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公开(公告)号:TWI423387B
公开(公告)日:2014-01-11
申请号:TW095106162
申请日:2006-02-23
发明人: 林恩M 麥可森 , MICHAELSON, LYNNE M. , 艾德華 艾可斯塔 , ACOSTA, EDWARD , 里維克 查特基 , CHATTERJEE, RITWIK , 史丹利M 菲里皮克 , FILIPIAK, STANLEY M. , 山姆S 賈西亞 , GARCIA, SAM S. , 法魯蓋斯 馬修 , MATHEW, VARUGHESE
IPC分类号: H01L21/768
CPC分类号: H01L21/76849 , H01L21/76822 , H01L21/76834 , H01L21/76835 , H01L21/76856
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公开(公告)号:TWI416691B
公开(公告)日:2013-11-21
申请号:TW096109128
申请日:2007-03-16
发明人: 史考特K 波茲德 , POZDER, SCOTT K. , 林恩M 麥可森 , MICHAELSON, LYNNE M. , 法魯嘉斯 馬修 , MATHEW, VARUGHESE
IPC分类号: H01L23/528
CPC分类号: H01L21/76898 , H01L21/76805 , H01L23/481 , H01L24/92 , H01L24/94 , H01L25/50 , H01L27/0688 , H01L2224/83191 , H01L2224/9202 , H01L2225/06513 , H01L2225/06541 , H01L2924/01005 , H01L2924/01006 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/14 , H01L2924/00
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公开(公告)号:TWI529867B
公开(公告)日:2016-04-11
申请号:TW099144198
申请日:2010-12-16
发明人: 馬休 維魯吉斯 , MATHEW, VARUGHESE
CPC分类号: H01L24/05 , H01L24/03 , H01L24/48 , H01L24/85 , H01L2224/03831 , H01L2224/04042 , H01L2224/05007 , H01L2224/05027 , H01L2224/05082 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05164 , H01L2224/05644 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/4847 , H01L2224/48644 , H01L2224/48844 , H01L2224/85203 , H01L2224/85207 , H01L2924/00014 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/14 , H01L2924/00 , H01L2224/45099 , H01L2924/00012
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公开(公告)号:TWI442476B
公开(公告)日:2014-06-21
申请号:TW097151677
申请日:2008-12-31
发明人: 法魯嘉斯 馬修 , MATHEW, VARUGHESE , 艾迪 亞柯斯達 , ACOSTA, EDDIE , 里維克 查特基 , CHATTERJEE, RITWIK , 山姆S 賈西亞 , GARCIA, SAM S.
IPC分类号: H01L21/3205 , H01L21/60
CPC分类号: H01L24/11 , H01L24/81 , H01L2224/05001 , H01L2224/05026 , H01L2224/05027 , H01L2224/05147 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05572 , H01L2224/05611 , H01L2224/13099 , H01L2224/13111 , H01L2224/16 , H01L2224/81208 , H01L2224/81801 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01022 , H01L2924/01027 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01042 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/10329 , H01L2924/14 , H01L2924/00014
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公开(公告)号:TWI398549B
公开(公告)日:2013-06-11
申请号:TW094138131
申请日:2005-10-31
发明人: 史蒂芬M 修斯 , HUES, STEVEN M. , 麥可L 羅夫喬伊 , LOVEJOY, MICHAEL L. , 法魯嘉斯 馬修 , MATHEW, VARUGHESE
IPC分类号: C23C18/54 , H01L21/208
CPC分类号: H01L21/288 , C23C18/1617 , C23C18/50 , C23C18/52 , H01L21/76849
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