公开(公告)号：US20070200581A1

公开(公告)日：2007-08-30

申请号：US11674635

申请日：2007-02-13

申请人： Ting Shi ,  Daniel Tran ,  Pavel Ploscariu

发明人： Ting Shi ,  Daniel Tran ,  Pavel Ploscariu

IPC分类号： G01R31/02

CPC分类号： G01R31/2642 ,  G01R31/2635 ,  H01S5/0014 ,  H01S5/02236 ,  H01S5/02415 ,  H01S5/02423

摘要： A temperature-controlled system for testing a laser die mounted on a submount is disclosed. The testing system comprises a base having a motor-driven translation platform. The translation platform includes a first testing site having a two-stage temperature control system mounted on a base portion. The temperature control system includes a thermoelectric cooler and a fluid system for circulating a cooling/heating fluid in a circulation block. A mounting portion is also included on the first testing site on which the submount is positioned. The temperature of the mounting portion is controlled by the temperature control system. A probe card having an arm and an electrical contact portion attached to the arm provides a power supply to the submount when the first testing site is aligned with the probe card. An aligner having a lens assembly that is alignable with the first testing site receives an optical signal produced by the laser.

摘要翻译： 公开了一种用于测试安装在底座上的激光模具的温度控制系统。 测试系统包括具有马达驱动翻译平台的基座。 翻译平台包括具有安装在基部上的两级温度控制系统的第一测试位置。 温度控制系统包括热电冷却器和用于使循环块中的冷却/加热流体循环的流体系统。 安装部分也包括在第一个测试站点上，底座位于其上。 安装部分的温度由温度控制系统控制。 具有臂和连接到臂的电接触部分的探针卡在第一测试位置与探针卡对准时向基座提供电源。 具有可与第一测试部位对准的透镜组件的对准器接收由激光器产生的光学信号。

公开(公告)号：US07044476B2

公开(公告)日：2006-05-16

申请号：US10723449

申请日：2003-11-25

申请人： Daniel Tran

发明人： Daniel Tran

IPC分类号： B23B31/30

CPC分类号： H01L21/68742 ,  Y10T279/11

摘要： A compact pinlifter assembly is fitted in a substantially enclosed cavity within a wafer chuck such that an overall outside shape of the wafer chuck remains highly unaffected. The pinlifter assembly includes wedge guides providing a movement path in a wedge angle relative to the wafer holding face. A pin actuator is driven along the wedge guides transforming its movement along the wedge guides into a vertical movement of the lifting pins perpendicularly sliding between the cavity and the wafer holding face. The combination of wedge guides and pin actuator takes advantage of the relatively large lateral dimensions of the wafer chuck to move the pin actuator between end positions that are in a distance multiple of the pin lifters movement. Due to the wedge angle, the actuators comparatively large scale movement is transformed in a highly precise, smooth and balanced movement of the pin lifters.

摘要翻译： 小巧的销钉组件安装在晶片卡盘内的基本封闭的腔中，使得晶片卡盘的整体外部形状保持高度不受影响。 销钉组件包括楔形引导件，其提供相对于晶片保持面的楔形角度的移动路径。 销致动器沿着楔形导轨被驱动，将其沿着楔形导轨的运动变换成垂直于空腔和晶片保持面之间滑动的提升销的垂直运动。 楔形引导件和引脚致动器的组合利用了晶片卡盘的相对较大的横向尺寸以使销致动器在引脚升降器运动的几倍的端部位置之间移动。 由于楔形角度，致动器比较大的尺寸运动以高精度，平滑和均衡的升降器运动转变。

公开(公告)号：US20070069761A1

公开(公告)日：2007-03-29

申请号：US11535350

申请日：2006-09-26

申请人： Ting Shi ,  Daniel Tran ,  Pavel Ploscariu

发明人： Ting Shi ,  Daniel Tran ,  Pavel Ploscariu

IPC分类号： G01R31/26

CPC分类号： G01R31/2635

摘要： Systems for automated laser header testing are disclosed. A system can include a base portion, a rotary stage supported by the base portion, at least one testing site supported by the rotary stage, and a plurality of testing stations supported by the base portion and radially arranged about a center point of the rotary stage for testing the laser header. Each testing site can include a testing fixture supported by the testing site. The testing fixture can include an air shield providing an isolated environment for testing the laser header. The testing fixture can further include a heat sink and air ducts for controlling testing conditions. Electrical contact members can releasably contact leads of the laser header and a releasing mechanism releases the leads of the laser header from the electrical contact members.

