formed with a virtual thin film forming apparatus 13 is obtained and an arithmetic characteristic value is computed. In a measuring error removing step, a forecasted characteristic value wherein only the measuring error ν among the process errors w and measuring errors ν is removed from the measuring characteristic value can be computed with a measuring error removing unit 14, on the basis of the computed characteristic value and the measured characteristic value. Moreover, in a apparatus condition determining step, the new apparatus condition of the thin film forming apparatus 11 is determined with a condition setting unit 15 based on the forecasted characteristic value.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供形成稳定质量的薄膜的方法和单元。 解决方案：在晶体生长步骤中，使用薄膜形成装置11形成薄膜。在该步骤中形成的薄膜的特征值包括处理误差w。 在测量步骤中，用测量单元12测量所形成的薄膜的测量特性。在该步骤中测量的测量特征值包括测量误差ν。 在虚拟晶体生长步骤中，获得由虚拟薄膜形成装置13形成的薄膜的特征值，并计算算术特性值。 在测量误差消除步骤中，可以用测量误差去除单元14基于计算出的测量误差去除单元14来计算其中只有处理误差w中的测量误差ν和测量误差ν从测量特性值中去除的预测特征值 特征值和测量特征值。 此外，在装置条件判定步骤中，根据预测的特性值，利用条件设定部15确定薄膜形成装置11的新的装置状态。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007079933A

公开(公告)日：2007-03-29

申请号：JP2005266892

申请日：2005-09-14

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TOYOSHIMA TETSURO

IPC: G05B19/418 ,  G06Q50/00 ,  G06Q50/04

CPC classification number: Y02P90/12 ,  Y02P90/14 ,  Y02P90/30

Abstract: PROBLEM TO BE SOLVED: To provide a production information processing method allowing rapid and accurate specification of an abnormal process or facility. SOLUTION: Facility identification information D1 for specifying a facility wherein production lots are processed in a plurality of processes, and characteristic inspection information D2 showing an inspection result of each the production lot obtained in a characteristic inspection process after completion of the process are associated and are set as a unit processing information U. The unit processing information U of the plurality of production lots are arranged side by side, and a data table D0 is set. The unit processing information U such that the facility identification information D1 is equal with respect to the process is set as a set in each the process, and arrangement order of the unit processing information U is rearranged according to permutation which the sets can take. The case that frequency of a change of the characteristic inspection information D2 according to arrangement order of the unit processing information U becomes minimum is searched for. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供允许快速和准确地规定异常过程或设施的生产信息处理方法。 解决方案：用于指定在多个处理中处理生产批次的设施的设备识别信息D1和表示在完成处理之后的特征检查处理中获得的每个生产批次的检查结果的特征检查信息D2是 并且被设置为单元处理信息U.多个生产批次的单位处理信息U并排布置，并且设置数据表D0。 将处理中的设施识别信息D1设定为相等的单位处理信息U被设定为每个处理中的集合，并且单位处理信息U的排列顺序根据集合可以采取的排列重新排列。 搜索根据单位处理信息U的排列顺序变为最小的特征检查信息D2的变化频率的情况。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005033090A

公开(公告)日：2005-02-03

申请号：JP2003272646

申请日：2003-07-10

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TOYOSHIMA TETSURO

IPC: H01L21/02 ,  G05B23/02

Abstract: PROBLEM TO BE SOLVED: To detect abnormality which occurs in an important process formed of a plurality of processors at an early stage and to remove a factor caused by the device in a manufacturing process.
SOLUTION: A device status discrimination system of the manufacturing process where a plurality of processors are arranged in the same process is provided with a difference information generation means 4 formed of comparators 41, 42 and 43 generating difference information on measurement signals 11, 21 and 31 output from the respective processors 1, 2 and 3, and a status discrimination means 5 formed of logic circuits 51, 52 and 53 discriminating the status of the processors 1, 2 and 3 by synthetically determining a plurality of pieces of difference information generated in the difference information generation means 4. Thus, the abnormal device can be correctly specified at the early stage.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：检测在早期由多个处理器形成的重要过程中发生的异常并且消除在制造过程中由该装置引起的因素。 解决方案：以相同处理方式布置多个处理器的制造过程的设备状态判别系统设置有由比较器41,42和43形成的差分信息产生装置4，差分信息产生装置4产生关于测量信号11， 由各个处理器1,2和3输出的21和31以及由逻辑电路51,52和53形成的状态鉴别装置5，通过合成地确定多个差异信息来区分处理器1,2和3的状态 因此，可以在早期阶段正确地指定异常装置。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004165282A

