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公开(公告)号：US20080174907A1
公开(公告)日：2008-07-24
申请号：US11656692
申请日：2007-01-23
申请人： Alan B. Johnston , Roger L. Hipwell , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderson , Wayne A. Bonin , Jeffery Kenneth Berkowitz
发明人： Alan B. Johnston , Roger L. Hipwell , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderson , Wayne A. Bonin , Jeffery Kenneth Berkowitz
CPC分类号： G11B25/043 , B82Y10/00 , G11B9/1436 , G11B19/2009 , G11B33/126 , G11B33/144
摘要： A micro-electromechanical systems (MEMS) disc drive includes high-precision and integrated components to allow for increased functionality, robustness and reduced size as compared to currently produced disc drives. Integrating multiple subcomponents of the disc drive using batch processing provides low manufacturing costs. Furthermore, using MEMS techniques, new features can be added to disc drives. For example, an environmental control component, an accelerometer and/or a thermometer may be integrated into the housing of the disc drive.
摘要翻译： 微机电系统（MEMS）磁盘驱动器包括高精度和集成的组件，以便与当前生产的磁盘驱动器相比能够增加功能，鲁棒性和减小的尺寸。 使用批处理集成磁盘驱动器的多个子组件提供了低制造成本。 此外，使用MEMS技术，可以将新功能添加到磁盘驱动器。 例如，可以将环境控制部件，加速度计和/或温度计集成到盘驱动器的壳体中。
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公开(公告)号：US20080174906A1
公开(公告)日：2008-07-24
申请号：US11656659
申请日：2007-01-23
申请人： Alan B. Johnston , Roger L. Hipwell , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderon , Wayne A. Bonin , Jeffery Kenneth Berkowitz , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan
发明人： Alan B. Johnston , Roger L. Hipwell , Bradley J. Ver Meer , John R. Pendray , Steven A. Kalderon , Wayne A. Bonin , Jeffery Kenneth Berkowitz , Hans L. Leuthold , Song Sheng Xue , Nurul Amin , Andrew D. White , Patrick Joseph Ryan
IPC分类号： G11B33/14
CPC分类号： G11B25/043 , G11B19/2009 , G11B33/126
摘要： In general, the invention is directed to techniques for integrated interconnects with a set of disc drives. The interconnects allow for a set of disc drives to be positioned in an array; for example, as set of disc drives may be stacked to communicate with a device through a single interface of the device. The interconnects may be formed as vias within the housing of the disc drives. Vias may produced using MEMS techniques, e.g., electroplating, as part of the manufacturing processes of the disc drive itself.
摘要翻译： 通常，本发明涉及与一组盘驱动器的集成互连的技术。 互连允许将一组盘驱动器定位在阵列中; 例如，作为一组盘驱动器可以被堆叠以通过设备的单个接口与设备通信。 互连可以形成为盘驱动器的壳体内的通孔。 作为盘驱动器本身的制造过程的一部分，可以使用MEMS技术（例如电镀）产生通气孔。
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公开(公告)号：US20080174915A1
公开(公告)日：2008-07-24
申请号：US11656714
申请日：2007-01-23
申请人： Roger L. Hipwell , Nurul Amin , John R. Pendray , Andrew D. White , Bradley J. Ver Meer , Hans L. Leuthold , Menachem Rafaelof , Wayne A. Bonin
发明人： Roger L. Hipwell , Nurul Amin , John R. Pendray , Andrew D. White , Bradley J. Ver Meer , Hans L. Leuthold , Menachem Rafaelof , Wayne A. Bonin
CPC分类号： G11B5/725 , G11B33/123
摘要： A device comprises a fluid bearing including a textured fluid bearing surface and a second surface and a recordable disc. The recordable disc includes a substrate, a recordable media layer on the substrate, and at least one of the textured fluid bearing surface and the second surface. The device may be manufactured using MEMS techniques. MEMS techniques provide the high precision necessary to create the textured fluid bearing surface. MEMS techniques also allow the recordable disc to be batch-fabricated with one or more additional recordable discs.
摘要翻译： 一种装置包括流体轴承，其包括纹理流体支承表面和第二表面以及可记录盘。 可记录盘包括衬底，衬底上的可记录介质层以及纹理流体支承表面和第二表面中的至少一个。 该装置可以使用MEMS技术制造。 MEMS技术提供了创建纹理流体支承表面所需的高精度。 MEMS技术还允许可记录盘用一个或多个附加可记录盘批量制造。
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公开(公告)号：US20080174899A1
公开(公告)日：2008-07-24
申请号：US11656811
申请日：2007-01-23
申请人： Roger L. Hipwell , Nurul Amin , John R. Pendray , Andrew D. White , Bradley J. Ver Meer , Hans L. Leuthold , Menachem Rafaelof , Wayne A. Bonin
发明人： Roger L. Hipwell , Nurul Amin , John R. Pendray , Andrew D. White , Bradley J. Ver Meer , Hans L. Leuthold , Menachem Rafaelof , Wayne A. Bonin
IPC分类号： G11B15/18
CPC分类号： G11B33/123
摘要： A device comprises a recordable disc, a substrate adjacent to the recordable disc, and an actuation mechanism fixed to the substrate. The recordable disc includes a base layer and a recordable layer on the base layer. Additional electrodes or magnetic components may be placed on the base layer to provide electromagnetic or electrostatic forces to rotate the recordable disc when acted on by the actuation mechanism. As an example, the invention may utilize MEMS techniques in order to integrate a disc and motor of a disc drive as a common component.
