DOE defect monitoring utilizing total internal reflection

    公开(公告)号:US10444111B2

    公开(公告)日:2019-10-15

    申请号:US16055181

    申请日:2018-08-06

    Applicant: Apple Inc.

    Abstract: An optical apparatus includes a diffractive optical element (DOE), having at least one optical surface, a side surface, which is not parallel to the at least one optical surface of the DOE, and a grating, which is formed on the at least one optical surface so as to receive and diffract first radiation from a primary radiation source that is incident on the grating. The apparatus further includes at least one secondary radiation source, which is configured to direct second radiation to impinge on the side surface, causing at least part of the second radiation to propagate within the DOE while diffracting internally from the grating and to exit through the side surface. The apparatus also includes at least one radiation detector, which is positioned so as to receive and sense an intensity of the second radiation that has exited through the side surface.

    DOE defect monitoring utilizing total internal reflection

    公开(公告)号:US20180080851A1

    公开(公告)日:2018-03-22

    申请号:US15594607

    申请日:2017-05-14

    Applicant: Apple Inc.

    Abstract: An optical apparatus includes a diffractive optical element (DOE), having at least one optical surface, a side surface, which is not parallel to the at least one optical surface of the DOE, and a grating, which is formed on the at least one optical surface so as to receive and diffract first radiation that is incident on the grating. The apparatus further includes at least one secondary radiation source, which is configured to direct second radiation to impinge on the side surface, causing at least part of the second radiation to propagate within the DOE while diffracting internally from the grating and to exit through the side surface. The apparatus also includes at least one radiation detector, which is positioned so as to receive and sense an intensity of the second radiation that has exited through the side surface.

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