公开(公告)号：US20150372618A1

公开(公告)日：2015-12-24

申请号：US14841853

申请日：2015-09-01

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Akiyama ,  Chienliu Chang

IPC: H02N1/08 ,  G01N29/24

CPC classification number: H02N1/08 ,  B06B1/067 ,  G01N29/00 ,  G01N29/2418 ,  G01N2291/101 ,  H02N1/00 ,  H02N11/002

Abstract: To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.

Abstract translation: 为了提出具有高S / N比的机电换能器件，机电换能器装置包括第一基片; 机电换能器元件二维排列在第一基板的前表面上并被配置为提供声波和电信号之间的转换; 电接线基板，其是与所述第一基板的背面电连接的第二基板; 设置在所述第一基板和所述第二基板之间的第一声匹配层; 设置在所述第二基板的背面上的声衰减部件; 以及设置在第二基板和声衰减部件之间的第二声匹配层。

公开(公告)号：US08754490B2

公开(公告)日：2014-06-17

申请号：US13906672

申请日：2013-05-31

Applicant: Canon Kabushiki Kaisha

Inventor： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

IPC: H01L29/84 ,  H01L21/00 ,  B06B1/02 ,  H01L23/522 ,  H01L27/12 ,  H01L21/768

CPC classification number: H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

Abstract translation: 元件阵列包括具有第一电极和第二电极的多个元件，其间具有间隙; 通过沟槽将每个元件分离第一电极，绝缘连接衬底接合到第一电极，并且通过连接衬底从相应的第一电极到与第一电极相对的一侧提供布线。

公开(公告)号：US09698705B2

公开(公告)日：2017-07-04

申请号：US14841853

申请日：2015-09-01

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Akiyama ,  Chienliu Chang

IPC: B06B1/06 ,  H02N1/08 ,  G01N29/00 ,  H02N1/00 ,  H02N11/00 ,  G01N29/24

CPC classification number: H02N1/08 ,  B06B1/067 ,  G01N29/00 ,  G01N29/2418 ,  G01N2291/101 ,  H02N1/00 ,  H02N11/002

Abstract: To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.

公开(公告)号：US20130256817A1

公开(公告)日：2013-10-03

申请号：US13906672

申请日：2013-05-31

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

IPC: H01L29/84

CPC classification number: H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

Abstract translation: 元件阵列包括具有第一电极和第二电极的多个元件，其间具有间隙; 通过沟槽将每个元件分离第一电极，绝缘连接衬底接合到第一电极，并且通过连接衬底从相应的第一电极到与第一电极相对的一侧提供布线。

公开(公告)号：US09282415B2

公开(公告)日：2016-03-08

申请号：US13794412

申请日：2013-03-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Chienliu Chang

IPC: B81B3/00 ,  B06B1/02 ,  H04R19/00 ,  H04R31/00 ,  B81C1/00

CPC classification number: B81C1/00158 ,  B06B1/0292 ,  B81B2201/0285 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

Abstract translation: 本发明的机电换能器包括第一电极，通过间隙形成在第一电极上方的振动膜，形成在振动膜上的第二电极和形成在第二电极侧的表面上的绝缘保护层。 在振动膜的表面的至少一部分上存在未形成保护层的区域。

公开(公告)号：US20130192056A1

公开(公告)日：2013-08-01

申请号：US13794412

申请日：2013-03-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Chienliu Chang

IPC: H04R31/00

CPC classification number: B81C1/00158 ,  B06B1/0292 ,  B81B2201/0285 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

Abstract translation: 本发明的机电换能器包括第一电极，通过间隙形成在第一电极上方的振动膜，形成在振动膜上的第二电极和形成在第二电极侧的表面上的绝缘保护层。 在振动膜的表面的至少一部分上存在未形成保护层的区域。

公开(公告)号：US10207918B2

公开(公告)日：2019-02-19

申请号：US15017363

申请日：2016-02-05

Applicant: CANON KABUSHIKI KAISHA

Inventor： Chienliu Chang

IPC: B06B1/02 ,  H04R19/00 ,  H04R31/00 ,  H02N11/00 ,  B81C1/00

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

公开(公告)号：US20160167955A1

公开(公告)日：2016-06-16

申请号：US15017363

申请日：2016-02-05

Applicant: CANON KABUSHIKI KAISHA

Inventor： Chienliu Chang

IPC: B81C1/00 ,  H04R19/00

CPC classification number: B81C1/00158 ,  B06B1/0292 ,  B81B2201/0285 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.