公开(公告)日：2004-06-10

申请号：JP2002327087

申请日：2002-11-11

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TOYOSHIMA TETSURO

IPC: G05B19/418 ,  G06Q50/00 ,  G06Q50/04 ,  H01L21/02 ,  G06F17/60

CPC classification number: Y02P90/14 ,  Y02P90/30

Abstract: PROBLEM TO BE SOLVED: To detect abnormality which occurs in an important process formed of a plurality of processors at an early stage and to remove a factor of a device result in a manufacturing process. SOLUTION: A device state discrimination system of the manufacturing process where a plurality of processors are arranged in the same process is provided with a difference information generation means 4 formed of comparators 41, 42 and 43 generating difference information on measurement signals 11, 21 and 31 outputted from the respective processors 1, 2 and 3, and a state discrimination means 5 formed of logic circuits 51, 52 and 53 discriminating the states of the processors 1, 2 and 3 by synthetically determining plural pieces of difference information generated in the difference information generation means 4. Thus, the abnormal device can correctly be specified at the early stage. COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2007248198A

公开(公告)日：2007-09-27

申请号：JP2006070741

申请日：2006-03-15

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TOYOSHIMA TETSURO

IPC: G01N21/956 ,  G06T7/00 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To extract each feature axis comprising independent components which are independent of other components from a teaching sample.
SOLUTION: Independent components to the number of p which are estimated values of independent signal sources are acquired by independent component analysis or the like from a set of a characteristic distribution of a sample pertinent to a past example, and a feature space wherein p-dimensional independent component vectors based on the acquired independent components to the number of p are used as each feature axis is set. Hereby, overlapping between each feature space of the pertinent sample and a non-pertinent sample is prevented. Moreover, a feature quantity can be set objectively based on a characteristic distribution of an objective sample by determining the feature quantity of the objective sample by an inner product between the characteristic distribution of the objective sample and the independent feature axis.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：从教学样本中提取独立于其他组件的独立组件的每个特征轴。 解决方案：通过独立分量分析等从与过去示例相关的样本的特征分布的集合中获取独立信号源的估计值的p个数的独立分量，以及特征空间，其中， 使用基于获取的独立分量到p个数的p维独立分量向量来设置每个特征轴。 因此，防止了相关样品的每个特征空间与非相关样品之间的重叠。 此外，可以通过根据客观样本的特征分布和独立特征轴之间的内积来确定客观样本的特征量，基于客观样本的特征分布来客观地设定特征量。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2003084560A

公开(公告)日：2003-03-19

申请号：JP2001276809

申请日：2001-09-12

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： TOYOSHIMA TETSURO ,  IWAMATSU TADASHI ,  AZUMA NOBUYUKI ,  MUTO YOSHINORI ,  HIRAKAWA HIROYUKI

IPC: G03G15/06 ,  G03G15/08

Abstract: PROBLEM TO BE SOLVED: To provide a developing device capable of sufficiently supplying non- magnetic one-component toner without making a developer supply member in press-contact and friction with a developer carrier, and capable of stably obtaining a high density image since the stress to the toner and the secular deterioration of the toner are small. SOLUTION: By providing periodic conductive electrode patterns 21, 22... on the surface of the developer carrier 1 carrying the non-magnetic toner 15 through an insulating part and applying desired bias potential to the electrodes 21 and 22, electric field gradient is formed near the surface of the developer carrier 1, so that the toner 15 is stuck and fed onto the carrier 1 without needing a triboelectrification process.

Abstract translation: 要解决的问题：提供一种能够在不使显影剂供应构件与显影剂载体压接和摩擦的情况下充分供应非磁性单组分调色剂并且能够稳定地获得高密度图像的显影装置，因为应力 并且调色剂的长期劣化很小。 解决方案：通过在承载非磁性调色剂15的显影剂载体1的表面上通过绝缘部分提供周期性导电电极图案21,22，并向电极21和22施加期望的偏置电位，形成电场梯度 靠近显影剂载体1的表面，使得调色剂15被粘合并进料到载体1上，而不需要摩擦带电过程。

公开(公告)号：JP2003054026A

公开(公告)日：2003-02-26

申请号：JP2001242687

申请日：2001-08-09

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： MUTO YOSHINORI ,  TOYOSHIMA TETSURO ,  IWAMATSU TADASHI ,  AZUMA NOBUYUKI ,  NAKAJIMA YOSHINORI

IPC: B41J2/44 ,  G03G15/00 ,  G03G15/04 ,  G03G15/043 ,  G06T5/00 ,  H04N1/29 ,  H04N1/405

CPC classification number: H04N1/4055

Abstract: PROBLEM TO BE SOLVED: To provide an imaging apparatus and an imaging method producing an output image having no granular feeling and exhibiting excellent image reproducibility at the time of forming a halftone image, especially the intermediate or low density part thereof. SOLUTION: When a processing section 200 for controlling an exposing means 15 reproduces a halftone image area of a specified gray level or below, granular feeling is suppressed by selecting an exposure pattern which can be represented with a recording dot diameter within a range based on a specified rule among exposure patterns prepared previously. When a plurality of exposure patterns are applicable, an exposure pattern having a smallest number of dots per inch is used thus forming a halftone image having excellent image reproducibility.

