Combined vacuum baffle and valve for diffusion pump
    1.
    发明授权
    Combined vacuum baffle and valve for diffusion pump 失效
    组合真空挡板和扩散泵阀

    公开(公告)号:US4081222A

    公开(公告)日:1978-03-28

    申请号:US664002

    申请日:1976-03-04

    CPC分类号: F04F9/04 F16K51/02

    摘要: In a vacuum system a baffle-valve acts first as a baffle to reduce the backstreaming of a diffusion pump fluid into the main vacuum chamber being evacuated and secondly it can be used as a valve to provide complete isolation between the diffusion pump and the vacuum chamber. This enables the chamber to be open for service work while the diffusion pump is kept operating for rapid pump down. The foregoing dual use of the baffle/valve increases pumping efficiency because of higher conductance.

    摘要翻译: 在真空系统中,挡板阀首先作为挡板起作用,以减少扩散泵流体进入被抽真空的主真空室的回流,其次,它可以用作阀,以在扩散泵和真空室之间提供完全隔离 。 这使得腔室能够在扩散泵保持运行以便快速泵送时打开以进行维修工作。 上述双重用途的挡板/阀门由于较高的电导性而提高了泵送效率。

    Mass spectrometer system and method for control of ion energy for
different masses
    3.
    发明授权
    Mass spectrometer system and method for control of ion energy for different masses 失效
    质谱仪系统及控制不同质量离子能量的方法

    公开(公告)号:US4214160A

    公开(公告)日:1980-07-22

    申请号:US664046

    申请日:1976-03-04

    IPC分类号: H01J49/42 H01J39/34

    CPC分类号: H01J49/4215

    摘要: Apparatus and method for programming the ion energy of ions being analyzed by a quadruple mass spectrometer where the axis potential applied to the quadruple rods is caused to vary in synchronism with a mass scan in order that the ions of each mass being analyzed may transit the quadruple with the most advantageous energy for proper analysis (that is, with substantially equal velocities) and the application of the ion scan voltage will not distort the fringing field at the entrance to the quadrupole.

    摘要翻译: 用于对通过四重质谱仪进行分析的离子的离子能量进行编程的装置和方法,其中施加到四极杆上的轴电位与质量扫描同步地变化,以使得被分析的每个质量的离子可以转运四倍 具有用于适当分析的最有利的能量(即,具有基本相等的速度),并且离子扫描电压的施加不会扭曲四极入口处的边缘场。