公开(公告)号：US20160005575A1

公开(公告)日：2016-01-07

申请号：US14765817

申请日：2013-02-06

Applicant: ARCELORMITTAL INVESTIGACIÓN Y DESARROLLO SL

Inventor： Florin Daniel Duminica ,  Vincent LeClercq ,  Eric Silberberg ,  Alain Daniel

IPC: H01J37/32

CPC classification number: H01J37/32871 ,  C23C16/50 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32623 ,  H01J37/3266 ,  H01J37/32669 ,  H01J2237/3321 ,  H01J2237/3323 ,  H05H1/46 ,  H05H2001/466

Abstract: The invention relates to a plasma source (1) for depositing a coating onto a substrate (9), which is connectable to a power source (P) and includes: an electrode (2); a magnetic assembly (4) located circumferentially relative to said electrode and including a set of magnets mutually connected by a magnetic bracket (46) including a first and second central magnet (43, 44) and at least one head magnet (45); and an electrically insulating enclosure (5) arranged such as to surround the electrode and the magnets.

Abstract translation: 本发明涉及一种用于将涂层沉积在可连接到电源（P）上的衬底（9）上的等离子体源（1），包括：电极（2）; 磁性组件（4），其位于周向相对于所述电极并且包括通过包括第一和第二中心磁体（43,44）和至少一个磁头磁体（45）的磁性支架（46）相互连接的一组磁体; 以及布置成围绕电极和磁体的电绝缘外壳（5）。

公开(公告)号：US09805918B2

公开(公告)日：2017-10-31

申请号：US14765817

申请日：2013-02-06

Applicant: ARCELORMITTAL INVESTIGACIÓN Y DESARROLLO SL

Inventor： Florin Daniel Duminica ,  Vincent LeClercq ,  Eric Silberberg ,  Alain Daniel

IPC: H01J37/32 ,  H05H1/46 ,  C23C16/50

CPC classification number: H01J37/32871 ,  C23C16/50 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32623 ,  H01J37/3266 ,  H01J37/32669 ,  H01J2237/3321 ,  H01J2237/3323 ,  H05H1/46 ,  H05H2001/466

Abstract: The invention relates to a plasma source (1) for depositing a coating onto a substrate (9), which is connectable to a power source (P) and includes: an electrode (2); a magnetic assembly (4) located circumferentially relative to said electrode and including a set of magnets mutually connected by a magnetic bracket (46) including a first and second central magnet (43, 44) and at least one head magnet (45); and an electrically insulating enclosure (5) arranged such as to surround the electrode and the magnets.