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1.形成垂直柱狀內連線的方法 METHODS AND STRUCTURES FOR A VERTICAL PILLAR INTERCONNECT 审中-公开
简体标题: 形成垂直柱状内连接的方法 METHODS AND STRUCTURES FOR A VERTICAL PILLAR INTERCONNECT公开(公告)号:TW201108342A
公开(公告)日:2011-03-01
申请号:TW099121741
申请日:2010-07-01
申请人: 飛立帕奇帕國際股份有限公司
IPC分类号: H01L
CPC分类号: H01L24/11 , H01L21/563 , H01L24/03 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/81 , H01L2224/0345 , H01L2224/03464 , H01L2224/0361 , H01L2224/03912 , H01L2224/0401 , H01L2224/1132 , H01L2224/11462 , H01L2224/1147 , H01L2224/11472 , H01L2224/11474 , H01L2224/11505 , H01L2224/1184 , H01L2224/11849 , H01L2224/119 , H01L2224/11901 , H01L2224/11903 , H01L2224/13012 , H01L2224/13013 , H01L2224/13014 , H01L2224/13024 , H01L2224/13082 , H01L2224/13083 , H01L2224/13101 , H01L2224/13111 , H01L2224/13116 , H01L2224/13117 , H01L2224/13118 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13294 , H01L2224/133 , H01L2224/13339 , H01L2224/1403 , H01L2224/16225 , H01L2224/16227 , H01L2224/73204 , H01L2224/81191 , H01L2224/81815 , H01L2224/8184 , H01L2224/831 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01051 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/381 , H01L2924/01028 , H01L2924/0105 , H01L2924/01048 , H01L2924/01032 , H01L2924/00014 , H01L2924/00012
摘要: 在晶圓級晶片尺度封裝及覆晶封裝及裝配中,將一焊料蓋形成於一垂直柱上。在一實施例中,該垂直柱上覆於一半導體基板。將可摻雜有至少一種微量元素之一焊膏施加於該柱狀結構之一頂部表面上。在施加該焊膏之後,執行一回焊製程以提供該焊料蓋。
简体摘要: 在晶圆级芯片尺度封装及覆晶封装及装配中,将一焊料盖形成于一垂直柱上。在一实施例中,该垂直柱上覆于一半导体基板。将可掺杂有至少一种微量元素之一焊膏施加于该柱状结构之一顶部表面上。在施加该焊膏之后,运行一回焊制程以提供该焊料盖。