公开(公告)号：US08361231B2

公开(公告)日：2013-01-29

申请号：US13498902

申请日：2010-03-30

申请人： Masayuki Kouketsu ,  Hiroshi Itafuji

发明人： Masayuki Kouketsu ,  Hiroshi Itafuji

IPC分类号： C23C16/00 ,  B05C11/00

CPC分类号： B01B1/005

摘要： Provided is a liquid vaporization system capable of promoting vaporization of a liquid material while solving a problem of residual liquid material. A liquid vaporization system has a liquid vaporization apparatus having a pump and a vaporizer. The vaporizer has a case, a heater provided inside the case, a heat storage plate heated by the heater, and a mesh. The mesh is formed by interweaving wires and has an overall flat plate shape. By overlapping the mesh on an upper surface of the heat storage plate, minute irregularities are formed on the heat storage plate by the mesh. A nozzle is provided above the mesh, whereby the liquid material is dropped from the nozzle onto the heat storage plate. The liquid material spreads over the heat storage plate in a thin film and is heated and vaporized on the upper surface of the heat storage plate.

摘要翻译： 提供一种能够促进液体材料的蒸发同时解决残留液体材料的问题的液体蒸发系统。 液体蒸发系统具有液体蒸发装置，其具有泵和蒸发器。 蒸发器具有壳体，设置在壳体内部的加热器，由加热器加热的蓄热板和网。 网格通过交织线形成并具有整体平板形状。 通过在存储板的上表面上重叠网格，通过网格在储热板上形成微小的凹凸。 在网格上方设有喷嘴，由此液体材料从喷嘴落到储热板上。 液体材料以薄膜的形式在储热板上展开，并在储热板的上表面被加热和汽化。

公开(公告)号：US08573560B2

公开(公告)日：2013-11-05

申请号：US13413593

申请日：2012-03-06

申请人： Hiroshi Itafuji ,  Masayuki Kouketsu

发明人： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC分类号： F16K31/00

CPC分类号： H01L21/6719 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/2562 ,  Y10T137/2572 ,  Y10T137/7758 ,  Y10T137/7761 ,  Y10T137/777

摘要： The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod.

摘要翻译： 本发明提供了一种配置成控制真空室中的真空压力的真空控制阀。 真空控制阀包括控制阀主体，操作单元，气缸，偏压单元和打开阀。 操作单元和气缸包括开阀操作室和关闭负载产生室。 关闭负荷产生室被构造成与阀打开操作室具有共同的轴向中心线，并且根据工作流体的供给沿着减小升程的方向产生施加到操作单元的负载。 并且关闭负载产生室可以形成在杆的内部。

公开(公告)号：US08544500B2

公开(公告)日：2013-10-01

申请号：US13108909

申请日：2011-05-16

申请人： Hiroshi Itafuji ,  Masayuki Kouketsu

发明人： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC分类号： F16K11/10 ,  B08B9/032

CPC分类号： F16K27/003 ,  F16K27/0236 ,  Y10T137/4259 ,  Y10T137/8158 ,  Y10T137/87249 ,  Y10T137/87925

摘要： This invention provides a chemical fluid flow channel coupling apparatus that couples and decouples chemical fluid flow channels. The coupling apparatus includes a first coupling unit; and a second coupling unit. The first coupling unit includes a first chemical fluid valve member chamber and a first valve member configured to open and close a first chemical fluid opening communicated with the first chemical fluid flow channel; and a purging fluid supply control valve configured to open and close the purging fluid supply flow channel. The second coupling unit includes a second chemical fluid valve member chamber, and a second valve member configured to open and close a second chemical fluid opening connected to the second chemical fluid flow channel; and a purging fluid discharge control valve.

