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公开(公告)号：US10290087B2
公开(公告)日：2019-05-14
申请号：US15701371
申请日：2017-09-11
Applicant: Applied Materials Israel Ltd.
Inventor： Ariel Shkalim , Moshe Amzaleg , Eyal Neistein , Shlomo Tubul , Mark Geshel , Elad Cohen
Abstract: There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.
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2.发明授权公开(公告)号：US10663407B2
公开(公告)日：2020-05-26
申请号：US16227453
申请日：2018-12-20
Applicant: Applied Materials Israel Ltd.
Inventor： Idan Kaizerman , Mark Geshel
IPC: H01L21/66 , G06F30/398 , G01N21/95
Abstract: Data indicative of alignment targets may be received. Each alignment target may be associated with a target location on an object. Locations of the object to be inspected may be identified. An alignment target from the alignment targets may be selected. Each of the locations may be within a determined distance from the selected alignment target. An indication may be provided to align the object relative to an examination tool for inspecting the locations within the determined distance from the selected alignment target.
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3.发明授权公开(公告)号：US10161882B1
公开(公告)日：2018-12-25
申请号：US15222824
申请日：2016-07-28
Applicant: Applied Materials Israel Ltd.
Inventor： Idan Kaizerman , Mark Geshel
Abstract: A method, computerized system and computer program product for examining an object using a processor operatively connected to a memory, the method comprising: accommodating in the memory data indicative of a plurality of alignment targets, each alignment target associated with a target location on an object; accommodating in the memory a plurality of locations to be captured; and selecting by the processor an alignment target subset of the plurality of alignment targets, such that each of the plurality of locations is associated with and is within a determined distance from a single alignment target from the alignment target subset, the distance determined in accordance with a provided field of view, and wherein the alignment target subset comprises fewer targets than locations to be reviewed, the alignment target being usable for aligning the object relative to an examination tool for capturing the locations associated with the single alignment target.
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公开(公告)号：US09401013B2
公开(公告)日：2016-07-26
申请号：US13756462
申请日：2013-01-31
Applicant: Applied Materials Israel Ltd.
Inventor： Mark Geshel , Zvi Goren , Efrat Rozenman
CPC classification number: G06T7/0004 , G01R31/26 , G01R31/2894 , G06T7/0006 , G06T7/001 , G06T2207/30148 , H01L22/12
Abstract: There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.
Abstract translation: 提供了能够对在样品的生产层上检测到的缺陷进行分类的检查方法。 该方法包括：获取与检测到的缺陷相关的输入数据; 使用与生产层相关联的决策算法处理输入数据并指定两个或更多个分类操作及其序列; 以及根据预定义的箱分类处理的缺陷，其中每个仓与至少一个分类操作相关联，其中至少一个分类操作将至少部分经处理的缺陷排序到一个或多个分类箱以产生最终分类的缺陷，以及 其中除了最后一个之外的每个分类操作通过以下分类操作中的一个或多个对待处理的缺陷的至少一部分进行排序。
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