公开(公告)号：US20070221494A1

公开(公告)日：2007-09-27

申请号：US11754897

申请日：2007-05-29

申请人： Hajime YAMADA ,  Masaki TAKEUCHI ,  Hideki KAWAMURA ,  Hiroyuki FUJINO ,  Yukio YOSHINO ,  Ken-ichi UESAKA ,  Tadashi NOMURA ,  Daisuke NAKAMURA ,  Yoshimitsu USHIMI ,  Takashi HAYASHI

发明人： Hajime YAMADA ,  Masaki TAKEUCHI ,  Hideki KAWAMURA ,  Hiroyuki FUJINO ,  Yukio YOSHINO ,  Ken-ichi UESAKA ,  Tadashi NOMURA ,  Daisuke NAKAMURA ,  Yoshimitsu USHIMI ,  Takashi HAYASHI

IPC分类号： H04R17/00 ,  C23C14/00

CPC分类号： H03H9/174 ,  C23C14/10 ,  C23C14/35 ,  H03H3/02 ,  H03H3/04 ,  H03H9/02133 ,  H03H9/02149 ,  H03H9/173 ,  H03H9/564 ,  H03H9/568 ,  H04R17/00 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric thin film resonator are provided. The piezoelectric thin film resonator is provided with a substrate having an opening, first and second insulation films which are provided on one surface of the substrate while covering the opening and which primarily include SiO2 and Al2O3, respectively, Al2O3 having oxygen defect and being in an amorphous state, and a piezoelectric thin film which is provided on the second insulation film and is sandwiched between electrodes and which primarily includes ZnO.

摘要翻译： 提供具有稳定的谐振频率的温度特性的压电薄膜谐振器，其制造方法和使用该压电薄膜谐振器的通信装置。 压电薄膜谐振器设置有具有开口的第一绝缘膜和第二绝缘膜的基板，所述第一和第二绝缘膜设置在基板的一个表面上，同时覆盖开口并且主要包括SiO 2和Al 2 O 3分别具有氧缺陷并处于非晶状态的Al 2 O 3 N 3，以及压电薄膜 其设置在第二绝缘膜上并夹在电极之间并且主要包括ZnO。