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    Microfabricated Fluid Dynamic Bearing
    1.
    发明申请
    Microfabricated Fluid Dynamic Bearing 有权
    微型流体动力轴承

    公开(公告)号：US20100303393A1

    公开(公告)日：2010-12-02

    申请号：US12473243

    申请日：2009-05-27

    Applicant: Roger L. Hipwell, JR. ,  Alan L. Grantz ,  Dadi Setiadi ,  Yang Li

    Inventor： Roger L. Hipwell, JR. ,  Alan L. Grantz ,  Dadi Setiadi ,  Yang Li

    IPC: F16C32/06 ,  B44C1/22

    CPC classification number: G11B19/2036 ,  F16C17/105 ,  F16C33/107 ,  F16C2370/12

    Abstract: A fluid dynamic bearing formed by a microelectromechanical systems (MEMS) wafer-level batch-fabrication process is provided. The process results in a high performance and high reliability fluid dynamic bearing having features including higher bearing lifetime at high RPM, improved bearing stiffness, durability and thrust/restoring forces capabilities. The present invention is especially useful with small form factor disc drive memory devices having constraints in motor height, such as a 2.5 inch disc drive, requiring high performance including high rotational speed and large areal density. A sacrificial layer is utilized in the process to simultaneously form symmetrical facing surfaces of relatively rotatable components. The facing surfaces define, therebetween, a desired feature, such as a journal bearing, a thrust bearing, a fluid channel, a fluid reservoir, a capillary seal, pressure generating grooves, and other profile geometries. Such geometry control allows for design freedom in obtaining a desired bearing performance and stiffness.

    Abstract translation: 提供了由微机电系统（MEMS）晶圆级批量制造工艺形成的流体动力轴承。 该过程产生了高性能和高可靠性的流体动力轴承，其特征包括在高转速下具有较高的轴承寿命，改进的轴承刚度，耐用性和推力/恢复力能力。 本发明对于具有马达高度限制的小尺寸盘驱动器存储器件是特别有用的，例如2.5英寸盘驱动器，需要包括高旋转速度和大面密度的高性能。 在该过程中利用牺牲层以同时形成相对可旋转部件的对称面对表面。 相对的表面在它们之间限定期望的特征，例如轴颈轴承，推力轴承，流体通道，流体储存器，毛细管密封件，压力产生槽和其它轮廓几何形状。 这种几何控制允许在获得期望的轴承性能和刚度方面的设计自由度。

    Electrical feedthrough assembly for a sealed housing
    2.
    发明授权
    Electrical feedthrough assembly for a sealed housing 失效
    用于密封外壳的电气馈通组件

    公开(公告)号：US06989493B2

    公开(公告)日：2006-01-24

    申请号：US10792601

    申请日：2004-03-03

    Applicant: Roger L. Hipwell, Jr. ,  Neal F. Gunderson ,  Zine-Eddine Boutaghou

    Inventor： Roger L. Hipwell, Jr. ,  Neal F. Gunderson ,  Zine-Eddine Boutaghou

    IPC: H01B17/26 ,  H05K1/16

    CPC classification number: G11B33/12 ,  H01L23/10 ,  H01L23/345 ,  H01L2924/0002 ,  H01L2924/3011 ,  H05K1/0212 ,  H05K1/053 ,  H05K3/28 ,  H05K3/423 ,  H05K3/445 ,  H05K2201/09563 ,  H05K2201/0999 ,  H05K2203/1147 ,  H01L2924/00

    Abstract: An electrical feedthrough assembly for establishing an electrical connection path through an aperture in a side wall of a housing, and a method of fabrication thereof. The feedthrough assembly comprises a plate and at least one electrical contact which extends through the plate. Preferably, a heating member is further provided to extend along a circumference of the plate. The plate is sized to span and surround the aperture so that, upon generation of heat by the heating member, at least one ring of sealing material adjacent the heating member flows to establish a seal between the plate and the housing wall surrounding the aperture. The heat is preferably generated by applying current to the heating member. The feedthrough assembly is preferably fabricated using a microfabrication process. A batch fabrication operation is preferably employed so that a population of the plates are formed from a single panel and subsequently separated therefrom.

    Abstract translation: 一种用于建立通过壳体的侧壁中的孔的电连接路径的电馈通组件及其制造方法。 馈通组件包括板和延伸穿过板的至少一个电触头。 优选地，加热构件还设置成沿着板的圆周延伸。 该板的尺寸设置成跨过并围绕孔，使得在加热构件产生热量时，与加热构件相邻的至少一个密封材料环流动，以在板和围绕孔的壳体壁之间建立密封。 优选通过向加热部件施加电流来产生热量。 馈通组件优选地使用微细加工工艺制造。 优选采用批量制造操作，使得板的群体由单个板形成并随后与其分离。

    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining
    3.
    发明授权
    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
    用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片

    公开(公告)号：US06733681B1

    公开(公告)日：2004-05-11

    申请号：US09707698

    申请日：2000-11-07

    Applicant: Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    Inventor： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    IPC: B81C100

    CPC classification number: B81C1/00357 ,  B81C2201/019 ,  Y10T29/49025

    Abstract: A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.

    Abstract translation: 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

    Strain sensor patterned on MEMS flex arms
    5.
    发明授权
    Strain sensor patterned on MEMS flex arms 失效
    应变传感器图案化在MEMS柔性臂上

    公开(公告)号：US07000459B2

    公开(公告)日：2006-02-21

    申请号：US10463775

    申请日：2003-06-17

    Applicant: Jason W. Riddering ,  Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr.

    Inventor： Jason W. Riddering ,  Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr.

