公开(公告)号：US20130206986A1

公开(公告)日：2013-08-15

申请号：US13767822

申请日：2013-02-14

Applicant: Hitachi High-Technologies Corporation

Inventor： Makoto SUZUKI ,  Kazunari ASAO

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J2237/221

Abstract: There is proposed a charged particle beam apparatus including: a plurality of noise removal filters that remove noise of an electrical signal; a measurement unit that measures the contrast-to-noise ratio after applying one of the noise removal filters; and a determination unit that determines a magnitude relationship between the contrast-to-noise ratio measured by the measurement unit and a threshold value set in advance.

Abstract translation: 提出了一种带电粒子束装置，包括：多个噪声去除滤波器，其去除电信号的噪声; 测量单元，其在应用所述噪声去除滤波器之一之后测量所述对比噪声比; 以及确定单元，其确定由测量单元测量的对比度噪声比与预先设置的阈值之间的大小关系。

公开(公告)号：US20140197313A1

公开(公告)日：2014-07-17

申请号：US14215209

申请日：2014-03-17

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Noritsugu TAKAHASHI ,  Muneyuki FUKUDA ,  Manabu YANO ,  Hirohiko KITSUKI ,  Kazunari ASAO ,  Tomoyasu SHOJO

IPC: H01J37/28 ,  H01J37/10

CPC classification number: H01J37/28 ,  H01J37/10 ,  H01J37/145 ,  H01J37/21 ,  H01J2237/2817

Abstract: A charged-particle-beam device is characterized in having a control value for an aligner coil (29) being determined by: a coil current and an electrode applied-voltage at a control value for objectives (30, 31), which is an electromagnetic-field superposition lens; a control value for image-shift coils (27, 28); and the acceleration voltage of the charged-particle-beam. By doing this, it has become possible to avoid image disturbances that occur on images to be displayed at boundaries between charged areas and non-charged areas, and provide a charged-particle-beam device that obtains clear images without any unevenness in brightness.

Abstract translation: 带电粒子束装置的特征在于具有对准线圈（29）的控制值，通过以下方式确定：线圈电流和用于物镜（30,31）的控制值的电极施加电压，其为电磁 场叠加透镜; 用于图像转换线圈（27,28）的控制值; 和带电粒子束的加速电压。 通过这样做，可以避免在充电区域和非充电区域之间的边界处显示图像上出现的图像干扰，并且提供获得清晰图像而没有任何亮度不均匀的带电粒子束装置。

公开(公告)号：US20130343649A1

公开(公告)日：2013-12-26

申请号：US13791469

申请日：2013-03-08

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Hideki ITAI ,  Zhigang WANG ,  Kazunari ASAO

IPC: G06K9/46

CPC classification number: G06K9/4647 ,  G01N23/2254 ,  G01N2223/42 ,  G06T5/007 ,  G06T2207/10061

Abstract: In order to solve the problem that the resolution of a back-scattered electron image without a contrast difference between materials with close atomic numbers is low, an image processing apparatus that performs an image process on a back-scattered electron image as an input image includes: a material peak detection unit that determines a peak luminance value with a peak of a frequency of a luminance histogram based on a luminance value obtained for each measurement position by using the input image as an input and information about material-dependent back-scattered electron generation efficiency, and that outputs the peak luminance value for each material; and an image information adjustment unit that emphasizes a material-dependent contrast on the basis of the input image and the peak luminance value for each material.

Abstract translation: 为了解决在近原子序号的材料之间没有对比度差异的背散射电子图像的分辨率低的问题，对作为输入图像的背散射电子图像进行图像处理的图像处理装置包括 ：材料峰值检测单元，其基于通过使用输入图像作为输入而获得的针对每个测量位置的亮度值来确定具有亮度直方图的频率的峰值的峰值亮度值以及关于材料依赖的反向散射电子的信息 产生效率，并输出每种材料的峰值亮度值; 以及图像信息调整单元，其基于输入图像和每种材料的峰值亮度值强调与材料相关的对比度。