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公开(公告)号：US07960697B2
公开(公告)日：2011-06-14
申请号：US12257304
申请日：2008-10-23
申请人： Zhongwei Chen , Weiming Ren , Joe Wang , Xuedong Liu , Juying Dou , Fumin He , Feng Cao , Yan Ren , Xiaoli Guo , Wei He , Qingpo Xi
发明人： Zhongwei Chen , Weiming Ren , Joe Wang , Xuedong Liu , Juying Dou , Fumin He , Feng Cao , Yan Ren , Xiaoli Guo , Wei He , Qingpo Xi
IPC分类号： H01J49/44
CPC分类号： H01J37/073 , H01J37/244 , H01J37/28 , H01J2237/06341 , H01J2237/24592
摘要： The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
摘要翻译： 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案，在阴极和阳极之间的地电位上施加大的加速电压，将光束极限孔定位在聚光透镜之前，利用聚光透镜激发电流 优化图像分辨率，应用高管偏压缩短电子行进时间，采用和修正SORIL物镜，以改善大视野和电漂移下的像差，并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。
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公开(公告)号：US09581245B2
公开(公告)日：2017-02-28
申请号：US13437107
申请日：2012-04-02
申请人： Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
发明人： Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
CPC分类号： F16J15/0881 , F16L23/20
摘要： A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.
摘要翻译： 提出了一种用于真空系统的金属密封法兰组件。 其金属垫片的横截面形状是不规则六边形，分别在最长侧和第二和第三最长边之间具有两个锐角。 不规则六边形的最长边是金属垫片的垂直内壁。 这种设计可以减少密封金属密封凸缘组件所需的法向力，并减少所需的螺栓数量，从而在有限的工作空间中使用。
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公开(公告)号：US08895935B2
公开(公告)日：2014-11-25
申请号：US13417404
申请日：2012-03-12
申请人： Zhibin Wang , Wei He , Qingpo Xi , Shuai Li , Fumin He
发明人： Zhibin Wang , Wei He , Qingpo Xi , Shuai Li , Fumin He
IPC分类号： G01T1/20
CPC分类号： G01T1/20 , H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
摘要： An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.
摘要翻译： 描述了带电粒子检测单元的组件。 组件包括闪烁体盘，部分涂覆的光导，用于允许初级带电粒子束通过的薄金属管和光电倍增管（PMT）。 闪烁体盘和光导的形状被重新设计，以改善光信号传输，从而提高光的收集效率。 在嵌入式闪烁体上具有锥形表面的导光体比常规设计提高了34％的光收集效率。
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公开(公告)号：US08829451B2
公开(公告)日：2014-09-09
申请号：US13495102
申请日：2012-06-13
申请人： Zhibin Wang , Wei He , Fumin He
发明人： Zhibin Wang , Wei He , Fumin He
IPC分类号： G01T1/20
CPC分类号： G01T1/2002 , H01J37/244 , H01J37/28 , H01J2237/2443
摘要： An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.
摘要翻译： 描述了一种检测效率高的带电粒子检测装置的组件。 所述组件包括金属网格，用于施加诱发电位以诱使带电粒子; 闪烁体盘，以吸收来自撞击带电粒子的能量并以光或光子的形式再次产生能量; 用于传输光或光子的光导; 和光电倍增管（PMT）与光导的端部相连，以从光导中接收光或光子并将其转换为电流信号。 具有子弹头前部的光导确保了在光导内传播的光的全反射。 锥形锥形闪烁体盘由于闪烁体的形状而释放原先被俘获在闪烁体盘中的光。
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公开(公告)号：US20130334430A1
公开(公告)日：2013-12-19
申请号：US13495102
申请日：2012-06-13
申请人： Zhibin Wang , Wei He , Fumin He
发明人： Zhibin Wang , Wei He , Fumin He
IPC分类号： G01T1/20
CPC分类号： G01T1/2002 , H01J37/244 , H01J37/28 , H01J2237/2443
摘要： An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.
