公开(公告)号：US11251059B2

公开(公告)日：2022-02-15

申请号：US16872864

申请日：2020-05-12

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  H01L21/68 ,  B25J9/00 ,  B25J11/00 ,  B25J9/10 ,  H01L21/67 ,  B25J9/12 ,  B25J9/16 ,  G05B19/418

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

公开(公告)号：US10978330B2

公开(公告)日：2021-04-13

申请号：US16197087

申请日：2018-11-20

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing Yin ,  Jairo T. Moura ,  Vincent Tsang ,  Aaron Gawlik ,  Nathan Spiker

IPC: G06F17/00 ,  H01L21/68 ,  H01L21/687

Abstract: A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

公开(公告)号：US11776834B2

公开(公告)日：2023-10-03

申请号：US17229495

申请日：2021-04-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing Yin ,  Jairo Moura ,  Vincent Tsang ,  Aaron Gawlik ,  Nathan Spiker

IPC: G06F17/00 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

公开(公告)号：US10134623B2

公开(公告)日：2018-11-20

申请号：US15209497

申请日：2016-07-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing Yin ,  Jairo T. Moura ,  Vincent Tsang ,  Aaron Gawlik ,  Nathan Spiker

IPC: G06F19/00 ,  H01L21/68 ,  H01L21/687

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

公开(公告)号：US11972965B2

公开(公告)日：2024-04-30

申请号：US17651183

申请日：2022-02-15

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  B25J9/00 ,  B25J9/10 ,  B25J9/12 ,  B25J9/16 ,  B25J11/00 ,  G05B19/418 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01L21/67742 ,  B25J9/0027 ,  B25J9/107 ,  B25J9/126 ,  B25J9/1605 ,  B25J11/0095 ,  G05B19/4189 ,  H01L21/67161 ,  H01L21/67196 ,  H01L21/681

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

公开(公告)号：US10651067B2

公开(公告)日：2020-05-12

申请号：US15880387

申请日：2018-01-25

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  H01L21/68 ,  B25J9/00 ,  B25J11/00 ,  B25J9/10 ,  H01L21/67 ,  B25J9/12 ,  B25J9/16 ,  G05B19/418

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.