    IPC: G01B5/28

    CPC classification number: G11B5/5552 ,  G01L1/2206

    Abstract: A micromechanical assembly couples to a positioning member and to a body having an aerodynamic surface subject to aerodynamic forces. The micromechanical assembly comprises a substrate including a flexible beam joining a first substrate portion that is attachable to the positioning member to a second substrate portion that is attachable to the body. The substrate includes a substrate surface extending at least over the flexible beam. A lithographic pattern is formed on the substrate surface. The lithographic pattern includes at least a first impedance element that senses flexing of the flexible beam. Contact pads are coupled to the lithographic pattern for coupling to a flex measurement circuit.

    Abstract translation: 微机械组件连接到定位构件和耦合到具有经受空气动力的空气动力学表面的主体。 微机械组件包括基板，该基板包括将可附接到定位构件的第一基板部分连接到可附接到主体的第二基板部分的柔性梁。 衬底包括至少在柔性梁上延伸的衬底表面。 在基板表面上形成平版印刷图案。 光刻图案至少包括感应柔性光束弯曲的第一阻抗元件。 接触焊盘耦合到光刻图案以耦合到柔性测量电路。

    Moving coil micro actuator with reduced rotor mass
    7.
    发明授权
    Moving coil micro actuator with reduced rotor mass 失效

    公开(公告)号：US06614628B2

    公开(公告)日：2003-09-02

    申请号：US10051366

    申请日：2002-01-18

    Applicant: Peter Crane ,  Wayne A. Bonin ,  Roger L. Hipwell, Jr. ,  Zine-Eddine Boutaghou

    Inventor： Peter Crane ,  Wayne A. Bonin ,  Roger L. Hipwell, Jr. ,  Zine-Eddine Boutaghou

    IPC: G11B556

    CPC classification number: G11B5/596 ,  G11B5/5552 ,  H02K3/26 ,  H02K41/03

    Abstract: A disc drive has a disc rotatable about an axis, a slider carrying a transducing head for transducing data with a disc, and a dual stage actuation assembly supporting the slider to position the transducing head adjacent a selected radial track of the disc. The dual stage actuation assembly includes a movable actuator arm and a suspension assembly supported by the actuator arm. The suspension assembly includes a gimbal. The dual stage actuation assembly further includes a microactuator. The microactuator includes a stator having a top surface and a bottom surface wherein the gimbal is connected to the top surface of the stator. A rotor is operatively connected to the stator and the rotor supports the slider. A magnetic keeper structure is supported by the stator such that the rotor moves with respect to the magnetic keeper structure.

    Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag
    8.
    发明授权
    Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag 有权
    用于使用反应离子蚀刻滞后的微机电系统装置的可破坏的系绳

    公开(公告)号：US06387778B1

    公开(公告)日：2002-05-14

    申请号：US09649536

    申请日：2000-08-28

    Applicant: Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    Inventor： Wayne A. Bonin ,  Zine-Eddine Boutaghou ,  Roger L. Hipwell, Jr. ,  Barry D. Wissman ,  Lee Walter ,  Barbara J. Ihlow-Mahrer

    IPC: H01L21301

    CPC classification number: B81C1/00873 ,  B81C2201/0132

    Abstract: Utilizing reactive ion etching (RIE) lag, tethers are fabricated that reliably hold devices in place during processing and storage, yet are easily broken to remove the parts from the wafer as desired, without requiring excessive force that could damage the devices. The tethers are fabricated by slightly narrowing the periphery etch feature at several places. By adjusting the ratio of the main periphery width to the necked width at the tethers, the final thickness of the tether can be controlled to a small fraction of the wafer thickness, so that tethers defined by readily achievable feature sizes will reliably hold the parts in place until removal is desired. Since the tethers are now only a fraction of the wafer thickness, they will reliably break to release the part at a force level that will not damage the part.

    Abstract translation: 利用反应离子蚀刻（RIE）滞后，制造了在加工和存储期间可靠地将装置保持在适当位置的系链，但是容易断裂以根据需要从晶片中除去部件，而不需要可能损坏装置的过大的力。 系绳是通过在几个地方略微缩小周边蚀刻特征来制造的。 通过调节主臂周边宽度与系绳颈缩宽度的比例，可以将系绳的最终厚度控制在晶片厚度的一小部分，从而可以容易地达到的特征尺寸所限定的系绳将可靠地保持在 地方，直到需要去除。 由于系绳现在只是晶片厚度的一部分，它们将可靠地断裂，以不会损坏零件的力水平释放零件。

    Method and apparatus for aligning a laser diode on a slider
    9.
    发明授权
    Method and apparatus for aligning a laser diode on a slider 有权
    用于使激光二极管对准滑块的方法和装置

    公开(公告)号：US08345517B2

    公开(公告)日：2013-01-01

    申请号：US13097693

    申请日：2011-04-29

    Applicant: Jon P. Hurley ,  Roger L. Hipwell, Jr.

    Inventor： Jon P. Hurley ,  Roger L. Hipwell, Jr.

    IPC: G11B11/00

    CPC classification number: H01S5/02252 ,  G11B5/105 ,  G11B5/3173 ,  G11B2005/0021 ,  H01S5/005 ,  Y10T29/49021

    Abstract: An apparatus includes a structure including a waveguide and a pocket adjacent to an input facet of the waveguide. A laser has an output facet and is positioned in the pocket. A stop is included one at least one of the laser and a wall of the pocket. The stop is positioned at an interface between the laser and the wall of the pocket such that the output facet of the laser and the input facet of the waveguide are separated by a gap.

    Abstract translation: 一种装置包括一个结构，该结构包括与波导的输入小面相邻的波导和凹穴。 激光器具有输出小面并且位于口袋中。 一个停车位包括一个至少一个激光和一个口袋的墙壁。 该止动件位于激光器和袋的壁之间的界面处，使得激光器的输出小面和波导的输入小面被间隙分开。

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