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公开(公告)号：US20220315411A1
公开(公告)日：2022-10-06
申请号：US17703418
申请日：2022-03-24
Inventor： Keitaro ITO , Shota HARADA , Katsuaki GOTO , Yuuki INAGAKI , Teruhisa AKASHI , Hirofumi FUNABASHI , Takahiko YOSHIDA , Yusuke KAWAI
Abstract: A micro vibration body includes a curved surface portion, which has an annular curved surface, and a recessed portion, which is recessed from the curved surface portion. A mounting substrate includes an inner frame portion and electrode portions, which surround an inner frame portion. A joining member is provided in an inner region of the mounting substrate surrounded by the inner frame portion. The recessed portion of the micro vibration body has a bottom surface defining a mounted surface located in the inner region and joined to the mounting substrate via the joining member. The curved surface portion has a rim that includes an end portion of the curved surface portion on an opposite side to the recessed portion. The rim has a rim lower surface located on a same plane as the mounted surface or a tip end portion of the mounted surface.
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公开(公告)号：US20240401948A1
公开(公告)日：2024-12-05
申请号：US18659102
申请日：2024-05-09
Inventor： Keitaro ITO , Shota HARADA , Katsuaki GOTO , Yuuki INAGAKI , Hideaki NISHIKAWA , Takahiko YOSHIDA , Yusuke KAWAI
IPC: G01C19/5712
Abstract: An inertial sensor includes a resonator, a mounting board, and an actuator. The resonator has a first drive mode and a second drive mode. The mounting board has a plurality of electrode portions arranged at a distance from each other and surrounding the resonator. The actuator is configured to vibrate in a z-axis direction. The z-axis direction is a direction orthogonal to a planar direction of the mounting board. The actuator is further configured to vibrate the resonator in the z-axis direction to cause a resonance mode.
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公开(公告)号：US20230324175A1
公开(公告)日：2023-10-12
申请号：US18189322
申请日：2023-03-24
Inventor： Hideaki NISHIKAWA , Yusuke KAWAI , Takahiko YOSHIDA , Yuuki INAGAKI , Shota HARADA , Keitaro ITO , Katsuaki GOTO
IPC: G01C19/5691 , B81B3/00
CPC classification number: G01C19/5691 , B81B3/0086 , B81B2201/0242 , B81B2203/04
Abstract: A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.
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公开(公告)号：US20160054562A1
公开(公告)日：2016-02-25
申请号：US14831996
申请日：2015-08-21
Applicant: DENSO CORPORATION
Inventor： Yusuke KAWAI , Kenichi SAKAI , Koichi OYAMA , Hideaki NISHIKAWA
CPC classification number: G02B26/0825 , B81B3/00 , G02B26/0858
Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.
Abstract translation: 一种光学扫描仪包括具有刚体和光束的基板，以及具有多层的层叠体，包括下导电层，层间绝缘膜和上导电层，所述层叠体层叠在刚体上并向外突出 和梁。 将层叠体图案化以形成共振扫描仪部分和变焦镜，将谐振扫描器部分（i）制成为层状体的一部分，以及（ii）具有致动器部分，并且可变焦镜形成为 分层体的一部分。 将包括谐振扫描器部分和变焦镜的层状体图案化以形成镜驱动线。 在这种结构中，减少了光学扫描器的尺寸，并且抑制了由于施加到反射镜驱动线的电压引起的谐振扫描器部分的频率变化。
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Patent Agency Ranking
公开(公告)号：US20230061042A1
公开(公告)日：2023-03-02
申请号：US17884111
申请日：2022-08-09
Inventor： Katsuaki GOTO , Shota HARADA , Keitaro ITO , Yuuki INAGAKI , Takahiko YOSHIDA , Yusuke KAWAI
Abstract: In a method for manufacturing a micro vibration body having a three-dimensional curved surface, a mold defining a recess part is prepared, and a plate-shaped reflow material is arranged on the mold so as to cover the recess part. Pressure of a space defined by the recess part covered with the reflow material is reduced, and the reflow material is deformed by heating from an upper surface side opposite to a lower surface facing the recess part and by means of the pressure reduced. When the reflow material is deformed, a part of the mold is heated and / or cooled. As another example, when the reflow material is deformed, a mold having a different heat capacity portion is used to generate a temperature gradient in the mold.
