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公开(公告)号:US20180352339A1
公开(公告)日:2018-12-06
申请号:US15987346
申请日:2018-05-23
发明人: Marek Sebastian PIECHOCINSKI , Richard Ian LAMING , Tsjerk Hans HOEKSTRA , Colin Robert JENKINS , Axel THOMSEN
摘要: The application describes MEMS transducers having a patterned membrane electrode which incorporates a plurality of openings or voids. A conductive element is provided on the surface of the underlying membrane within the opening.
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公开(公告)号:US20180002159A1
公开(公告)日:2018-01-04
申请号:US15543467
申请日:2016-01-25
CPC分类号: B81C1/00666 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81C1/00182 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H01L2924/00014
摘要: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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公开(公告)号:US20190075401A1
公开(公告)日:2019-03-07
申请号:US16110158
申请日:2018-08-23
摘要: The application relates to a MEMS transducer comprising first and second conductive elements which defines a first capacitor of the transducer, and a third conductive element. The third conductive element is configured to be at a potential different to the potential of the second conductive element. The third conductive element is provided in a fringing field region of the first capacitor.
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公开(公告)号:US20190300361A1
公开(公告)日:2019-10-03
申请号:US15938524
申请日:2018-03-28
发明人: Richard Ian LAMING
摘要: The application relates to a MEMS transducer comprising first and second conductive elements which defines a capacitor of the transducer, and a third conductive element. The third conductive element is configured to be at a potential substantially the same as that of the second conductive element, and is provided in a plane that overlies the plane of the second conductive element.
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公开(公告)号:US20180002168A1
公开(公告)日:2018-01-04
申请号:US15543492
申请日:2016-01-25
CPC分类号: B81C1/00666 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81C1/00182 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H01L2924/00014
摘要: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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