Pattern forming method, chemically amplified resist composition and resist film
    7.
    发明专利
    Pattern forming method, chemically amplified resist composition and resist film 有权
    图案形成方法,化学放大电阻组合物和电阻膜

    公开(公告)号:JP2012083730A

    公开(公告)日:2012-04-26

    申请号:JP2011197410

    申请日:2011-09-09

    发明人: IWATO KAORU

    摘要: PROBLEM TO BE SOLVED: To provide a pattern forming method, a chemically amplified resist composition and a resist film which satisfy high sensitivity, high resolution, excellent roughness performance and excellent dry etching resistance, and further have excellent developing time dependency.SOLUTION: The negative pattern forming method includes: (1) a step of forming a film from a chemically amplified resist composition containing (A) a fullerene derivative having an acid decomposable group, (B) a compound which generates an acid by irradiation of active rays or radiation and (C) a solvent; (2) a step of exposing the film; and (3) a step of developing the film using a developer containing an organic solvent.

    摘要翻译: 要解决的问题:提供满足高灵敏度,高分辨率,优异的粗糙性能和优异的耐干蚀刻性的图案形成方法,化学放大抗蚀剂组合物和抗蚀剂膜,并且还具有优异的显影时间依赖性。 阴性图案形成方法包括:(1)从化学放大抗蚀剂组合物形成膜的步骤,所述化学放大抗蚀剂组合物含有(A)具有酸可分解基团的富勒烯衍生物,(B)通过以下步骤产生酸的化合物: 照射活性射线或辐射,(C)溶剂; (2)曝光胶片的步骤; 和(3)使用含有有机溶剂的显影剂显影该膜的步骤。 版权所有(C)2012,JPO&INPIT

    Fullerene derivative
    10.
    发明专利
    Fullerene derivative 有权
    全能衍生

    公开(公告)号:JP2011035116A

    公开(公告)日:2011-02-17

    申请号:JP2009178996

    申请日:2009-07-31

    摘要: PROBLEM TO BE SOLVED: To provide a fullerene derivative capable of manufacturing an organic optoelectric transducer having a sufficiently high open-end voltage. SOLUTION: The fullerene derivative has a structure shown by formula (1) where R represents a monovalent organic group and (r) an integer of 0 to 4. The fullerene derivative has 1 to 4 structures shown by formula (1). The fullerene derivative is shown by formula (2a) or formula (2b). The fullerene derivative may be mixed with an electron donating compound, and used as a composition. COPYRIGHT: (C)2011,JPO&INPIT

    摘要翻译: 要解决的问题:提供能够制造具有足够高的开放端电压的有机光电传感器的富勒烯衍生物。 解决方案:富勒烯衍生物具有式(1)所示的结构,其中R表示一价有机基团,(r)为0至4的整数。富勒烯衍生物具有1至4个由式(1)表示的结构。 富勒烯衍生物由式(2a)或式(2b)表示。 富勒烯衍生物可以与给电子化合物混合,并用作组合物。 版权所有(C)2011,JPO&INPIT