摘要:
PROBLEM TO BE SOLVED: To highly accurately measure optical axis deflection in two directions orthogonal to an optical axis of laser light.SOLUTION: A first polarization beam splitter 4 splits the laser light 2a emitted from a laser light source 1 into a first linearly polarized component 2b and a second linearly polarized component 2c. An optical system 3 makes at least one of the first linearly polarized component 2b and the second linearly polarized component 2c rotate around the optical axis such that a deflecting direction of the first linearly polarized component 2b and a deflecting direction of the second linearly polarized component 2c are orthogonal to each other to create synthetic light. A light shielding member 8 shields part of the synthetic light by projecting a leading end 8a toward the synthetic light. A second polarization beam splitter 9 splits passing light passing without being shielded by the light shielding member 8 into the first linearly polarized component 2b and the second linearly polarized component 2c. Respective light receiving elements 10a, 10b measure light amounts of the respective linearly polarized components split by the polarization beam splitter 9. An arithmetic operation unit 12 obtains a deflection amount of the laser light based on a result of measurement.
摘要:
PROBLEM TO BE SOLVED: To provide a coordinate measuring instrument for a flat surface that directly measure and mark flat surface coordinates on a wall surface, and a method for supporting the same. SOLUTION: The coordinate measuring instrument (1) includes a housing (9) that has a calculating means (8), a positioning means (2) configured for position-fixing at a flat surface point (P) on the wall surface (3), and a outputting means (6) for a measurement result calculated by the calculating means (8); an electronic distance measuring system (7) for properly specifying a longitudinal distance along a longitudinal measuring direction; and a means of measuring a distance in a lateral direction for additionally specifying the lateral distance along the lateral direction crossing the longitudinal distance. In adiition, algorithm of program control is provided to the calculating means so that at a measurement step, a longitudinal measurement to a measurement point along the longitudinal direction and a lateral measurement to a measurement point along the lateral direction are executed; and then at a calculation step, local flat surface coordinates of the measurement point are calculated from measured values of the longitudinal measurement and the lateral measurement. COPYRIGHT: (C)2007,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide precise transfer equipment capable of performing precise movement, and also capable of performing accurate positioning based on accurate position detection.SOLUTION: The precise transfer equipment comprises: a table held to a base; a rod 41 connected to the side surface of the table via a joint 6; a drive mechanism for advancingly and retractively driving the rod 41; and a laser interferometer for detecting the displacement of the table with respect to the base. The joint 6 is a supply/discharge static joint which has: a movement-side opposing surface 63 connected to the table 31 and perpendicular to the moving direction; a drive-side opposing surface 64 connected to the rod 41 and opposing the moving-side opposing surface 63; a fluid supply passage 66 for supplying fluid to a static clearance 65 formed between the moving-side opposing surface 63 and the drive-side opposing surface 64; and a fluid discharge passage for discharging the fluid from the static clearance 65. The laser interferometer has a laser light passage 56 in which a light axis progresses along the moving direction, and the laser light passage 56 penetrates the rod 41 or the drive-side opposing surface 64 and uses the moving-side opposing surface 63 as a reflecting surface.
摘要:
PROBLEM TO BE SOLVED: To provide a machine tool capable of detecting an accurate position of a tool and a workpiece.SOLUTION: The machine tool 1 includes: a bed 11, a column 12, a main spindle head 15, a main spindle 16, a saddle 17, and a table 18; a feed mechanism for moving the main spindle head 15, the saddle 17, and the table 18 in the directions of the Z axis, Y axis and X axis; a position detector for detecting the positions of the main spindle head 15, the saddle 17, and the table 18 in the Z axis, Y axis and X axis directions; a controller for performing the feedback control of the feed mechanism based on the detected positions and the like of the position detector; a position detector 51 for detecting positions, in the X axis and Z axis directions, of the main spindle head 15; a position detector 54 for detecting positions, in the Y axis and Z axis directions, of the main spindle head 15; a position detector 57 for detecting positions, in the X axis and Y axis directions, of the table 18; and a measuring frame 50 which is composed of a member different from the bed 11 and the column 12 and in which readers 53, 56, 59 of the respective position detectors 51, 54, 57 are arranged.