公开(公告)号：US20240401948A1

公开(公告)日：2024-12-05

申请号：US18659102

申请日：2024-05-09

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation

Inventor： Keitaro ITO ,  Shota HARADA ,  Katsuaki GOTO ,  Yuuki INAGAKI ,  Hideaki NISHIKAWA ,  Takahiko YOSHIDA ,  Yusuke KAWAI

IPC: G01C19/5712

Abstract: An inertial sensor includes a resonator, a mounting board, and an actuator. The resonator has a first drive mode and a second drive mode. The mounting board has a plurality of electrode portions arranged at a distance from each other and surrounding the resonator. The actuator is configured to vibrate in a z-axis direction. The z-axis direction is a direction orthogonal to a planar direction of the mounting board. The actuator is further configured to vibrate the resonator in the z-axis direction to cause a resonance mode.

公开(公告)号：US20230324175A1

公开(公告)日：2023-10-12

申请号：US18189322

申请日：2023-03-24

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation

Inventor： Hideaki NISHIKAWA ,  Yusuke KAWAI ,  Takahiko YOSHIDA ,  Yuuki INAGAKI ,  Shota HARADA ,  Keitaro ITO ,  Katsuaki GOTO

IPC: G01C19/5691 ,  B81B3/00

CPC classification number: G01C19/5691 ,  B81B3/0086 ,  B81B2201/0242 ,  B81B2203/04

Abstract: A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.

公开(公告)号：US20160054562A1

公开(公告)日：2016-02-25

申请号：US14831996

申请日：2015-08-21

Applicant: DENSO CORPORATION

Inventor： Yusuke KAWAI ,  Kenichi SAKAI ,  Koichi OYAMA ,  Hideaki NISHIKAWA

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0825 ,  B81B3/00 ,  G02B26/0858

Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.

Abstract translation: 一种光学扫描仪包括具有刚体和光束的基板，以及具有多层的层叠体，包括下导电层，层间绝缘膜和上导电层，所述层叠体层叠在刚体上并向外突出 和梁。 将层叠体图案化以形成共振扫描仪部分和变焦镜，将谐振扫描器部分（i）制成为层状体的一部分，以及（ii）具有致动器部分，并且可变焦镜形成为 分层体的一部分。 将包括谐振扫描器部分和变焦镜的层状体图案化以形成镜驱动线。 在这种结构中，减少了光学扫描器的尺寸，并且抑制了由于施加到反射镜驱动线的电压引起的谐振扫描器部分的频率变化。

公开(公告)号：US20180039074A1

公开(公告)日：2018-02-08

申请号：US15547218

申请日：2016-03-25

Applicant: DENSO CORPORATION

Inventor： Koichi OYAMA ,  Hideaki NISHIKAWA ,  Yusuke KAWAI ,  Kenichi SAKAI

IPC: G02B26/10 ,  H01L41/047 ,  G02B5/08 ,  G02B26/08 ,  G02B7/182

CPC classification number: G02B26/10 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/019 ,  G02B5/08 ,  G02B7/1821 ,  G02B26/0858 ,  G02B26/105 ,  H01L41/0471 ,  H01L41/0477 ,  H01L41/0946 ,  H02N2/10

Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.

公开(公告)号：US20140320943A1

公开(公告)日：2014-10-30

申请号：US14258130

申请日：2014-04-22

Applicant: DENSO CORPORATION

Inventor： Koichi OYAMA ,  Hideaki NISHIKAWA ,  Akio TSUGE ,  Kenichi SAKAI ,  Hiroyuki WADO

IPC: G02B26/08

CPC classification number: G02B26/0858 ,  B81B3/0043 ,  B81B2201/042 ,  B81B2203/0154

Abstract: An optical scanning device has a reflecting portion and a supporting body for supporting the reflecting portion. The reflecting portion has a reflecting surface for reflecting light beam. A pair of outside beam members is arranged between the reflecting portion and the supporting body in a longitudinal direction of the device. The device also has a first driving portion, one end of which is connected to the supporting body, while the other end of which is connected to a driving point of the reflecting portion. When the first driving portion is inflected, the reflecting portion is oscillated in a twisting vibration manner at a first axis. The driving point of the reflecting portion is located at a position separated from the first axis.

Abstract translation: 光学扫描装置具有反射部分和用于支撑反射部分的支撑体。 反射部具有用于反射光束的反射面。 一对外梁构件沿着装置的纵向方向布置在反射部分和支撑体之间。 该装置还具有第一驱动部分，其一端连接到支撑体，而另一端连接到反射部分的驱动点。 当第一驱动部分弯曲时，反射部分以第一轴线的扭转振动方式摆动。 反射部的驱动点位于与第一轴分离的位置。