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公开(公告)号：US20210108737A1
公开(公告)日：2021-04-15
申请号：US17130731
申请日：2020-12-22
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU , Keiichi NISHIKAWA , Yasuhisa HIROSE , Takahiro MINATANI
IPC: F16K31/06 , F16K3/18 , F16K3/316 , F16K11/065
Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.
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公开(公告)号：US20130081733A1
公开(公告)日：2013-04-04
申请号：US13630987
申请日：2012-09-28
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI
IPC: F16L55/00
CPC classification number: B01B1/005
Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The appartus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface and a guiding member that is provided to contact an opposite side of the mesh form body to the main body side.
Abstract translation: 控制液体扩散的液体控制装置具有主体，该主体具有供应对象表面，液体被供应到主体表面。 该配件还具有网状物体，其被编织成网状并且被设置成接触供体对象表面，以及引导构件，其设置成与网状体相对的一侧接触主体侧。
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公开(公告)号：US20150033941A1
公开(公告)日：2015-02-05
申请号：US14519426
申请日：2014-10-21
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI
IPC: F16J1/01
CPC classification number: F16J1/01 , F15B15/1461 , F16K31/1221 , F16K41/04 , F16K51/02 , G05D16/10 , G05D16/2013
Abstract: A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.
Abstract translation: 线性致动器与其中产生等离子体的真空室一起使用。 线性致动器包括通过设置在真空室中的开口在真空室的外部和内部之间延伸以便直线往复运动的移动构件，构造成使移动构件往复移动的驱动部分，覆盖移动构件的盖 以及滑动密封部分，其在允许盖在其上滑动的同时在真空室的内部和外部之间提供密封。 盖子覆盖移动部件的范围，移动部件移动到真空室的内部和外部，同时移动部件通过驱动部分往复运动，并且盖子的外表面的气体吸附量较小 每单位面积比移动构件的外表面。
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公开(公告)号：US20140007958A1
公开(公告)日：2014-01-09
申请号：US14024458
申请日：2013-09-11
Applicant: CKD CORPORATION
Inventor： Hiroshi ITAFUJI , Masayuki KOUKETSU
IPC: F16K27/00
CPC classification number: F16K27/003 , F16K27/0236 , Y10T137/4259 , Y10T137/8158 , Y10T137/87249 , Y10T137/87925
Abstract: A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.
Abstract translation: 化学液体回路装置包括主电路部件，副电路部件和框架部件。 主电路构件具有用于使化学流体流动的药液通道和形成在药液通道的端部上的主开口。 副电路构件安装在主电路构件上并与主电路构件接触，并向主电路构件施加第一负载。 副回路构件具有用于从设备外部密封主开口的密封表面。 框架构件具有用于存储主电路构件的存储部分和设置在与存储在存储部分中的主电路构件的主开口连通的位置的连接开口。 框架构件的形状允许第一负载的反作用力从存储部分传递到主电路构件。
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公开(公告)号：US20130298834A1
公开(公告)日：2013-11-14
申请号：US13945710
申请日：2013-07-18
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI
IPC: C23C16/448 , B01F3/02
CPC classification number: C23C16/4482 , B01B1/00 , B01B1/005 , B01D1/14 , B01F3/022 , C23C14/24 , H01L21/67017
Abstract: A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.
