公开(公告)号：US07009748B2

公开(公告)日：2006-03-07

申请号：US11060835

申请日：2005-02-17

Applicant: Arthur Monroe Turner ,  Andrew S. Dewa ,  Mark W. Heaton

Inventor： Arthur Monroe Turner ,  Andrew S. Dewa ,  Mark W. Heaton

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B7/1821 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/101

Abstract: A system and method for providing a resonant beam sweep about a first axis. A mirror or reflective surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. A light source reflects a beam of light from the mirror such that the oscillating mirror produces a beam sweep across a target area. The resonant beam sweep is moved orthogonally on the target area by a gimbals portion of the mirror pivoting about a second axis according to one embodiment. A second independent mirror provides the orthogonal movement according to a second embodiment.

Abstract translation: 一种用于围绕第一轴提供共振光束扫描的系统和方法。 由第一对扭转铰链支撑的反射镜或反射表面通过惯性耦合通过第一对扭转铰链的能量而被驱动成围绕第一轴的共振振荡。 光源反射来自反射镜的光束，使得振荡反射镜在目标区域上产生光束扫描。 根据一个实施例，谐振光束扫描在目标区域上通过绕着第二轴枢转的镜子的万向节部分正交地移动。 第二独立镜提供根据第二实施例的正交运动。

公开(公告)号：US06999215B2

公开(公告)日：2006-02-14

申请号：US10682015

申请日：2003-10-09

Applicant: Andrew Steven Dewa ,  Arthur Monroe Turner ,  John W. Orcutt

Inventor： Andrew Steven Dewa ,  Arthur Monroe Turner ,  John W. Orcutt

IPC: G02B26/08

CPC classification number: G02B26/0858 ,  G02B26/085 ,  G02B26/101

Abstract: A multilayered torsional hinged scanning mirror including a hinge layer with a mirror attaching member pivotally supported by torsional hinges. A mirror layer is bonded to the front side of the attaching member and a back layer is bonded to the back side of the attaching member. The mirror layer and the back layer are equal in mass and weight to balance the moment of inertia and stresses on the torsional hinges. The back layer may be a permanent magnet if the mirror oscillating drive is a magnetic drive. Alternately, the back layer may be another silicon slice.

Abstract translation: 一种多层扭转铰链式扫描镜，其包括具有由扭转铰链枢轴支撑的反射镜附接构件的铰链层。 镜面层结合到安装构件的前侧，并且背层粘合到附接构件的后侧。 镜面层和背层的质量和重量相等，以平衡扭转铰链上的惯性矩和应力。 如果反射镜振荡驱动器是磁驱动器，则背层可以是永磁体。 或者，背层可以是另一个硅片。

公开(公告)号：US6114738A

公开(公告)日：2000-09-05

申请号：US406821

申请日：1999-09-28

Applicant: John Harold Tregilgas ,  Arthur Monroe Turner

Inventor： John Harold Tregilgas ,  Arthur Monroe Turner

IPC: H01L21/388 ,  H01L31/0296 ,  H01L31/103 ,  H01L31/18 ,  H01L31/00 ,  H01L31/072

CPC classification number: H01L21/388 ,  H01L31/02966 ,  H01L31/1032 ,  H01L31/1832 ,  H01L31/1864 ,  Y02E10/50

Abstract: A hybrid focal plane array has Hg.sub.1-x Cd.sub.x Te junction photodiodes formed in a substrate of HgCdTe which is capped by a layer of Te-rich CdTe. Type conversion of a low metal vacancy HgCdTe substrate to p-type is performed by annealing the capped substrate at a temperature sufficient to support interdiffusion between the Te-rich CdTe capping layer and the HgCdTe substrate. Use of the CdTe capping layer with a slight excess Te maintains the surface of the HgCdTe substrate in a Te-rich phase condition.

