公开(公告)号：US20220341795A1

公开(公告)日：2022-10-27

申请号：US17238051

申请日：2021-04-22

Applicant: Analog Devices, Inc.

Inventor： Erdinc Tatar ,  William A. Clark

IPC: G01L1/14

Abstract: Microelectromechanical systems (MEMS) capacitive strain gauge sensors are described. The strain gauge sensors include a lever configured to mechanically amplify a strain response. In some embodiments, an anchored beam is coupled to the effort arm of the lever and a movable sensing finger to the resistance arm. The effort arm may be shorter than the resistance arm, thus providing a mechanical amplification.

公开(公告)号：US11774244B2

公开(公告)日：2023-10-03

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5712 ,  G01C19/5719

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US20210381834A1

公开(公告)日：2021-12-09

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US12000739B2

公开(公告)日：2024-06-04

申请号：US17238051

申请日：2021-04-22

Applicant: Analog Devices, Inc.

Inventor： Erdinc Tatar ,  William A. Clark

IPC: G01L1/14

CPC classification number: G01L1/148

Abstract: Microelectromechanical systems (MEMS) capacitive strain gauge sensors are described. The strain gauge sensors include a lever configured to mechanically amplify a strain response. In some embodiments, an anchored beam is coupled to the effort arm of the lever and a movable sensing finger to the resistance arm. The effort arm may be shorter than the resistance arm, thus providing a mechanical amplification.

公开(公告)号：US20220057210A1

公开(公告)日：2022-02-24

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US11193771B1

公开(公告)日：2021-12-07

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.