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公开(公告)号:US20160054562A1
公开(公告)日:2016-02-25
申请号:US14831996
申请日:2015-08-21
Applicant: DENSO CORPORATION
Inventor: Yusuke KAWAI , Kenichi SAKAI , Koichi OYAMA , Hideaki NISHIKAWA
CPC classification number: G02B26/0825 , B81B3/00 , G02B26/0858
Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.
Abstract translation: 一种光学扫描仪包括具有刚体和光束的基板,以及具有多层的层叠体,包括下导电层,层间绝缘膜和上导电层,所述层叠体层叠在刚体上并向外突出 和梁。 将层叠体图案化以形成共振扫描仪部分和变焦镜,将谐振扫描器部分(i)制成为层状体的一部分,以及(ii)具有致动器部分,并且可变焦镜形成为 分层体的一部分。 将包括谐振扫描器部分和变焦镜的层状体图案化以形成镜驱动线。 在这种结构中,减少了光学扫描器的尺寸,并且抑制了由于施加到反射镜驱动线的电压引起的谐振扫描器部分的频率变化。
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公开(公告)号:US20160202132A1
公开(公告)日:2016-07-14
申请号:US14913067
申请日:2014-07-30
Applicant: DENSO CORPORATION
Inventor: Takashi INOUE , Kensuke HATA , Tetsuya KATOH , Kenichi SAKAI , Mayumi UNO , Junichi TAKEYA
CPC classification number: G01L1/2293 , G01L1/18 , H01L29/22 , H01L29/84 , H01L51/057
Abstract: A load sensor is constituted by a rib and a vertical transistor including an organic semiconductor film, and a load measurement can be executed based on a change of a gap between a drain electrode and a source electrode which is a channel length of the vertical transistor. Therefore, a change of a current Ids is in a linear relationship to a load applied to the load sensor.
Abstract translation: 负载传感器由肋和包括有机半导体膜的垂直晶体管构成,并且可以基于作为垂直晶体管的沟道长度的漏电极和源电极之间的间隙的变化来执行负载测量。 因此,电流Ids的改变与施加到负载传感器的负载成线性关系。
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公开(公告)号:US20180039074A1
公开(公告)日:2018-02-08
申请号:US15547218
申请日:2016-03-25
Applicant: DENSO CORPORATION
Inventor: Koichi OYAMA , Hideaki NISHIKAWA , Yusuke KAWAI , Kenichi SAKAI
IPC: G02B26/10 , H01L41/047 , G02B5/08 , G02B26/08 , G02B7/182
CPC classification number: G02B26/10 , B81B3/007 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/019 , G02B5/08 , G02B7/1821 , G02B26/0858 , G02B26/105 , H01L41/0471 , H01L41/0477 , H01L41/0946 , H02N2/10
Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.
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公开(公告)号:US20140320943A1
公开(公告)日:2014-10-30
申请号:US14258130
申请日:2014-04-22
Applicant: DENSO CORPORATION
Inventor: Koichi OYAMA , Hideaki NISHIKAWA , Akio TSUGE , Kenichi SAKAI , Hiroyuki WADO
IPC: G02B26/08
CPC classification number: G02B26/0858 , B81B3/0043 , B81B2201/042 , B81B2203/0154
Abstract: An optical scanning device has a reflecting portion and a supporting body for supporting the reflecting portion. The reflecting portion has a reflecting surface for reflecting light beam. A pair of outside beam members is arranged between the reflecting portion and the supporting body in a longitudinal direction of the device. The device also has a first driving portion, one end of which is connected to the supporting body, while the other end of which is connected to a driving point of the reflecting portion. When the first driving portion is inflected, the reflecting portion is oscillated in a twisting vibration manner at a first axis. The driving point of the reflecting portion is located at a position separated from the first axis.
Abstract translation: 光学扫描装置具有反射部分和用于支撑反射部分的支撑体。 反射部具有用于反射光束的反射面。 一对外梁构件沿着装置的纵向方向布置在反射部分和支撑体之间。 该装置还具有第一驱动部分,其一端连接到支撑体,而另一端连接到反射部分的驱动点。 当第一驱动部分弯曲时,反射部分以第一轴线的扭转振动方式摆动。 反射部的驱动点位于与第一轴分离的位置。
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