Abstract translation: 混合焦平面阵列具有形成在HgCdTe衬底中的Hg1-xCdxTe结光电二极管，其被富含Te的CdTe层覆盖。 通过在足以支持富Te的CdTe覆盖层和HgCdTe衬底之间的相互扩散的温度下退火封装的衬底来进行低金属空位HgCdTe衬底到p型的类型转换。 使用具有轻微过量的Te的CdTe覆盖层将HgCdTe衬底的表面保持在富Te相的状态。

公开(公告)号：US20090185250A1

公开(公告)日：2009-07-23

申请号：US12355159

申请日：2009-01-16

Applicant: Arthur Monroe Turner ,  Varkey George

Inventor： Arthur Monroe Turner ,  Varkey George

IPC: G02B26/00

CPC classification number: G02B26/0833 ,  G02B26/0841 ,  G02B26/105 ,  Y10S359/90

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure. A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract translation: 提出了一种用于MEMS反射镜装置的音频反馈的反射镜装置和方法。 镜装置包括具有反射表面的反射镜，该反射表面定位成拦截由激光产生的调制光束。 镜子在铰链轴结构上振荡。 麦克风检测镜面振荡信息。 镜装置还包括镜驱动器系统和视频控制器系统。 镜驱动器系统使镜子围绕铰链轴结构旋转。 视频控制器系统使用从麦克风接收的信息和从镜像驱动器控制器接收的信息来控制激光器的输出。

公开(公告)号：US07242515B2

公开(公告)日：2007-07-10

申请号：US11232604

申请日：2005-09-22

Applicant: Arthur Monroe Turner ,  John W. Orcutt ,  Carter Bruce Simpson

Inventor： Arthur Monroe Turner ,  John W. Orcutt ,  Carter Bruce Simpson

IPC: G02F1/00

CPC classification number: B81B3/0072 ,  B81B2201/047 ,  B81B2203/0109 ,  G02B26/0808 ,  G02B26/0866 ,  G02B26/0875

Abstract: Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.

Abstract translation: 将具有第一TCE（热膨胀系数）的扭转铰链装置（例如反射镜）安装在具有不同于所述第一TCE的第二TCE的基板上的方法和结构。 所述结构包括在所述基底和所述扭转铰链装置之间的多个柔性支撑柱，所述多个柔性支撑柱在所述扭转铰接装置的收缩和/或膨胀不同于所述基底的相应收缩和膨胀时变形。

公开(公告)号：US07239437B2

公开(公告)日：2007-07-03

申请号：US11136347

申请日：2005-05-24

Applicant: Arthur Monroe Turner ,  Mark W. Heaton

Inventor： Arthur Monroe Turner ,  Mark W. Heaton

IPC: G02B26/08

CPC classification number: G02B26/085 ,  Y10S359/90

Abstract: Apparatus and methods for removing jitter and stabilizing the feed back system of a torsional hinged device with minimal changes to the system. The stabilization is accomplished by spatially isolating the pivoting mirror structure from all drive, support and packaging structures to reduce air drag. The mirror structures may be further stabilized by tailoring the drive mechanism and the position of the mechanism to produce substantially pure rotational drive torque on the mirror.

Abstract translation: 用于消除抖动并稳定扭转铰链装置的反馈系统的装置和方法，其具有对系统的最小变化。 通过将枢转反射镜结构与所有驱动，支撑和包装结构空间隔离以减少空气阻力来实现稳定。 可以通过调整驱动机构和机构的位置来在镜子上产生基本上纯的旋转驱动扭矩来进一步稳定镜面结构。

公开(公告)号：US06964196B2

公开(公告)日：2005-11-15

申请号：US10440902

申请日：2003-05-19

Applicant: Arthur Monroe Turner ,  Andrew S. Dewa ,  Mark W. Heaton

Inventor： Arthur Monroe Turner ,  Andrew S. Dewa ,  Mark W. Heaton

IPC: G02B26/08 ,  G01H13/00

CPC classification number: G02B26/0841 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/101

Abstract: A system and method for providing resonant movement about a first axis. A functional surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. The resonant movement may be moved orthogonally on the target area by a gimbals portion of the functional surface pivoting about a second axis according to one embodiment. The resonant oscillation of the functional surface is monitored to detect changes in frequency due to mass changes of the functional surface.

Abstract translation: 一种用于提供关于第一轴线的共振运动的系统和方法。 由第一对扭转铰链支撑的功能表面通过惯性耦合通过第一对扭转铰链的能量而被驱动成围绕第一轴的共振振荡。 根据一个实施例，谐振运动可以通过由第二轴线枢转的功能表面的万向节部分在目标区域上正交地移动。 监测功能表面的共振振荡，以检测功能表面质量变化引起的频率变化。

