Phase plate
    10.
    发明专利
    Phase plate 有权
    相板

    公开(公告)号:JP2013157312A

    公开(公告)日:2013-08-15

    申请号:JP2012228975

    申请日:2012-10-16

    Inventor: ARTHUR BLACKBURN

    Abstract: PROBLEM TO BE SOLVED: To prevent contamination and electrification caused by non-scattered beams of a phase plate using a magnetic bar, and provide an electron microscope with no artifact in an image.SOLUTION: A phase plate comprises: a flat and non-magnetic supporting member 21 with a through-hole 24; and a thin-line member 25 cantilevered so as to extend partially across the through-hole 24, formed of a ferromagnetic body magnetizable in a length direction 26, and having a width of section of 500 nm or less. A fixed magnetic flux is generated from a distal end 27 of the thin-line member 25.

    Abstract translation: 要解决的问题:为了防止由使用磁棒的相位板的非散射光引起的污染和带电,并且在图像中提供没有伪像的电子显微镜。解决方案:相位板包括:平坦和非磁性的 具有通孔24的支撑构件21; 以及薄壁部件25,其以部分方式延伸穿过通孔24形成,所述通孔24由可沿长度方向26磁化的铁磁体形成,并且具有500nm以下的截面宽度。 从细线构件25的远端27产生固定的磁通量。

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