公开(公告)号：US20210080840A1

公开(公告)日：2021-03-18

申请号：US17050240

申请日：2019-03-21

Applicant: ASML Netherlands B.V.

Inventor： Peter Michel Silvester Maria HEIJMANS ,  Olof Martinus Josephus FISCHER ,  Maarten Hartger KIMMAN ,  Edwin VAN HORNE ,  Antonie Hendrik VERWEIJ

IPC: G03F7/20 ,  H02K41/03

Abstract: The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.

公开(公告)号：US20200049203A1

公开(公告)日：2020-02-13

申请号：US16494200

申请日：2018-02-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Hartger KIMMAN ,  Hans BUTLER ,  Olof Martinus Josephus FISCHER ,  Christiaan Alexander HOOGENDAM ,  Theodorus Mattheus Joannus Maria HUIZINGA ,  Johannes Marinus Maria ROVERS ,  Eric Pierre-Yves VENNAT ,  Maurice Willem Jozef Etiënne WIJCKMANS

IPC: F16C39/06 ,  G03F7/20

Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises:a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions,a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction,wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly.

公开(公告)号：US20180224756A1

公开(公告)日：2018-08-09

申请号：US15749226

申请日：2016-07-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Olof Martinus Josephus FISCHER ,  Fidelus Adrianus BOON

IPC: G03F7/20 ,  H01F7/06 ,  H01F7/16 ,  H01F7/08 ,  H02K41/035

CPC classification number: G03F7/70758 ,  G03F7/70025 ,  G03F7/70716 ,  G03F7/70775 ,  H01F7/064 ,  H01F7/081 ,  H01F7/16 ,  H02K29/06 ,  H02K41/031 ,  H02K41/0354

Abstract: A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.