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公开(公告)号:US10921526B2
公开(公告)日:2021-02-16
申请号:US16515779
申请日:2019-07-18
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. A silicide layer is formed on a patterned section of a semiconductor layer. The grating structures of a grating coupler are formed over the silicide layer and the section of the semiconductor layer.
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公开(公告)号:US10795082B1
公开(公告)日:2020-10-06
申请号:US16540452
申请日:2019-08-14
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian , Theodore Letavic , Kenneth J. Giewont , Steven M. Shank
Abstract: Structures that include a Bragg grating and methods of fabricating a structure that includes a Bragg grating. Bragg elements are positioned adjacent to a waveguide. The Bragg elements are separated by grooves that alternate with the Bragg elements. A dielectric layer includes portions positioned to close the grooves to define airgaps. The airgaps are respectively arranged between adjacent pairs of the Bragg elements. The Bragg elements may be used to form the Bragg grating.
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公开(公告)号:US10746907B2
公开(公告)日:2020-08-18
申请号:US15945347
申请日:2018-04-04
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with structured cladding and methods of manufacture. A structure includes: a grating coupler in a dielectric material; a back end of line (BEOL) multilayer stack over the dielectric material; and a multi-layered cladding structure of alternating materials directly on the BEOL multilayer stack.
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公开(公告)号:US10684530B1
公开(公告)日:2020-06-16
申请号:US16288634
申请日:2019-02-28
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob , Abu Thomas
IPC: G02F1/29
Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. An electro-optic modulator is arranged over a portion of a waveguide core. The electro-optic modulator includes an electrode, an active layer arranged adjacent to the electrode, and a dielectric layer including a portion that has a lateral arrangement between the electrode and the active layer. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied to the electrode and the active layer.
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公开(公告)号:US20200012045A1
公开(公告)日:2020-01-09
申请号:US16026596
申请日:2018-07-03
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Waveguide bends and methods of fabricating waveguide bends. A first waveguide bend is contiguous with a waveguide. A second waveguide bend is spaced from a surface at an inner radius of the first waveguide bend by a gap. The second waveguide bend may have a substantially concentric arrangement with the first waveguide bend.
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公开(公告)号:US20190227229A1
公开(公告)日:2019-07-25
申请号:US15878025
申请日:2018-01-23
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Ajey P. Jacob , Yusheng Bian
Abstract: Grating couplers and methods of fabricating a grating coupler. The grating coupler may include a plurality of grating structures arranged on a substrate and a layer arranged over the grating structures. The grating structures are composed of a first material characterized by a first refractive index with a real part. The layer is composed of a second material characterized by a second refractive index with a real part. The real part of the second refractive index is greater than the real part of the first refractive index of the first material for electromagnetic radiation with a wavelength in a range of 1 micron to 9 microns.
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公开(公告)号:US10910503B1
公开(公告)日:2021-02-02
申请号:US16544866
申请日:2019-08-19
Applicant: GLOBALFOUNDRIES INC.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
IPC: H01L31/0352 , H01L31/0232 , G02B6/13 , G02B6/12
Abstract: The present disclosure generally relates to semiconductor detectors for use in optoelectronic/photonic devices and integrated circuit (IC) chips, and methods for forming same. The present disclosure also relates to photodetectors integrated with waveguide stacks, more particularly, photodetectors with butt-end coupled waveguides. The present disclosure also relates to methods of forming such structures.
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公开(公告)号:US20210018690A1
公开(公告)日:2021-01-21
申请号:US16515779
申请日:2019-07-18
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. A silicide layer is formed on a patterned section of a semiconductor layer. The grating structures of a grating coupler are formed over the silicide layer and the section of the semiconductor layer.
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公开(公告)号:US10795083B1
公开(公告)日:2020-10-06
申请号:US16426551
申请日:2019-05-30
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob , Steven M. Shank
Abstract: Structures for a directional coupler and methods of fabricating a structure for a directional coupler. A first section of a first waveguide core is laterally spaced from a second section of a second waveguide core. A coupling element is arranged either over or under the first section of the first waveguide core and the second section of the second waveguide core. The first and second waveguide cores are comprised of a material having a first refractive index, and the first coupling element is comprised of a material having a second refractive index that is different from the first refractive index. The first coupling element is surrounded by a side surface that overlaps with the first section of the first waveguide core and the second section of the second waveguide core.
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公开(公告)号:US10746921B2
公开(公告)日:2020-08-18
申请号:US16040896
申请日:2018-07-20
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures including a waveguide arrangement and methods of fabricating a structure that includes a waveguide arrangement. A second waveguide spaced in a lateral direction from a first waveguide, a third waveguide spaced in a vertical direction from the first waveguide, and a fourth waveguide spaced in the vertical direction from the second waveguide. The third waveguide is arranged in the lateral direction to provide a first overlapping relationship with the first waveguide. The fourth waveguide is arranged in the lateral direction to provide a second overlapping relationship with the second waveguide.
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