摘要翻译： 公开了用于自动化激光头测试的系统。 系统可以包括基部，由基部支撑的旋转台，由旋转台支撑的至少一个测试位置，以及由基部支撑并围绕旋转台的中心点径向设置的多个测试台 用于测试激光头。 每个测试站点都可以包括测试站点支持的测试夹具。 测试夹具可以包括空气屏蔽，其提供用于测试激光头的隔离环境。 测试夹具还可以包括用于控制测试条件的散热器和风道。 电接触构件可以可释放地接触激光头的引线，并且释放机构将激光头的引线从电接触构件释放。

公开(公告)号：US06441607B1

公开(公告)日：2002-08-27

申请号：US09728809

申请日：2000-12-01

申请人： Dale Buermann ,  Daniel Tran

发明人： Dale Buermann ,  Daniel Tran

IPC分类号： G01R302

CPC分类号： G01R31/2887

摘要： A system for docking a floating test stage with integrated testing equipment to a predetermined position relative to a terrestrial base is described. The system includes a cylinder for docking the test stage to the predetermined position and a vibration isolation system for isolating the test stage when it is floating over the base. The system also includes a handling unit indexed to the predetermined position for loading and unloading samples on the test stage.

摘要翻译： 描述了一种用于将浮动测试台与集成测试设备相对于相对于陆地基座的预定位置对接的系统。 该系统包括用于将测试台对准到预定位置的气缸和用于当测试台浮在基座上时隔离测试台的隔振系统。 系统还包括索引到预定位置的处理单元，用于在测试台上装载和卸载样品。

公开(公告)号：US5612861A

公开(公告)日：1997-03-18

申请号：US504360

申请日：1995-07-19

申请人： Zhong K. Zhong ,  Daniel Tran

发明人： Zhong K. Zhong ,  Daniel Tran

IPC分类号： H02M3/07 ,  H02M7/25 ,  H02M7/517

CPC分类号： H02M3/07

摘要： A method and apparatus for low voltage start circuit is provided. The start circuit (140) includes a first voltage converter (203) having a first booster circuit (210) and a first voltage multiplier (220) for converting a DC battery voltage to a converted DC voltage. The converted DC voltage is connected to an input of a second booster circuit (230) of a second voltage converter (205). The second voltage converter (205) includes the second booster circuit (230) and a second voltage multiplier (240). An output of the second voltage multiplier (240) is fed back to the input of the second booster circuit (230) for boosting the converted DC voltage to a predetermined threshold value. A voltage detector (136) compares the converted DC voltage to the predetermined threshold value. A controller (141) disables the start circuit (140) and enables a main DC-DC conversion circuit of the pager (100) when the converted DC voltage reaches the predetermined threshold value.

摘要翻译： 提供了一种低压启动电路的方法和装置。 起动电路（140）包括具有第一升压电路（210）和第一电压倍增器（220）的第一电压转换器（203），用于将直流电池电压转换成转换后的直流电压。 经转换的直流电压连接到第二电压转换器（205）的第二升压电路（230）的输入端。 第二电压转换器（205）包括第二升压电路（230）和第二电压倍增器（240）。 第二电压倍增器（240）的输出反馈到第二升压电路（230）的输入，用于将转换后的直流电压升压到预定的阈值。 电压检测器（136）将转换的DC电压与预定阈值进行比较。 当变换的直流电压达到预定阈值时，控制器（141）禁用启动电路（140）并使能寻呼机（100）的主DC-DC转换电路。

公开(公告)号：US07616301B2

公开(公告)日：2009-11-10

申请号：US10792655

申请日：2004-03-03

申请人： Marc Aho ,  Daniel Tran

发明人： Marc Aho ,  Daniel Tran

IPC分类号： G01N21/01

CPC分类号： G11B17/028 ,  G11B17/0282

摘要： A vacuum assisted disc clamping device provides a number of fixture rings preferably concentrically stacked on a fixture body that is moveable in fixture ring stacking direction and actuated by a wedge drive to compensate for varying fixture levels associated with the individual fixture rings and disc standards. Each fixture ring includes a planar flange with a vacuum groove and a central conical portion that rises above the planar flange. The conical portion is defined with a diameter and cone angle such that a disc of corresponding dimensional standard may be readily placed on the fitting fixture ring with the disc bottom being sucked onto the planar flange while the disc hole centers on the conical portion.

摘要翻译： 真空辅助盘夹紧装置提供多个固定环，优选地同心地堆叠在固定器本体上，该夹具主体可在固定环堆叠方向上移动，并由楔形驱动器驱动以补偿与各个固定环和盘标准相关联的变化的夹具水平。 每个固定环包括具有真空槽的平面凸缘和在平面凸缘上方上升的中心圆锥形部分。 锥形部分被限定为直径和锥角，使得相应的尺寸标准的盘可以容易地放置在装配固定环上，其中盘的底部被吸入平面凸缘上，而圆盘孔位于锥形部分上。

公开(公告)号：US07595630B2

公开(公告)日：2009-09-29

申请号：US11535350

申请日：2006-09-26

申请人： Ting Shi ,  Daniel Tran ,  Pavel Ploscariu

发明人： Ting Shi ,  Daniel Tran ,  Pavel Ploscariu

IPC分类号： G01R31/28

CPC分类号： G01R31/2635

摘要： Systems for automated laser header testing are disclosed. A system can include a base portion, a rotary stage supported by the base portion, at least one testing site supported by the rotary stage, and a plurality of testing stations supported by the base portion and radially arranged about a center point of the rotary stage for testing the laser header. Each testing site can include a testing fixture supported by the testing site. The testing fixture can include an air shield providing an isolated environment for testing the laser header. The testing fixture can further include a heat sink and air ducts for controlling testing conditions. Electrical contact members can releasably contact leads of the laser header and a releasing mechanism releases the leads of the laser header from the electrical contact members.