摘要翻译： 本发明提供一种化学流体流动通道联接装置，其耦合和分离化学流体流动通道。 联接装置包括：第一联接单元; 和第二耦合单元。 第一联接单元包括第一化学流体阀构件室和构造成打开和关闭与第一化学流体流动通道连通的第一化学流体开口的第一阀构件; 以及构造成打开和关闭清洗流体供给流动通道的清洗液供应控制阀。 第二联接单元包括第二化学流体阀构件室和构造成打开和关闭连接到第二化学流体流动通道的第二化学流体开口的第二阀构件; 和清洗液排出控制阀。

公开(公告)号：US08590942B2

公开(公告)日：2013-11-26

申请号：US13073744

申请日：2011-03-28

申请人： Masayuki Kouketsu ,  Hiroshi Itafuji ,  Shinji Hayakawa ,  Yasushi Kohno

发明人： Masayuki Kouketsu ,  Hiroshi Itafuji ,  Shinji Hayakawa ,  Yasushi Kohno

IPC分类号： F16L7/00

CPC分类号： F16L59/065 ,  F16L39/005 ,  F16L59/182 ,  H01L21/67017

摘要： The connected structure includes a plurality of vacuum double pipes and a joint connecting the plurality of vacuum double pipes. Each vacuum double pipe includes an inner pipe and an outer pipe, and a vacuum passage is formed between the inner pipe and the outer pipe. The vacuum passage is open at both ends in an extension direction of the inner pipe and sealed between the both ends. The joint includes an inner pipe joint portion having inner pipe connectors and an outer pipe joint portion having outer pipe connectors. The joint evacuation passage connects the vacuum passages and is sealed between the outer pipe connectors.

摘要翻译： 连接结构包括多个真空双管和连接多个真空双管的接头。 每个真空双管包括内管和外管，并且在内管和外管之间形成真空通道。 真空通道在内管的延伸方向的两端开口，并且在两端之间被密封。 接头包括具有内管连接器的内管接合部和具有外管连接器的外管接合部。 联合排气通道连接真空通道并密封在外管连接器之间。

公开(公告)号：US08544350B2

公开(公告)日：2013-10-01

申请号：US13041283

申请日：2011-03-04

申请人： Hiroshi Itafuji ,  Masayuki Kouketsu

发明人： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC分类号： G01N35/10 ,  G01N30/20

CPC分类号： G01N30/20 ,  G01N35/1097 ,  G01N2030/201 ,  G01N2030/202 ,  G01N2030/207

摘要： This invention provides a sample injector for injecting a fixed amount of a sample into a mobile phase medium and discharging the mobile phase medium with the sample. The sample injector includes a first member having a medium passage for supplying the mobile phase medium and a sample passage for supplying the sample and a second member having a discharge passage for discharging the mobile phase medium with the sample to an outside of the injector. The second member is provided in contact with the first member. The first member and the second member are configured to move to a sample charging position and a sample injection position. The sample charging position is for the sample chamber to connect with the sample passage. The sample injection position is for the sample chamber to connect with the medium passage and the discharge passage.

摘要翻译： 本发明提供了一种样品注射器，用于将固定量的样品注入到流动相介质中并用样品排出流动相介质。 样本注射器包括具有用于供应流动相介质的介质通道的第一构件和用于供给样品的样品通道和具有用于将具有样品的流动相介质排出到喷射器外部的排出通道的第二构件。 第二构件设置成与第一构件接触。 第一构件和第二构件被配置成移动到样品充电位置和样品注入位置。 样品充电位置用于样品室与样品通道连接。 样品注射位置用于样品室与介质通道和排出通道连接。

公开(公告)号：US20120180724A1

公开(公告)日：2012-07-19

申请号：US13498902

申请日：2010-03-30

申请人： Masayuki Kouketsu ,  Hiroshi Itafuji

发明人： Masayuki Kouketsu ,  Hiroshi Itafuji

IPC分类号： C23C16/46 ,  C23C16/52

CPC分类号： B01B1/005

摘要： Provided is a liquid vaporization system capable of promoting vaporization of a liquid material while solving a problem of residual liquid material. A liquid vaporization system has a liquid vaporization apparatus having a pump and a vaporizer. The vaporizer has a case, a heater provided inside the case, a heat storage plate heated by the heater, and a mesh. The mesh is formed by interweaving wires and has an overall flat plate shape. By overlapping the mesh on an upper surface of the heat storage plate, minute irregularities are formed on the heat storage plate by the mesh. A nozzle is provided above the mesh, whereby the liquid material is dropped from the nozzle onto the heat storage plate. The liquid material spreads over the heat storage plate in a thin film and is heated and vaporized on the upper surface of the heat storage plate.

