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公开(公告)号:TWI527186B
公开(公告)日:2016-03-21
申请号:TW100122795
申请日:2011-06-29
发明人: 五十嵐陽平 , IGARASHI, YOHEI , 荒木康 , ARAKI, YASUSHI
CPC分类号: H01L23/3121 , H01L21/563 , H01L23/498 , H01L24/13 , H01L24/16 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/0657 , H01L25/50 , H01L2224/13144 , H01L2224/16225 , H01L2224/16227 , H01L2224/27013 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/45144 , H01L2224/48091 , H01L2224/48225 , H01L2224/48227 , H01L2224/48228 , H01L2224/48465 , H01L2224/73203 , H01L2224/73204 , H01L2224/73253 , H01L2224/73265 , H01L2224/81203 , H01L2224/83007 , H01L2224/83192 , H01L2224/83385 , H01L2224/92227 , H01L2224/92247 , H01L2225/0651 , H01L2225/06517 , H01L2225/06558 , H01L2924/01005 , H01L2924/01006 , H01L2924/01014 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/15311 , H01L2924/181 , H01L2924/00 , H01L2924/00012 , H01L2924/00011 , H01L2924/00014