Scanning probe characterization of surfaces
    1.
    发明申请
    Scanning probe characterization of surfaces 有权
    扫描探针表面表征

    公开(公告)号:US20060225164A1

    公开(公告)日:2006-10-05

    申请号:US11375867

    申请日:2006-03-15

    IPC分类号: G01N23/00

    摘要: Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator modulates the mechanical actuator and the atomic force probe at the resonant frequency of the atomic force probe. An electrical modulator is connected to the atomic force probe. A feedback sensing circuit is connected to the mechanical modulator to detect movement of the atomic force probe and provide information about the movement of the atomic force probe to the mechanical modulator allowing the mechanical modulator to modulate the atomic force probe at the resonant frequency of the atomic force probe as the resonant frequency of the atomic force probe changes. An FM detector is connected to the feedback circuit detects changes in the resonant frequency of the atomic force probe.

    摘要翻译: 通过检测电子隧道来表征电介质表面。 一种装置包括原子力探针。 机械致动器连接到原子力探针。 机械调节器连接到机械致动器。 机械调制器将机械致动器和原子力探针以原子力探针的共振频率进行调制。 电调制器连接到原子力探针。 反馈感测电路连接到机械调制器以检测原子力探针的移动,并提供关于原子力探针到机械调制器的运动的信息,允许机械调制器以原子的共振频率调制原子力探针 力探头作为原子力探头的共振频率发生变化。 FM检测器连接到反馈电路,检测原子力探头的谐振频率的变化。