摘要翻译： 一种设备包括可记录盘，与可记录盘相邻的衬底，以及固定到衬底的致动机构。 可记录盘在基层上包括基层和可记录层。 附加的电极或磁性部件可以放置在基底层上，以提供电磁或静电力，以在由致动机构作用时旋转可记录盘。 作为示例，本发明可以利用MEMS技术来将盘驱动器的盘和马达集成为公共组件。
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公开(公告)号：US07254885B2
公开(公告)日：2007-08-14
申请号：US10263891
申请日：2002-10-03
申请人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Kyle M. Bartholomew , John R. Pendray , Zine-Eddine Boutaghou
发明人： Roger L. Hipwell, Jr. , Wayne A. Bonin , Kyle M. Bartholomew , John R. Pendray , Zine-Eddine Boutaghou
CPC分类号： G11B5/4853 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49798
摘要： A method is used for fabricating sliders for use in a disc drive actuation system, the sliders having bonds pads formed on either a top surface or side faces of the slider. The method comprises providing a substrate having a top surface. Trenches are formed in the substrate and filled with a bond pad material to form slider bond pads. Excess bond pad material is removed from the trenches such that the slider bond pads are flush with the top surface of the substrate. A transducer is fabricated on the top surface of the substrate. Finally, the slider bond pads are exposed.
摘要翻译： 一种用于制造用于盘驱动器致动系统的滑块的方法，滑块具有形成在滑块的顶表面或侧面上的接合垫。 该方法包括提供具有顶表面的基底。 在衬底中形成沟槽，并填充有焊盘材料以形成滑块接合焊盘。 从沟槽去除过量的接合焊盘材料，使得滑块接合焊盘与衬底的顶表面齐平。 在衬底的顶表面上制造换能器。 最后，滑块接合垫被暴露。
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公开(公告)号：US07698806B2
公开(公告)日：2010-04-20
申请号：US11934954
申请日：2007-11-05
申请人： Wayne A. Bonin , Roger L. Hipwell , John R. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
发明人： Wayne A. Bonin , Roger L. Hipwell , John R. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
CPC分类号： G11B5/6005 , G11B5/3173 , G11B5/6082 , Y10S438/976 , Y10T29/49025 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49055 , Y10T29/49151 , Y10T156/1082
摘要： The application discloses processes for fabricating a slider or head for a data storage device. The processes disclosed provide a transducer portion that is separated from a slider body by a gap. In an illustrated embodiment, actuator elements are fabricated in the gap to adjust a position of the transducer portion relative to the slider body.
摘要翻译： 该申请公开了用于制造用于数据存储装置的滑块或头部的方法。 所公开的方法提供了一个换能器部分，其通过间隙与滑块体分开。 在所示的实施例中，在间隙中制造致动器元件以调节换能器部分相对于滑块体的位置。
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7.发明授权Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片公开(公告)号：US06733681B1
公开(公告)日：2004-05-11
申请号：US09707698
申请日：2000-11-07
申请人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
发明人： Roger L. Hipwell, Jr. , Lee Walter , Wayne A. Bonin , Barry D. Wissman , Zine-Eddine Boutaghou , Barbara J. Ihlow-Mahrer
IPC分类号： B81C100
CPC分类号： B81C1/00357 , B81C2201/019 , Y10T29/49025
摘要： A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.
摘要翻译： 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。
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公开(公告)号：US07126792B2
公开(公告)日：2006-10-24
申请号：US10286652
申请日：2002-11-01
申请人： Wayne A. Bonin , Roger L. Hipwell, Jr. , John J. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
发明人： Wayne A. Bonin , Roger L. Hipwell, Jr. , John J. Pendray , Kyle M. Bartholomew , Zine-Eddine Boutaghou
CPC分类号： G11B5/6005 , G11B5/5552
摘要： A head having micro-positioning control. The head includes a slider body and a transducer body coupled to the slider body through a flexible interface. The transducer body is spaced from the slider body to form a gap therebetween. Micro-positioning actuators are coupled to the transducer body in the gap to provide micro-positioning control. In an embodiment for an air bearing slider, the gap includes off-track and fly height positioning control.
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公开(公告)号：US07088559B2
公开(公告)日：2006-08-08
申请号：US10059892
申请日：2002-01-29
IPC分类号： G11B5/56
CPC分类号： G11B5/5552
摘要： An integrated interface structure for a nested body to provide an electrical connection. The interface structure includes nested bond pads which electrically interface with leads. The nested bond pads are fabricated on a microstructure to provide an interface to drive circuitry for transducer elements of a slider or head supported by the microstructure.
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公开(公告)号：US06829119B2
公开(公告)日：2004-12-07
申请号：US10279404
申请日：2002-10-24
IPC分类号： G11B5596
CPC分类号： G11B5/5552
摘要： A read/write head microactuator includes first and second insulating deposits that are flat, spaced apart by an air gap, and laterally movable responsive to a microactuator electrical drive current. First and second flat, interdigitated drive electrode deposits are deposited on the first insulating deposit. A flat, digitated sense electrode deposit is deposited on the second insulating deposit. The sense electrode deposit provides a relative position output. The sense electrode deposit faces both the drive electrode deposits across the air gap.
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