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公开(公告)号：US20220316880A1
公开(公告)日：2022-10-06
申请号：US17703164
申请日：2022-03-24
Inventor： Shota HARADA , Keitaro ITO , Katsuaki GOTO , Yuuki INAGAKI , Takahiko YOSHIDA , Yusuke KAWAI , Teruhisa AKASHI , Hirofumi FUNABASHI
Abstract: A micro vibration body includes a curved surface portion, a recessed portion recessed from the curved surface portion, a bottom surface protruding portion protruding from a bottom surface of the recessed portion, and a through hole in the bottom surface protruding portion. A mounting substrate has a positioning recess, into which the bottom surface protruding portion is inserted, and electrode portions surrounding the inner frame portion. A joining member is in the positioning recess and joins the bottom surface protruding portion with the mounting substrate. The bottom surface is in contact with a region of the mounting substrate around the positioning recess. The bottom surface protruding portion has a tip end surface that is at a distance from the positioning recess. The joining member at least partially enters the through hole and is electrically connected to the conductive layer.
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公开(公告)号：US20180039074A1
公开(公告)日：2018-02-08
申请号：US15547218
申请日：2016-03-25
Applicant: DENSO CORPORATION
Inventor： Koichi OYAMA , Hideaki NISHIKAWA , Yusuke KAWAI , Kenichi SAKAI
IPC: G02B26/10 , H01L41/047 , G02B5/08 , G02B26/08 , G02B7/182
CPC classification number: G02B26/10 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/019 , G02B5/08 , G02B7/1821 , G02B26/0858 , G02B26/105 , H01L41/0471 , H01L41/0477 , H01L41/0946 , H02N2/10
Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.
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公开(公告)号：US20230201877A1
公开(公告)日：2023-06-29
申请号：US18170121
申请日：2023-02-16
Applicant: DENSO CORPORATION
Inventor： Tetsuya ENOMOTO , Akihiko TESHIGAHARA , Hideo YAMADA , Yusuke KAWAI
IPC: B06B1/06 , G01S15/04 , C23C14/34 , C23C14/06 , C23C14/02 , C01B21/06 , H10N30/853 , H10N30/076
CPC classification number: B06B1/0666 , G01S15/04 , C23C14/34 , C23C14/0641 , C23C14/02 , C01B21/0602 , H10N30/853 , H10N30/076 , C01P2006/80 , C01P2006/40
Abstract: A micro-electro-mechanical systems (MEMS) sensor includes a substrate, a diaphragm portion and a piezoelectric film. The diaphragm portion is located at the substrate. The piezoelectric film is located on the diaphragm portion. The piezoelectric film is made of scandium aluminum nitride. A carbon concentration of the piezoelectric film is 2.5 atomic percent or less while an oxygen concentration of the piezoelectric film is 0.35 atomic percent or less.
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公开(公告)号：US20190315622A1
公开(公告)日：2019-10-17
申请号：US16376336
申请日：2019-04-05
Applicant: DENSO CORPORATION
Inventor： Takahiro HIGUCHI , Yusuke KAWAI , Sumio ITO
Abstract: A semiconductor device includes: a silicon layer in which a trench is disposed; a surface structure portion disposed on the silicon layer at a position distant from the trench and having a surface provided by a metal layer; and a low electric conductivity portion disposed on the surface of the metal layer or in a part of the resist disposed on the trench side of the metal layer, and having an electric conductivity lower than at least a part of the metal layer covering a trench side portion of the surface of the metal layer.
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