PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICE
    1.
    发明申请
    PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICE 失效
    制造半导体器件的工艺

    公开(公告)号:US20090148997A1

    公开(公告)日:2009-06-11

    申请号:US12277533

    申请日:2008-11-25

    申请人: Kazuhiro FUKUCHI

    发明人: Kazuhiro FUKUCHI

    IPC分类号: H01L21/268

    摘要: Reduction of damage to a semiconductor device due to a marking process while inhibiting deterioration of a mark can not be achieved in conventional processes for manufacturing semiconductor devices. A process for manufacturing the semiconductor device 100 involves irradiating the marking film 21 with an energy beam through the transparent protective film 31 after the protective film 31 is formed, and such irradiation causes a chemical modification of the material of the marking film 21 to create the marks. According to the above-described process for manufacturing the semiconductor device 100, the region for the marking or the upper surface of the marking film 21 is sheathed by the protective film 31, so that a damage to the semiconductor chip 11 due to the generations of dust, exothermic heat, gas, stress or the like during the marking operation can be reduced. This allows achieving the process for manufacturing the semiconductor device 100 that provides a manufacture of better quality of the marks.

    摘要翻译: 在制造半导体器件的传统工艺中,不能实现减少由于标记过程而导致的半导体器件对标记的劣化的损害。 半导体装置100的制造方法包括:在形成保护膜31之后,通过透明保护膜31将标记膜21照射到能量束上,并且这种照射使标记膜21的材料发生化学改性,从而形成 分数。 根据上述半导体装置100的制造工序,标记用的标记区域或标记膜21的上表面被保护膜31所覆盖,从而由于产生了半导体芯片 可以减少打标动作时的灰尘,放热,气体,应力等。 这允许实现制造提供更好质量标记的半导体器件100的工艺。

    Process for manufacturing semiconductor device
    4.
    发明授权
    Process for manufacturing semiconductor device 失效
    半导体器件制造工艺

    公开(公告)号:US07776703B2

    公开(公告)日:2010-08-17

    申请号:US12277533

    申请日:2008-11-25

    申请人: Kazuhiro Fukuchi

    发明人: Kazuhiro Fukuchi

    IPC分类号: H01L21/331 H01L21/8222

    摘要: Reduction of damage to a semiconductor device due to a marking process while inhibiting deterioration of a mark can not be achieved in conventional processes for manufacturing semiconductor devices. A process for manufacturing the semiconductor device 100 involves irradiating the marking film 21 with an energy beam through the transparent protective film 31 after the protective film 31 is formed, and such irradiation causes a chemical modification of the material of the marking film 21 to create the marks. According to the above-described process for manufacturing the semiconductor device 100, the region for the marking or the upper surface of the marking film 21 is sheathed by the protective film 31, so that a damage to the semiconductor chip 11 due to the generations of dust, exothermic heat, gas, stress or the like during the marking operation can be reduced. This allows achieving the process for manufacturing the semiconductor device 100 that provides a manufacture of better quality of the marks.

    摘要翻译: 在制造半导体器件的传统工艺中,不能实现减少由于标记过程而导致的半导体器件对标记的劣化的损害。 半导体装置100的制造方法包括:在形成保护膜31之后,通过透明保护膜31将标记膜21照射到能量束上,并且这种照射使标记膜21的材料发生化学改性,从而形成 分数。 根据上述半导体装置100的制造工序,标记用的标记区域或标记膜21的上表面被保护膜31所覆盖,从而由于产生了半导体芯片 可以减少打标动作时的灰尘,放热,气体,应力等。 这允许实现制造提供更好质量标记的半导体器件100的工艺。

    METHOD FOR REPAIRING PATTERN DEFECT ON ELECTRONIC CIRCUIT AND APPARATUS THEREFOR
    5.
    发明申请
    METHOD FOR REPAIRING PATTERN DEFECT ON ELECTRONIC CIRCUIT AND APPARATUS THEREFOR 有权
    用于修复电子电路图形缺陷的方法及其设备

    公开(公告)号:US20090196978A1

    公开(公告)日:2009-08-06

    申请号:US12359405

    申请日:2009-01-26

    IPC分类号: C23C16/52 B05C11/00

    摘要: The pattern defect repairing apparatus comprises an application head, a waste ejection board, a waste ejection vessel, a waste ejection board moving stage, a head lifting stage, and an application unit base. The application head comprises an ink-jet head and a head holder. An ink jet head has an ejection nozzle, and is attached to the head holder and able to be moved up and down by the head lifting stage. The waste ejection vessel is provided to the waste ejection board and able to be moved between a waste ejection position and a retreated position by the waste ejection board moving stage. Repairing material is ejected for waste onto the waste ejection board set in the vicinity of the nozzle immediately before application to repair the defect. The tip end of the nozzle is prevented from being dried.

    摘要翻译: 图案缺陷修复装置包括应用头,废弃排出板,废弃排出容器,废弃排出板移动台,头部提升台以及应用单元基座。 应用头包括喷墨头和头架。 喷墨头具有喷射嘴,并且附接到头部保持器并且能够通过头部提升台上下移动。 废弃物排出容器设置在废弃物排出板上,能够通过废弃排出板移动台在废弃物排出位置和退避位置之间移动。 修理材料在应用前立即将废料排出到设置在喷嘴附近的废弃物排出板上,以修复缺陷。 防止喷嘴的前端被干燥。

    Method for repairing pattern defect on electronic circuit and apparatus therefor
    6.
    发明授权
    Method for repairing pattern defect on electronic circuit and apparatus therefor 有权
    修复电子电路图案缺陷的方法及其设备

    公开(公告)号:US08206775B2

    公开(公告)日:2012-06-26

    申请号:US12359405

    申请日:2009-01-26

    摘要: The pattern defect repairing apparatus comprises an application head, a waste ejection board, a waste ejection vessel, a waste ejection board moving stage, a head lifting stage, and an application unit base. The application head comprises an ink-jet head and a head holder. An ink jet head has an ejection nozzle, and is attached to the head holder and able to be moved up and down by the head lifting stage. The waste ejection vessel is provided to the waste ejection board and able to be moved between a waste ejection position and a retreated position by the waste ejection board moving stage. Repairing material is ejected for waste onto the waste ejection board set in the vicinity of the nozzle immediately before application to repair the defect. The tip end of the nozzle is prevented from being dried.

    摘要翻译: 图案缺陷修复装置包括应用头,废弃排出板,废弃排出容器,废弃排出板移动台,头部提升台以及应用单元基座。 应用头包括喷墨头和头架。 喷墨头具有喷射嘴,并且附接到头部保持器并且能够通过头部提升台上下移动。 废弃物排出容器设置在废弃物排出板上,能够通过废弃排出板移动台在废弃物排出位置和退避位置之间移动。 修理材料在应用前立即将废料排出到设置在喷嘴附近的废弃物排出板上,以修复缺陷。 防止喷嘴的前端被干燥。