摘要翻译： 描述了一种检测效率高的带电粒子检测装置的组件。 所述组件包括金属网格，用于施加诱发电位以诱使带电粒子; 闪烁体盘，以吸收来自撞击带电粒子的能量并以光或光子的形式再次产生能量; 用于传输光或光子的光导; 和光电倍增管（PMT）与光导的端部相连，以从光导中接收光或光子并将其转换为电流信号。 具有子弹头前部的光导确保了在光导内传播的光的全反射。 锥形锥形闪烁体盘由于闪烁体的形状而释放原先被俘获在闪烁体盘中的光。
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公开(公告)号：US20130257044A1
公开(公告)日：2013-10-03
申请号：US13437107
申请日：2012-04-02
申请人： Qingpo XI , Tao LI , Feng CAO , Fumin HE , Zhongwei CHEN
发明人： Qingpo XI , Tao LI , Feng CAO , Fumin HE , Zhongwei CHEN
CPC分类号： F16J15/0881 , F16L23/20
摘要： The present invention introduces a metal seal flange assembly for a vacuum system. A new designed metal gasket has a crosses-section shape of irregular quadrangle with two sharp angle forms by the longer base and legs. The long base of the irregular quadrangle is the vertical inner wall of the metal gasket. A preferred cross section shape of the metal gasket is trapezoid or isosceles trapezoid. this design can reduce the normal force applied to the metal seal flange assembly and reduce the number of bolts used in a limit working space.
摘要翻译： 本发明引入了用于真空系统的金属密封凸缘组件。 新设计的金属垫片具有不规则四边形的横截面形状，具有较长的底座和腿部的两个尖角形状。 不规则四边形的长基座是金属垫片的垂直内壁。 金属垫片的优选截面形状是梯形或等腰梯形。 这种设计可以减少施加到金属密封法兰组件的法向力，并减少在极限工作空间中使用的螺栓数量。
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公开(公告)号：US20130234032A1
公开(公告)日：2013-09-12
申请号：US13417404
申请日：2012-03-12
申请人： Zhibin Wang , Wei He , Qingpo Xi , Shuai Li , Fumin He
发明人： Zhibin Wang , Wei He , Qingpo Xi , Shuai Li , Fumin He
IPC分类号： G01T1/20
CPC分类号： G01T1/20 , H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
摘要： An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.
摘要翻译： 描述了带电粒子检测单元的组件。 组件包括闪烁体盘，部分涂覆的光导，用于允许初级带电粒子束通过的薄金属管和光电倍增管（PMT）。 闪烁体盘和光导的形状被重新设计，以改善光信号传输，从而提高光的收集效率。 在嵌入式闪烁体上具有锥形表面的导光体比常规设计提高了34％的光收集效率。
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公开(公告)号：US20100102227A1
公开(公告)日：2010-04-29
申请号：US12257304
申请日：2008-10-23
申请人： ZHONGWEI CHEN , WEIMING REN , JOE WANG , XUEDONG LIU , JUYING DOU , FUMIN HE , FENG CAO , YAN REN , XIAOLI GUO , WEI HE , QINGPO XI
发明人： ZHONGWEI CHEN , WEIMING REN , JOE WANG , XUEDONG LIU , JUYING DOU , FUMIN HE , FENG CAO , YAN REN , XIAOLI GUO , WEI HE , QINGPO XI
CPC分类号： H01J37/073 , H01J37/244 , H01J37/28 , H01J2237/06341 , H01J2237/24592
摘要： The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
摘要翻译： 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案，在阴极和阳极之间的地电位上施加大的加速电压，将光束极限孔定位在聚光透镜之前，利用聚光透镜激发电流 优化图像分辨率，应用高管偏压缩短电子行进时间，采用和修正SORIL物镜，以改善大视野和电漂移下的像差，并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。
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