摘要:
A laser irradiation system includes a laser beam generator to generate laser beams, a laser beam irradiator to radiate the laser beams onto a target, a laser beam guide to detect whether one of the laser beams is reflected back toward the laser beam irradiator, a detector to convert the reflected laser beam into electrical signal data, and a controller to control the output of the laser beam generator, based on the signal data.
摘要:
A method for fabricating point contacts to the rear surface of a silicon solar cell by coating the rear surface with a masking layer and a laser absorptive layer and directing laser radiation to the rear surface to form openings therein after which doping material is applied through the openings and contacts are applied. The doping is preferably performed by plasma immersion ion implantation.
摘要:
YAG laser can simultaneously emit a plurality of laser beams having different wavelengths from each other. By simultaneously irradiating the laser beams having different wavelengths from each other to a same region of a non-single crystal semiconductor film, an interference influence is suppressed to obtain a more uniform laser beam. For example, by simultaneously generating second and third harmonics of YAG laser to irradiate the same region through suitable optical system, a laser beam having higher uniformity and having an energy in which interference is highly suppressed is obtained.
摘要:
PROBLEM TO BE SOLVED: To reduce damage to an ink passage due to irradiation of laser beams in welding when forming the ink passage of an inkjet recording head by laser welding including the ink passage which is not a welded part. SOLUTION: A passage forming member with transmitting property to laser beams is provided with an inclined surface for reflecting the laser beams irradiated toward the ink passage. COPYRIGHT: (C)2010,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide a protective film for laser processing free from the problem of debris upon processing and free from the problem of waste water contamination when it is removed, to provide a laminated film, and to provide a laser processing method using the protective film for laser processing. SOLUTION: The protective film for laser processing contains a (meth)acrylate copolymer and a radiation-polymerizable (meth)acrylate having an unsaturated bond. The laminated film has peeling liners laminated on both the sides of the protective film for laser processing. The laser processing method comprises: a pasting stage where a protective film for laser processing is pasted on the surface of the material to be processed; and a laser processing stage where the material to be processed is irradiated with laser light via a protective film for laser processing. COPYRIGHT: (C)2009,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide not only a method of simply and accurately forming a thin film without using resist, but also a method of manufacturing a semiconductor device at low cost. SOLUTION: The method of manufacturing the semiconductor device includes the steps of forming a first layer on a substrate, forming a peeling layer 113 on the first layer 102, selectively irradiating a laser beam to the peeling layer from the side thereof to reduce the adhesiveness of part of the peeling layer, removing the peeling layer with the reduced adhesiveness to selectively etch the first layer that allows the left peeling layer to be a mask, forming the peeling layer on the substrate, and selectively irradiating a first laser beam to at least the peeling layer to reduce the adhesiveness of part thereof. Further, the method includes the steps of removing the peeling layer with the reduced adhesiveness, forming the first layer on the left peeling layer, irradiating a second laser beam to the left peeling layer to reduce the adhesiveness thereof, and removing the left peeling layer and the first layer adjacent thereto. COPYRIGHT: (C)2008,JPO&INPIT