Abstract translation: 液体蒸发器被配置为蒸发液体试剂并将气化液体试剂与气体介质混合。 液体蒸发器配备有具有混合气体发生空间的主蒸发器主体和设置在混合气体生成空间内的蒸发单元。 蒸发单元具有蒸发表面的蒸发单元主体和通过以网状形状规则地编织线形成为平面形状的网状体。 网状体形成由电线包围的多个网状空间，并且在面内方向规则地配置。 由于网状体和蒸发面彼此抵接，蒸发单元形成由线和蒸发表面包围的多个液体试剂供应空间。 液体试剂供给空间在网状体的面内方向上规则地配置。
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Patent Agency Ranking
6.发明申请公开(公告)号：US20160189845A1
公开(公告)日：2016-06-30
申请号：US15061857
申请日：2016-03-04
Applicant: CKD CORPORATION , NIKON CORPORATION
Inventor： Akihiro ITO , Masayuki KOUKETSU , Shigeru MORIMOTO , Hiromitsu YOSHIMOTO , Koji TANAKA
CPC classification number: H01F7/08 , H01F5/00 , H01F7/06 , H01F27/16 , H02K3/24 , H02K9/19 , H02K9/22 , H02K41/02 , H02K2201/18
Abstract: A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.
Abstract translation: 用于第一电磁线圈的冷却结构包括具有沿预定轴线Z的方向延伸的空间的第一电磁线圈; 相对于第一电磁线圈的预定轴线Z的方向安装在端面上并具有用于内部形成的流体的流路的冷却构件; 以及入口管和出口管，其在该空间内分别连接到冷却构件的流动路径的入口和出口，并且延伸穿过该空间到电磁线圈外部的区域。
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公开(公告)号：US20140015151A1
公开(公告)日：2014-01-16
申请号：US13940102
申请日：2013-07-11
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI , Masayo OKADA
IPC: B01F3/04
Abstract: A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.
Abstract translation: 液体蒸发器包括：第一壳体，其具有供应化学溶液的液体供应表面，加热器，网状物，第一保持器和附接到网状物的外边缘部分的第二保持器， 第一盖螺栓，由第一壳体支撑的杆，沿着相对于液体供应表面倾斜的特定方向可移动;第二盖螺栓，螺旋弹簧，其沿着所述第一壳体的方向倾斜， 使所述网状物与所述液体供给面紧密接触，以及从所述液体供给面的一侧覆盖所述网状物的盖部件，以利用所述第一壳体密封所述液体供给面周围的空间。
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公开(公告)号：US20130081712A1
公开(公告)日：2013-04-04
申请号：US13631003
申请日：2012-09-28
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI
IPC: F16K49/00
CPC classification number: F16K49/002 , B01B1/005 , Y10T137/6416
Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface. A heater that heats the supply subject surface is provided in an interior of the main body. A supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body. A groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface.
Abstract translation: 控制液体扩散的液体控制装置具有主体，该主体具有供应对象表面，液体被供应到主体表面。 该装置还具有网状物体，其被编织成网状并设置成与供应物体表面接触。 在主体的内部设置加热供给对象面的加热器。 供给口设置在主体中，以将液体从主体的内部供给到与网状体接触的供给对象面的一部分。 在供给对象表面设置有凹槽，以抑制液体从供给口到供电对象表面的宽度方向上与加热器相反的一侧的扩展。
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公开(公告)号：US20200318753A1
公开(公告)日：2020-10-08
申请号：US16905632
申请日：2020-06-18
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU , Masaya YAMAUCHI , Toshikazu TSURUGA
Abstract: A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.
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公开(公告)号：US20170287625A1
公开(公告)日：2017-10-05
申请号：US15619355
申请日：2017-06-09
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU , Takashi HOSONO , Sadayoshi MUTO , Takashi TASAKI , Yuji OGAWA
CPC classification number: H01F27/2876 , H01F5/06 , H01F7/06 , H01F27/16 , H01F27/2847 , H01F27/2852 , H01F27/324
Abstract: A coil cooling structure comprises a coil which includes a strip-shaped conductor wound around a specific axis a plurality of times; an alumina layer which is formed on an end surface of the coil in the direction of the specific axis through thermal spraying of alumina and whose surface is flattened; a cooling plate which is mainly formed of alumina and has a flow passage for a cooling medium; and an adhesive which bonds the alumina layer and the cooling plate and which elastically deforms depending on a difference in thermal expansion between the alumina layer and the cooling plate.
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