摘要翻译： 公开了用于自动化激光头测试的系统。 系统可以包括基部，由基部支撑的旋转台，由旋转台支撑的至少一个测试位置，以及由基部支撑并围绕旋转台的中心点径向设置的多个测试台 用于测试激光头。 每个测试站点都可以包括测试站点支持的测试夹具。 测试夹具可以包括空气屏蔽，其提供用于测试激光头的隔离环境。 测试夹具还可以包括用于控制测试条件的散热器和风道。 电接触构件可以可释放地接触激光头的引线，并且释放机构将激光头的引线从电接触构件释放。

公开(公告)号：US07290978B2

公开(公告)日：2007-11-06

申请号：US10865741

申请日：2004-06-09

申请人： Daniel Tran

发明人： Daniel Tran

IPC分类号： B07C1/18 ,  B21B39/24

CPC分类号： G03F7/70741 ,  G01N21/9501

摘要： A flipper for rotating and positioning a photomask in two flip orientations includes a flip unit rotatably held in a base. The flip unit includes a flip frame in which clamps are preferably spring loaded guided such that the clamps are oppositely and laterally displaceable between engaged positions and parking positions. A stepper motor rotates the flip unit between two flip orientations and positions the flip unit such that opposite inspection sides of the work piece are alternately oriented with respect to a single inspection direction. The flipper may be placed on or adjacent to a stage system of an inspection device. A robotically actuated effector may access the flipper for loading and unloading the work piece. In combination with an effector operating without lift motion, the clamps may feature wedge lift faces to lift the work piece off the effector during their actuation into engaged position.

摘要翻译： 用于以两个翻转取向旋转和定位光掩模的导板包括可旋转地保持在基部中的翻转单元。 翻转单元包括翻转框架，其中夹具优选地被弹簧加载地引导，使得夹具在接合位置和停车位置之间相对地和横向地移位。 步进电机使翻盖单元在两个翻转方向之间旋转，并使翻转单元定位，使得工件的相对的检查侧相对于单个检查方向交替取向。 导板可以放置在检查装置的平台系统上或邻近检查装置的平台系统上。 机器人致动的执行器可以进入导板以装载和卸载工件。 与没有提升运动的效应器组合，夹具可以具有楔形提升面，以在其致动到接合位置期间将工件离开效应器提升。

公开(公告)号：US20060017915A1

公开(公告)日：2006-01-26

申请号：US10792655

申请日：2004-03-03

申请人： Marc Aho ,  Daniel Tran

发明人： Marc Aho ,  Daniel Tran

IPC分类号： G01J1/10

CPC分类号： G11B17/028 ,  G11B17/0282

摘要： A vacuum assisted disc clamping device provides a number of fixture rings preferably concentrically stacked on a fixture body that is moveable in fixture ring stacking direction and actuated by a wedge drive to compensate for varying fixture levels associated with the individual fixture rings and disc standards. Each fixture ring includes a planar flange with a vacuum groove and a central conical portion that rises above the planar flange. The conical portion is defined with a diameter and cone angle such that a disc of corresponding dimensional standard may be readily placed on the fitting fixture ring with the disc bottom being sucked onto the planar flange while the disc hole centers on the conical portion.

公开(公告)号：US20050111944A1

公开(公告)日：2005-05-26

申请号：US10723298

申请日：2003-11-25

申请人： Marc Aho ,  Daniel Tran

发明人： Marc Aho ,  Daniel Tran

IPC分类号： H01L21/677 ,  B65G65/34 ,  B65B21/02

CPC分类号： H01L21/67766

摘要： A robotic single axis system includes an effector moveable around a single rotating axis. The system is substantially concentrically arranged and mounted adjacent a wafer chuck of a precision stage. The robotic effector has a tangential distal end with a carrying face for positioning the wafer between concentric pinlifters raising from the wafer chuck. The pinlifters load and unload the wafer from the effector. The effector reaches with addition of the stage's travel into a cassette and alternating into a prealigner positioned on top of each other on an adjacent elevator. The elevator provides Z-axis movement so that the effector may load and unload wafers from the cassette, and alternating inserts a carried wafer into the prealigner.

摘要翻译： 机器人单轴系统包括围绕单个旋转轴线可移动的效应器。 该系统基本上同心地布置和安装在精密级的晶片卡盘附近。 机器人效应器具有切向远端，其具有用于将晶片定位在从晶片卡盘升起的同心引导器之间的承载面。 引导者从效应器加载和卸载晶片。 效应器通过将舞台的行进添加到盒中并交替地放置在相邻电梯上彼此顶部定位的预对角器中。 电梯提供Z轴运动，使得效应器可以从盒装载和卸载晶片，并且将承载的晶片交替插入到预对准器中。