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公开(公告)号：US20230238204A1
公开(公告)日：2023-07-27
申请号：US17923259
申请日：2021-04-29
Applicant: Excillum AB
Inventor： Björn HANSSON , Julius HÅLLSTEDT , Tomi TUOHIMAA , Ulf LUNDSTRÖM , Daniel NILSSON
CPC classification number: H01J35/153 , H01J35/30 , G01N23/04 , G01N2223/204
Abstract: An X-ray imaging system, including a target; an electron beam source configured to provide an electron beam for interaction with the target to generate X-ray radiation; electron optics configured to alternately direct the electron beam to at least a first and a second location on the target; an X-ray detector array configured to receive X-ray radiation generated at the first and second locations on the target; a sample position region for receiving a sample to be exposed to generated X-ray radiation, the sample position region being located in a region where X-ray radiation generated at the first location overlaps with X-ray radiation generated at the second location; and a processing unit coupled to the X-ray detector array, the processing unit being configured to create an image of a sample, positioned in the sample position region, based on the X-ray radiation originating from the first location and from the second location.
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公开(公告)号：US20190311874A1
公开(公告)日：2019-10-10
申请号：US16340449
申请日：2017-10-19
Applicant: Excillum AB
Inventor： Tomi TUOHIMAA , Per TAKMAN , Andrii SOFIIENKO
Abstract: A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.
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公开(公告)号：US20220028645A1
公开(公告)日：2022-01-27
申请号：US17297126
申请日：2019-12-17
Applicant: Excillum AB
Inventor： Tomi TUOHIMAA , Ulf LUNDSTRÖM , Björn HANSSON
Abstract: An X-ray source including a liquid target source configured to provide a liquid target in an interaction region of the X-ray source, an electron source adapted to provide an electron beam directed towards the interaction region, such that the electron beam interacts with the liquid target to generate X-ray radiation, and an electron collector arranged at a distance downstream of the interaction region, as seen along a travel direction of the electron beam. The electron collector includes an impact portion configured to absorb electrons of the electron beam impinging thereon, and the impact portion is arranged so as to be oblique with respect to the travel direction of the electron beam at the impact portion.
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公开(公告)号：US20140348302A1
公开(公告)日：2014-11-27
申请号：US14457385
申请日：2014-08-12
Applicant: EXCILLUM AB
Inventor： Oscar HEMBERG , Tomi TUOHIMAA , Mikael OTENDAL
IPC: H01J35/08
CPC classification number: H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
Abstract: Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. Also, a corresponding circulation system and an X-ray source provided with such circulation system.
Abstract translation: 提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。 在一种方法中，使用高压泵将液态金属的压力升高至至少10巴。 然后将加压液体金属传导到喷嘴并以空间连续射流的形式喷射到真空室中。 在通过真空室之后，将液体金属收集在收集容器中，并且将液态金属的压力升高到入口压力，例如， 使用底漆泵，适用于高压泵的入口。 另外，具有这样的循环系统的相应的循环系统和X射线源。
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公开(公告)号：US20230176239A1
公开(公告)日：2023-06-08
申请号：US18155314
申请日：2023-01-17
Applicant: Excillum AB
Inventor： Per TAKMAN , Tomi TUOHIMAA , Ulf LUNDSTRÖM
IPC: G01T1/34
CPC classification number: G01T1/34
Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also, a corresponding liquid metal jet X-ray source.
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Patent Agency Ranking
公开(公告)号：US20220404514A1
公开(公告)日：2022-12-22
申请号：US17777747
申请日：2020-11-12
Applicant: Excillum AB
Inventor： Per TAKMAN , Tomi TUOHIMAA , Ulf LUNDSTRÖM
IPC: G01T1/34
Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.
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公开(公告)号：US20220220951A1
公开(公告)日：2022-07-14
申请号：US17595064
申请日：2020-05-07
Applicant: Excillum AB
Inventor： Ulf LUNDSTRÖM , Björn HANSSON , Per TAKMAN , Tomi TUOHIMAA
Abstract: An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.
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公开(公告)号：US20200058461A1
公开(公告)日：2020-02-20
申请号：US16499582
申请日：2018-03-27
Applicant: Excillum AB
Inventor： Per TAKMAN , Tomi TUOHIMAA
Abstract: A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.
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公开(公告)号：US20220230832A1
公开(公告)日：2022-07-21
申请号：US17609655
申请日：2020-05-07
Applicant: Excillum AB
Inventor： Björn HANSSON , Per TAKMAN , Ulf LUNDSTRÖM , Tomi TUOHIMAA
Abstract: A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.
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公开(公告)号：US20160247656A1
公开(公告)日：2016-08-25
申请号：US15147394
申请日：2016-05-05
Applicant: Excillum AB
Inventor： Oscar HEMBERG , Tomi TUOHIMAA , Björn SUNDMAN
CPC classification number: H01J35/14 , H01J35/08 , H01J2235/082 , H05G1/52
Abstract: A technique for indirectly measuring the degree of alignment of a beam in an electron-optical system including aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practiced in connection with an X-ray source which is operable to produce an X-ray target, further, a technique for determining and controlling a width of an electron-beam at its intersection point with the target.
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