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公开(公告)号：US07604353B2
公开(公告)日：2009-10-20
申请号：US11958725
申请日：2007-12-18
申请人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
发明人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
CPC分类号： A61B3/12 , G02B26/0825
摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。
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公开(公告)号：US20080204661A1
公开(公告)日：2008-08-28
申请号：US11955044
申请日：2007-12-12
申请人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
发明人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
CPC分类号： A61B3/12 , A61B3/0091 , A61B3/1015 , A61B3/152 , G02B26/0841
摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.
摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的所述开口周围的第一绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相反的面上具有反射部。
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公开(公告)号：US20080180634A1
公开(公告)日：2008-07-31
申请号：US11958725
申请日：2007-12-18
申请人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
发明人： Akihiro Koga , Masayuki Sekimura , Kei Masunishi , Akio Kobayashi , Hiroyuki Kawashima , Hirotake Maruyama
CPC分类号： A61B3/12 , G02B26/0825
摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。
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公开(公告)号：US20090161119A1
公开(公告)日：2009-06-25
申请号：US12065872
申请日：2006-09-01
申请人： Hiroyuki Kawashima , Makoto Fujino , Yoshiaki Goto , Michiko Nakanishi , Hirotake Maruyama , Akio Kobayashi
发明人： Hiroyuki Kawashima , Makoto Fujino , Yoshiaki Goto , Michiko Nakanishi , Hirotake Maruyama , Akio Kobayashi
CPC分类号： G02B27/0977 , G01S7/4818 , G01S17/325 , G02B6/3516 , G02B6/3558 , G02B6/357 , G02B6/3594 , G02B26/0841 , G02B27/0933 , G02B27/0944
摘要： For the purpose of mixing laser light (P0) from a laser light source (18), the laser light (P0) is made incident on a first end surface of an optical fiber (24), and is emitted from a second end surface of the optical fiber (24). Subsequently, laser light (P1) emitted from the second end surface of the optical fiber (24) is made incident on a first end surface of an optical fiber (28), and is emitted from a second end surface of the optical fiber (28). A swinging micro-electromechanical system (27) having a mirror plate (27a) is interposed between the second end surface of the optical fiber (24) and the first end surface of the optical fiber (28). Thus, the mirror plate (27a) is swung, and a laser beam (P4) is thereby shifted and mixed.
摘要翻译： 为了将来自激光光源（18）的激光（P0）混合，使激光（P0）入射到光纤（24）的第一端面上，并从第二端面 光纤（24）。 随后，从光纤（24）的第二端面发射的激光（P1）入射到光纤（28）的第一端面上，并从光纤（28）的第二端面发射 ）。 在光纤（24）的第二端面与光纤（28）的第一端面之间插入具有镜板（27a）的摆动微机电系统（27）。 因此，镜板（27a）摆动，并且激光束（P4）由此移位并混合。
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公开(公告)号：US20100103492A1
公开(公告)日：2010-04-29
申请号：US12588804
申请日：2009-10-28
CPC分类号： G02B26/0841
摘要： An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.
摘要翻译： MEMS扫描镜装置包括静电梳状致动器，其中镜面形成在镜装置的顶表面（TOPS）的下方。 在具有静电梳状致动器的MEMS扫描反射镜装置的制造方法中，通过去除其上的绝缘层（I）来形成镜面板（10B）的镜面（10BS）。
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公开(公告)号：US20120218613A1
公开(公告)日：2012-08-30
申请号：US13466354
申请日：2012-05-08
IPC分类号： G02B26/10
CPC分类号： G02B26/0841
摘要： An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.
摘要翻译： MEMS扫描镜装置包括静电梳状致动器，其中镜面形成在镜装置的顶表面（TOPS）的下方。 在具有静电梳状致动器的MEMS扫描反射镜装置的制造方法中，通过去除其上的绝缘层（I）来形成镜面板（10B）的镜面（10BS）。
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公开(公告)号：US08279509B2
公开(公告)日：2012-10-02
申请号：US12588804
申请日：2009-10-28
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.
摘要翻译： MEMS扫描镜装置包括静电梳状致动器，其中镜面形成在镜装置的顶表面（TOPS）的下方。 在具有静电梳状致动器的MEMS扫描反射镜装置的制造方法中，通过去除其上的绝缘层（I）来形成镜面板（10B）的镜面（10BS）。
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