公开(公告)号：US20210208308A1

公开(公告)日：2021-07-08

申请号：US17212500

申请日：2021-03-25

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Rutger Meyer Timmerman Thijssen ,  Robert Jan Visser

IPC: G02B1/00 ,  G02F1/1335

Abstract: Embodiments described herein relate to nanostructured trans-reflective filters having sub-wavelength dimensions. In one embodiment, the trans-reflective filter includes a film stack that transmits a filtered light within a range of wavelengths and reflects light not within the first range of wavelengths. The film stack includes a first metal film disposed on a substrate having a first thickness, a first dielectric film disposed on the first metal film having a second thickness, a second metal film disposed on the first dielectric film having a third thickness, and a second dielectric film disposed on the second metal film having a fourth thickness.

公开(公告)号：US20200270746A1

公开(公告)日：2020-08-27

申请号：US16395005

申请日：2019-04-25

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Rutger MEYER TIMMERMAN THIJSSEN ,  Ludovic GODET ,  Jinxin FU

IPC: C23C16/02 ,  C23C16/40

Abstract: A method and apparatus for creating a flat optical structure is disclosed. The method includes etching at least one trench in a substrate, placing a dielectric material in at least one trench in the substrate and encapsulating the top of the substrate with a film.

公开(公告)号：US20230056086A1

公开(公告)日：2023-02-23

申请号：US17977376

申请日：2022-10-31

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Wayne MCMILLAN ,  Rutger MEYER TIMMERMAN THIJSSEN

IPC: G02F1/01 ,  B82Y20/00

Abstract: Embodiments of metasurfaces having nanostructures with desired geometric profiles and configurations are provided in the present disclosure. In one embodiment, a metasurface includes a nanostructure formed on a substrate, wherein the nanostructure is cuboidal or cylindrical in shape. In another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein each of the nanostructures has a gap greater than 35 nm spaced apart from each other. In yet another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein the nanostructures are fabricated from at least one of TiO2, silicon nitride, or amorphous silicon, or GaN or aluminum zinc oxide or any material with refractive index greater than 1.8, and absorption coefficient smaller than 0.001, the substrate is transparent with absorption coefficient smaller than 0.001.

公开(公告)号：US20190129243A1

公开(公告)日：2019-05-02

申请号：US16105780

申请日：2018-08-20

Applicant: Applied Materials, Inc.

Inventor： Rutger MEYER TIMMERMAN THIJSSEN ,  Robert Jan VISSER ,  Tapashree ROY

IPC: G02F1/1335 ,  F21V8/00

Abstract: Aspects disclosed herein relate to color filters for display devices, and more specifically to color filters for transmitting or reflecting and recycling colors of light in liquid crystal display devices. In one aspect, a metasurface is formed between two polarizers in an LCD device. In another aspect, a metasurface is formed on a white light guide of an LCD device. The metasurface is formed to transmit desired color(s) of light and to reflect undesired color(s) of light back into the light guide to be recycled and passed through the LCD device elsewhere. Using the color filter to recycle reflected colors of light increases the efficiency of the display device, such as the LCD device.

公开(公告)号：US20230162354A1

公开(公告)日：2023-05-25

申请号：US17993144

申请日：2022-11-23

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Shubhayan BHATTACHARYA ,  Kiran Rangaswamy AATRE ,  Sumit Kumar JHA ,  Suraj RENGARAJAN ,  Riya DUTTA

IPC: G06T7/00 ,  G06V10/26 ,  G06V10/764 ,  G06V10/82

CPC classification number: G06T7/0012 ,  G06V10/26 ,  G06V10/764 ,  G06V10/82 ,  G06T2207/10036 ,  G06T2207/30024

Abstract: According to certain embodiments, a system for detection of anomalous cells, comprises a hyperspectral imaging system; a memory having executable instructions stored thereon; and a processor configured to execute the executable instructions to cause the system to: receive a patient hyperspectral image comprising a pixel spectral signature for each pixel of the received patient hyperspectral image; classify the patient hyperspectral image by a machine learning model trained to classify hyperspectral images based on pixel spectral signatures; and provide an indication that the patient hyperspectral image contains an anomalous cell type, responsive to the classifying.

公开(公告)号：US20230033741A1

公开(公告)日：2023-02-02

申请号：US17963983

申请日：2022-10-11

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Rutger MEYER TIMMERMAN THIJSSEN ,  Ludovic GODET ,  Jinxin FU

IPC: C23C16/02 ,  C23C16/40 ,  C23C16/04

Abstract: A method and apparatus for creating a flat optical structure is disclosed. The method includes etching at least one trench in a substrate, placing a dielectric material in at least one trench in the substrate and encapsulating the top of the substrate with a film.