Abstract translation: 要解决的问题：提供一种成像装置和成像方法，其产生无形成颗粒感的输出图像，并且在形成半色调图像时，特别是其中间或低密度部分，显示出优异的图像再现性。 解决方案：当用于控制曝光装置15的处理部分200再现指定灰度级或更低灰度级别的半色调图像区域时，通过选择可以基于记录点直径的记录点直径来表示的曝光图案来抑制颗粒感 之前制作的曝光图案中的指定规则。 当可应用多种曝光图案时，使用每英寸点数最小的曝光图案，从而形成具有优异图像再现性的半色调图像。

公开(公告)号：JP2007004206A

公开(公告)日：2007-01-11

申请号：JP2006265332

申请日：2006-09-28

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： FURUKAWA KAZUHIKO ,  IWAMATSU TADASHI ,  HIRAKAWA HIROYUKI ,  TOYOSHIMA TETSURO

IPC: G03G15/08 ,  G03G9/08

Abstract: PROBLEM TO BE SOLVED: To provide a developing method by which even in high-resolution image formation, stable gradation is realized by stably forming smaller dots without granularity in a low density portion, and enhancement of image quality and stability of development are achieved by obtaining sufficient density in a high density portion, and to provide an image forming apparatus. SOLUTION: Development is performed with such developing characteristics that the rate of increase of development density to increase of potential difference between a photoreceptor 1 and a developing roller 41 varies between a region where the potential difference is small and a region where the potential difference is large, the rate of increase of development density in the region where the potential difference is small is lower than that in the region where the potential difference is large, and the upper limit of development density in the region where the rate of increase of development density is lower is ≥0.3. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：为了提供即使在高分辨率图像形成中，通过在低密度部分中稳定地形成更小的颗粒度而实现稳定的灰度，并且提高图像质量和显影稳定性的显影方法 通过在高密度部分获得足够的密度来实现，并且提供图像形成装置。 解决方案：以这样的显影特性进行显影，即显影密度增加到感光体1和显影辊41之间的电位差增加的速率在电位差小的区域和电位差的区域之间变化 差异很大，电位差小的区域的发展密度增加率低于电位差大的地区，发电密度增加幅度上限 发育密度较低≥0.3。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005116729A

公开(公告)日：2005-04-28

申请号：JP2003347935

申请日：2003-10-07

Applicant: Sharp Corp ,  シャープ株式会社

Inventor： KIYOUHO MASANORI ,  TOYOSHIMA TETSURO

IPC: B23K26/00 ,  H01L21/20 ,  H01L21/268

Abstract: PROBLEM TO BE SOLVED: To provide a laser annealing device capable of keeping the average energy density of laser light with which a workpiece is irradiated constant even when a profile of the laser light is changed. SOLUTION: In the laser annealing device 10 when an irradiation optical system unit 12 irradiates laser light emitted from a laser oscillator unit 11 to an irradiation position of a substrate 17, a Joule meter 13 detects laser light energy, and a profile meter 14 detects the profile of the laser light. On the basis of these detection outputs, calculation means 15 calculates the average energy density of the laser light irradiated to the substrate 17, and control means 16 controls the average energy density of the laser light with which the substrate 17 is irradiated such that it becomes a predetermined constant value in response to an output of the calculation means 15. With the control, the average energy density of the laser light with which the substrate 17 is irradiated is kept unchanged. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种即使当激光的轮廓改变时，能够保持工件被照射的激光的平均能量密度恒定的激光退火装置。 解决方案：在激光退火装置10中，当照射光学系统单元12将从激光振荡器单元11发射的激光照射到基板17的照射位置时，焦耳仪13检测激光能量，并且轮廓仪 14检测激光的轮廓。 在这些检测输出的基础上，计算单元15计算照射到基板17的激光的平均能量密度，控制单元16控制照射基板17的激光的平均能量密度， 响应于计算装置15的输出而具有预定的恒定值。通过该控制，基板17被照射的激光的平均能量密度保持不变。 版权所有（C）2005，JPO＆NCIPI