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    Piezoelectric actuating device
    1.
    发明授权
    Piezoelectric actuating device 有权
    压电驱动装置

    公开(公告)号：US09190938B2

    公开(公告)日：2015-11-17

    申请号：US13784068

    申请日：2013-03-04

    Applicant: ACADEMIA SINICA

    Inventor： En-Te Hwu ,  Ing-Shouh Hwang ,  Wei-Min Wang

    IPC: H01L41/09 ,  H02N2/00

    CPC classification number: H02N2/001 ,  H01L41/0973 ,  H02N2/0015 ,  H02N2/0095

    Abstract: A piezoelectric actuating device includes a carrier, at least a piezoelectric unit, at least a linked component and a moving component. The piezoelectric unit is disposed on the carrier and includes at least a piezoelectric buzzer. The linked component is disposed corresponding to the piezoelectric unit. One end of the linked component is attached to the piezoelectric buzzer. The moving component is connected with the linked component. When the piezoelectric buzzer is actuated, it can carry the linked component to move correspondingly so as to move the moving component. The piezoelectric actuating device has the advantage of low cost and can achieve the sub-nanometer scale actuating resolution.

    Abstract translation: 压电致动装置包括载体，至少压电单元，至少一个连接部件和移动部件。 压电单元设置在载体上并且至少包括压电蜂鸣器。 连接部件对应于压电单元设置。 连接部件的一端连接到压电蜂鸣器。 移动组件与链接组件连接。 当压电蜂鸣器被致动时，它可以携带相连的部件相应地移动以移动移动部件。 压电驱动装置具有成本低廉的优点，可实现亚纳米级的致动分辨率。

    System for fabricating nanoscale probe and method thereof
    2.
    发明授权
    System for fabricating nanoscale probe and method thereof 有权
    制造纳米级探针的系统及其方法

    公开(公告)号：US08966661B2

    公开(公告)日：2015-02-24

    申请号：US13948991

    申请日：2013-07-23

    Applicant: Academia Sinica

    Inventor： Wei-Tse Chang ,  Ing-Shouh Hwang

    IPC: G01Q70/10 ,  G01Q70/16 ,  B82Y35/00

    CPC classification number: G01Q70/10 ,  B82Y35/00 ,  G01Q70/16

    Abstract: Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.

    Abstract translation: 公开了一种制造纳米级探针的方法。 将第一导体和第二导体浸入包含在电解槽中的电解质中。 第一导体和第二导体分别连接到电源。 当在第一导体和第二导体之间建立电路时，建立电解反应。 第二导体被配置为输出电子。 第一导体被配置为接收电子。 因此，当在第一导体和第二导体之间建立电路时，第一导体被蚀刻。 在第一导体处产生大致接近电解质表面的颈缩部分。 当第一导体在颈缩部分断裂时，制造纳米级探针。

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