公开(公告)号：US20080252714A1

公开(公告)日：2008-10-16

申请号：US12098209

申请日：2008-04-04

Applicant: Arthur Monroe Turner

Inventor： Arthur Monroe Turner

IPC: G02B26/10 ,  B41J2/435

CPC classification number: B41J2/471 ,  G02B26/0833 ,  G02B26/105

Abstract: A MEMS device, a printer and a method of printing is presented including providing a light source producing a modulated beam of light, positioning a mirror with a reflective surface to intercept the modulated beam of light. Allowing the mirror to rotate on a single-axis hinge structure such that the resultant reflected beam is swept in a scan plane and creating an image at an intersection of the scan plane and an image plane. Causing the mirror to rotate about the single-axis hinge structure and to oscillate at a tilt about the single-axis hinge structure, wherein the resultant reflected beam of light forms a lemniscate pattern along the image plane, and wherein the lemniscate pattern has an inner angle between a left sweep segment and a right sweep segment of the image. Synchronizing the inner angle of the lemniscate pattern formed on the image plane to a motion of a photosensitive medium such that an image is formed on the photosensitive medium along lines substantially parallel to each other and orthogonal to the movement of the photosensitive medium.

Abstract translation: 提出了一种MEMS器件，打印机和打印方法，包括提供产生调制光束的光源，将反射表面定位以拦截调制的光束。 允许镜子在单轴铰链结构上旋转，使得所得到的反射光束扫描在扫描平面中，并在扫描平面和图像平面的交点处产生图像。 使镜子围绕单轴铰链结构旋转并且以围绕单轴铰链结构的倾斜振荡，其中所产生的反射光束沿着图像平面形成为非收集图案，并且其中，所述透光图案具有内部 图像的左扫描段和右扫描段之间的角度。 使形成在图像平面上的混杂图案的内角与感光介质的运动同步，使得沿着基本上彼此平行并且与感光介质的运动正交的线在感光介质上形成图像。

公开(公告)号：US07072089B2

公开(公告)日：2006-07-04

申请号：US11004459

申请日：2004-12-03

Applicant: Arthur Monroe Turner ,  John W. Orcutt

Inventor： Arthur Monroe Turner ,  John W. Orcutt

IPC: G02B26/08

CPC classification number: G02B26/085 ,  B81B3/007 ,  B81B2201/042

Abstract: The present invention provides a single torsional hinge device, such as a mirror, adapted for use as a pivoting mirror and preferably a pivoting mirror oscillating at a resonant frequency about the single hinge. The single torsional hinge mirror reduces or substantially eliminates stresses on the torsional hinge mirrors caused by mismatched mounting levels of the support structure and/or differences of the coefficient and thermal expansion of materials in the mirror and support structures. The mirror may include a single layer of silicon having a reflective surface or may be a multilayered mirror wherein silicon is used for the torsional hinges and support and silicon or other materials may be used as the reflecting surface.

公开(公告)号：US07034415B2

公开(公告)日：2006-04-25

申请号：US10681986

申请日：2003-10-09

Applicant: Arthur Monroe Turner ,  Andrew Steven Dewa ,  John W. Orcutt ,  Mark W. Heaton

Inventor： Arthur Monroe Turner ,  Andrew Steven Dewa ,  John W. Orcutt ,  Mark W. Heaton

IPC: G02B26/08

CPC classification number: G02B26/085 ,  G02B26/101 ,  H02K33/16 ,  Y10S359/904

Abstract: A magnetic drive for providing pivotal motion to a functional surface, such as a mirror. The magnetic drive may be used to drive any torsional hinged device, but is particularly suitable for driving a torsional hinged mirror. According to a first embodiment, a dual axis functional surface uses a first pair of torsional hinges to provide primary movement to the functional surface and a second pair of torsional hinges provides movement orthogonal to the primary movement to allow positioning in two directions. The mass and movement of inertia of the functional surface is reduced by relocating permanent magnet sets to the axis of rotation. The reduced mass and movement of inertia results in a stiff robust hinge having a resonant frequency above about 120 Hz.

Abstract translation: 用于向诸如镜子的功能表面提供枢转运动的磁驱动器。 磁驱动器可用于驱动任何扭转铰链装置，但是特别适用于驱动扭转铰链镜。 根据第一实施例，双轴功能表面使用第一对扭转铰链来向功能表面提供主要运动，第二对扭转铰链提供与主运动正交的运动，以允许在两个方向上定位。 功能表面的质量和惯性的移动通过将永久磁铁组重新定位到旋转轴来减少。 惯性质量的减小和运动导致具有高于约120Hz的谐振频率的坚固的坚固铰链。