公开(公告)号：US20230408413A1

公开(公告)日：2023-12-21

申请号：US18334186

申请日：2023-06-13

Applicant: Applied Materials, Inc.

Inventor： Viswanath BAVIGADDA ,  Shubhayan BHATTACHARYA ,  Tapashree ROY ,  Ankur KADAM ,  Kiran Rangaswamy AATRE ,  Suraj RENGARAJAN

IPC: G01N21/64 ,  G01N21/39

CPC classification number: G01N21/6456 ,  G01N21/643 ,  G01N21/39 ,  G01N2021/399 ,  G01N2201/0633 ,  G01N2201/1235 ,  G01N21/94

Abstract: In one embodiment, an apparatus to identify chemical and spatial properties of nanoparticles in a semiconductor cleaning solution, comprises a broadband light source to provide an excitation beam; a focusing lens in a path of the excitation beam to form a focused excitation beam; a sample cell, the sample cell configured to hold a cleaning solution and one or more insoluble analytes-of-interest therein; a plurality of optical lens in the path of one or more fluorescence signals to focus the one or more fluorescence signals; and an imaging device, wherein the imaging device captures the one or more fluorescence signals to form a plurality of images that contain both spatial data and spectral data about the one or more insoluble analytes-of-interest.

公开(公告)号：US20220336270A1

公开(公告)日：2022-10-20

申请号：US17810466

申请日：2022-07-01

Applicant: Applied Materials, Inc.

Inventor： Ludovic GODET ,  Wayne MCMILLAN ,  Rutger MEYER TIMMERMAN THIJSSEN ,  Naamah ARGAMAN ,  Tapashree ROY ,  Sage Toko Garrett DOSHAY

IPC: H01L21/768 ,  H01L21/3213 ,  H01L21/311 ,  H01L25/04 ,  H01L25/16

Abstract: Systems and methods herein are related to the formation of optical devices including stacked optical element layers using silicon wafers, glass, or devices as substrates. The optical elements discussed herein can be fabricated on temporary or permanent substrates. In some examples, the optical devices are fabricated to include transparent substrates or devices including charge-coupled devices (CCD), or complementary metal-oxide semiconductor (CMOS) image sensors, light-emitting diodes (LED), a micro-LED (uLED) display, organic light-emitting diode (OLED) or vertical-cavity surface-emitting laser (VCSELs). The optical elements can have interlayers formed in between optical element layers, where the interlayers can range in thickness from 1 nm to 3 mm.

公开(公告)号：US20190318957A1

公开(公告)日：2019-10-17

申请号：US16283560

申请日：2019-02-22

Applicant: Applied Materials, Inc.

Inventor： Ludovic GODET ,  Wayne MCMILLAN ,  Rutger MEYER TIMMERMAN THIJSSEN ,  Naamah ARGAMAN ,  Tapashree ROY ,  Sage DOSHAY

IPC: H01L21/768 ,  H01L21/3213 ,  H01L25/16 ,  H01L25/04 ,  H01L21/311

Abstract: Systems and methods herein are related to the formation of optical devices including stacked optical element layers using silicon wafers, glass, or devices as substrates. The optical elements discussed herein can be fabricated on temporary or permanent substrates. In some examples, the optical devices are fabricated to include transparent substrates or devices including charge-coupled devices (CCD), or complementary metal-oxide semiconductor (CMOS) image sensors, light-emitting diodes (LED), a micro-LED (uLED) display, organic light-emitting diode (OLED) or vertical-cavity surface-emitting laser (VCSELs). The optical elements can have interlayers formed in between optical element layers, where the interlayers can range in thickness from 1 nm to 3 mm.

公开(公告)号：US20200339484A1

公开(公告)日：2020-10-29

申请号：US16452136

申请日：2019-06-25

Applicant: Applied Materials, Inc.

Inventor： Tapashree ROY ,  Rutger MEYER TIMMERMAN THIJSSEN

IPC: C04B41/53 ,  C04B41/91

Abstract: Embodiments of the present disclosure generally relate to methods of forming optical devices comprising nanostructures disposed on transparent substrates. A substrate, such as a silicon wafer, is provided as a base for forming an optical device. A transparent layer is disposed on a first surface of the substrate, and a structure layer is disposed on the transparent surface. An etch mask layer is disposed on a second surface of the substrate opposite the first surface, and a window or opening is formed in the etch mask layer to expose a portion of the second surface of the substrate. A plurality of nanostructures is then formed in the structure layer, and a portion of the substrate extending from the window to the transparent layer is removed. A portion of the transparent layer having nanostructures disposed thereon is then detached from the substrate to form an optical device.