公开(公告)号：US10978315B2

公开(公告)日：2021-04-13

申请号：US15313990

申请日：2015-05-28

Applicant: EBARA CORPORATION

Inventor： Atsushi Shiokawa ,  Tetsuro Sugiura ,  Shinichi Sekiguchi ,  Takashi Kyotani ,  Tetsuo Komai ,  Norio Kimura ,  Keiichi Ishikawa ,  Toru Osuga

IPC: C23C16/44 ,  H01L21/67 ,  F04B37/16 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/31 ,  C23C16/52 ,  F04B37/14 ,  H01J37/32 ,  F04B41/00 ,  C23C14/22 ,  G05D16/20

Abstract: The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).

公开(公告)号：US11946470B2

公开(公告)日：2024-04-02

申请号：US16467472

申请日：2018-03-13

Applicant: EBARA CORPORATION

Inventor： Keiji Maishigi ,  Tetsuro Sugiura ,  Katsuaki Usui ,  Masahiro Hatakeyama ,  Chikako Honma ,  Toru Osuga ,  Koichi Iwasaki ,  Jie Yuan Lin

IPC: F04C28/28 ,  F04D27/00 ,  G06F9/54 ,  G06F17/18

CPC classification number: F04C28/28 ,  F04D27/001 ,  G06F9/542 ,  G06F17/18

Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:



a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and
a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.