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公开(公告)号：US20180035229A1
公开(公告)日：2018-02-01
申请号：US15660508
申请日：2017-07-26
Inventor： James Thomas DEAS , Scott Lyall CARGILL
CPC classification number: H04R31/006 , B81B3/0021 , B81B2201/0257 , B81B2203/0127 , B81B2203/04 , B81C1/00158 , H04R9/046 , H04R19/005 , H04R19/02 , H04R19/04 , H04R2201/003 , H04R2499/11
Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.
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公开(公告)号：US20190020962A1
公开(公告)日：2019-01-17
申请号：US16136939
申请日：2018-09-20
Inventor： James Thomas DEAS , Scott Lyall CARGILL
Abstract: The application describes a MEMS transducer in which first and second conductive elements of a capacitor are both provided on the membrane. The membrane is shaped that the first and second conductive elements are displaced relative to each other when the flexible membrane deflects in response to a pressure differential across the membrane. For example the membrane may be corrugated.
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公开(公告)号：US20180007473A1
公开(公告)日：2018-01-04
申请号：US15636019
申请日：2017-06-28
Inventor： Scott Lyall CARGILL
CPC classification number: H04R19/04 , B81B3/0027 , B81B3/0072 , B81B7/0016 , B81B2201/0257 , B81B2203/0127 , B81B2203/0315 , B81C1/00666 , H04R7/18 , H04R19/005 , H04R2201/003 , H04R2499/11
Abstract: The application describes MEMS transducers comprising a flexible membrane supported at a supporting edge relative to a substrate and further comprising one or more unbound edges. The shape of the unbound edge is selected so that the flexible membrane tends to bend along more than one bend axis in the region of the supporting edge.
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公开(公告)号：US20180002168A1
公开(公告)日：2018-01-04
申请号：US15543492
申请日：2016-01-25
Inventor： Scott Lyall CARGILL , Colin Robert JENKINS , Euan James BOYD , Richard Ian LAMING
CPC classification number: B81C1/00666 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81C1/00182 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H01L2924/00014
Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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公开(公告)号：US20180002161A1
公开(公告)日：2018-01-04
申请号：US15636887
申请日：2017-06-29
Inventor： Colin Robert JENKINS , Scott Lyall CARGILL , Clive Robert GRAHAM
CPC classification number: B81B3/0021 , B81B3/0078 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/04 , B81C1/00158 , B81C3/001 , H04R7/04 , H04R19/005 , H04R19/04 , H04R31/003 , H04R31/006 , H04R2201/003 , H04R2499/15
Abstract: The present application describes MEMS transducer having a membrane and a membrane electrode. The membrane and membrane electrode form a two-layer structure. The membrane electrode is in the form of a lattice of conductive material. The pitch of the lattice and/or the size of the openings varies from a central region of the membrane electrode to a region laterally outside the central region.
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Patent Agency Ranking
公开(公告)号：US20190127217A1
公开(公告)日：2019-05-02
申请号：US16149515
申请日：2018-10-02
Inventor： Scott Lyall CARGILL , Marek Sebastian PIECHOCINSKI
Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section. In some embodiments the second flap section (302b) may be configured so that it deflects away from the first section (302a) more readily than the first section deflects away from its equilibrium position.
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公开(公告)号：US20170217761A1
公开(公告)日：2017-08-03
申请号：US15414178
申请日：2017-01-24
Inventor： Colin Wei Hong CHUNG , Scott Lyall CARGILL , Colin Robert JENKINS
CPC classification number: B81B7/0061 , B81B3/007 , B81B2201/0257 , B81B2201/0264 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/058 , B81B2207/012 , B81C1/00158 , G01L9/0042 , G01L9/0073 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H04R31/00 , H04R2201/003 , H04R2499/11 , H01L2924/00014
Abstract: The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.
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公开(公告)号：US20190110126A1
公开(公告)日：2019-04-11
申请号：US16150591
申请日：2018-10-03
Inventor： Scott Lyall CARGILL , Timothy John BROSNIHAN
Abstract: The application relates to MEMS transducers comprising at least one support structure for connecting a backplate structure of the transducer with an underlying substrate. A strengthening portion is provided in the region of the support structure.
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公开(公告)号：US20180007474A1
公开(公告)日：2018-01-04
申请号：US15636121
申请日：2017-06-28
Inventor： Scott Lyall CARGILL , Colin Robert JENKINS , Euan James BOYD
CPC classification number: H04R19/04 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81C1/00666 , H04R7/04 , H04R7/18 , H04R17/02 , H04R19/005 , H04R2201/003
Abstract: A MEMS transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter region that is concave with reference to the center of the cavity.
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公开(公告)号：US20180002159A1
公开(公告)日：2018-01-04
申请号：US15543467
申请日：2016-01-25
Inventor： Scott Lyall CARGILL , Colin Robert JENKINS , Euan James BOYD , Richard Ian LAMING
CPC classification number: B81C1/00666 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81C1/00182 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H01L2924/00014
Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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