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    OPTICAL DEVICE WITH LOW-LOSS THERMALLY TUNABLE CLOSED-CURVE OPTICAL WAVEGUIDE
    1.
    发明申请
    OPTICAL DEVICE WITH LOW-LOSS THERMALLY TUNABLE CLOSED-CURVE OPTICAL WAVEGUIDE 有权

    公开(公告)号：US20230003937A1

    公开(公告)日：2023-01-05

    申请号：US17363846

    申请日：2021-06-30

    Applicant: GLOBALFOUNDRIES U.S. Inc.

    Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth Giewont

    IPC: G02B6/125 ,  G02F1/01

    Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

    OPTICAL DEVICE WITH LOW-LOSS THERMALLY TUNABLE CLOSED-CURVE OPTICAL WAVEGUIDE
    3.
    发明申请
    OPTICAL DEVICE WITH LOW-LOSS THERMALLY TUNABLE CLOSED-CURVE OPTICAL WAVEGUIDE 有权

    公开(公告)号：US20230073958A1

    公开(公告)日：2023-03-09

    申请号：US18055576

    申请日：2022-11-15

    Applicant: GlobalFoundries U.S. Inc.

    Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth J. Giewont

    IPC: G02B6/125 ,  G02F1/01

    Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

    Optical device with low-loss thermally tunable closed-curve optical waveguide
    5.
    发明授权
    Optical device with low-loss thermally tunable closed-curve optical waveguide 有权

    公开(公告)号：US11555964B1

    公开(公告)日：2023-01-17

    申请号：US17363846

    申请日：2021-06-30

    Applicant: GLOBALFOUNDRIES U.S. Inc.

    Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth J. Giewont

    IPC: G02B6/125 ,  G02F1/01 ,  G02B6/136 ,  G02B6/12

    Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

    Optical device with low-loss thermally tunable closed-curve optical waveguide
    8.
    发明授权
    Optical device with low-loss thermally tunable closed-curve optical waveguide 有权

    公开(公告)号：US11803012B2

    公开(公告)日：2023-10-31

    申请号：US18055576

    申请日：2022-11-15

    Applicant: GlobalFoundries U.S. Inc.

    Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth J. Giewont

    IPC: G02B6/125 ,  G02F1/01 ,  G02B6/136 ,  G02B6/12

    CPC classification number: G02B6/125 ,  G02F1/0147 ,  G02B6/136 ,  G02B2006/12061 ,  G02B2006/12147

    Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

    PHOTODETECTORS AND ABSORBERS WITH SLANTED LIGHT INCIDENCE
    9.
    发明申请
    PHOTODETECTORS AND ABSORBERS WITH SLANTED LIGHT INCIDENCE 有权

    公开(公告)号：US20220344523A1

    公开(公告)日：2022-10-27

    申请号：US17241525

    申请日：2021-04-27

    Applicant: GLOBALFOUNDRIES U.S. Inc.

    Inventor： Asif J. Chowdhury ,  Yusheng Bian ,  Abdelsalam Aboketaf ,  Andreas D. Stricker

    IPC: H01L31/0232 ,  G02B6/24

    Abstract: Structures for a photodetector or light absorber and methods of forming a structure for a photodetector or light absorber. The structure includes a pad, a waveguide core adjoined to the pad, and a light-absorbing layer on the pad. The waveguide core includes a first longitudinal axis, and the light-absorbing layer includes a second longitudinal axis and an end surface intersected by the second longitudinal axis. The end surface of the light-absorbing layer is positioned adjacent to the waveguide core. The first longitudinal axis of the first waveguide core is inclined relative to the second longitudinal axis of the light-absorbing layer and/or the end surface slanted relative to the second longitudinal axis.

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