摘要翻译： 提供一种能够促进液体材料的蒸发同时解决残留液体材料的问题的液体蒸发系统。 液体蒸发系统具有液体蒸发装置，其具有泵和蒸发器。 蒸发器具有壳体，设置在壳体内部的加热器，由加热器加热的蓄热板和网。 网格通过交织线形成并具有整体平板形状。 通过在存储板的上表面上重叠网格，通过网格在储热板上形成微小的凹凸。 在网格上方设有喷嘴，由此液体材料从喷嘴落到储热板上。 液体材料以薄膜的形式在储热板上展开，并在储热板的上表面被加热和汽化。

公开(公告)号：US20120024989A1

公开(公告)日：2012-02-02

申请号：US13264742

申请日：2010-04-16

申请人： Masayuki Kouketsu ,  Hiroshi Itafuji

发明人： Masayuki Kouketsu ,  Hiroshi Itafuji

IPC分类号： B05B1/34

CPC分类号： B05C5/0283 ,  B05B1/044 ,  B05B1/3013 ,  B05C5/0225 ,  B05C5/0258

摘要： A liquid ejecting apparatus having a storage portion (20) for storing a treatment liquid, a slit-shaped opening portion (41) for ejecting the treatment liquid, and a connecting passage (42) that has a slit-shaped cross-section and connects the storage portion (20) to the slit-shaped opening portion (41) includes: a valve body portion (50) that is provided in the storage portion (20) to cover the connecting passage (42), and forms a gap (22) together with a lower wall (43) of the storage portion (20) so that the treatment liquid is caused to flow into the connecting passage (42) through the gap (22); a first curved surface portion (44a) that smoothly connects a surface of the lower wall (43) of the storage portion (20) to an inner wall surface (42a) of the connecting passage (42); and a second curved surface portion (51a) that is provided on the valve body portion (50) so as to project to an identical side to the first curved surface portion (44a). With this constitution, air bubbles can be prevented from intermixing with the treatment liquid ejected from the slit-shaped opening portion (41).

摘要翻译： 一种液体喷射装置，具有用于储存处理液的储存部分（20），用于喷射处理液体的狭缝形开口部分（41）和具有狭缝形横截面的连接通道（42） 所述狭缝状开口部（41）的所述收纳部（20）具有：阀体部（50），其设置在所述收纳部（20）中，以覆盖所述连结通路（42），形成间隙 ）与存储部（20）的下壁（43）一起，使得处理液通过间隙（22）流入连接通道（42）; 第一弯曲表面部分（44a），其将所述存储部分（20）的下壁（43）的表面平滑地连接到所述连接通道（42）的内壁表面（42a）; 以及设置在阀体部分（50）上以与第一曲面部分（44a）相同的一侧突出的第二弯曲表面部分（51a）。 利用这种构造，可以防止气泡与从狭缝状开口部（41）喷出的处理液混合。

公开(公告)号：US08840049B2

公开(公告)日：2014-09-23

申请号：US13264742

申请日：2010-04-16

申请人： Masayuki Kouketsu ,  Hiroshi Itafuji

发明人： Masayuki Kouketsu ,  Hiroshi Itafuji

IPC分类号： B05C1/02 ,  B05C5/02 ,  B05B1/04 ,  B05B1/30

CPC分类号： B05C5/0283 ,  B05B1/044 ,  B05B1/3013 ,  B05C5/0225 ,  B05C5/0258

摘要： A liquid ejecting apparatus having a storage portion (20) for storing a treatment liquid, a slit-shaped opening portion (41) for ejecting the treatment liquid, and a connecting passage (42) that has a slit-shaped cross-section and connects the storage portion (20) to the slit-shaped opening portion (41) includes: a valve body portion (50) that is provided in the storage portion (20) to cover the connecting passage (42), and forms a gap (22) together with a lower wall (43) of the storage portion (20) so that the treatment liquid is caused to flow into the connecting passage (42) through the gap (22); a first curved surface portion (44a) that smoothly connects a surface of the lower wall (43) of the storage portion (20) to an inner wall surface (42a) of the connecting passage (42); and a second curved surface portion (51a) that is provided on the valve body portion (50) so as to project to an identical side to the first curved surface portion (44a). With this constitution, air bubbles can be prevented from intermixing with the treatment liquid ejected from the slit-shaped opening portion (41).

摘要翻译： 一种液体喷射装置，具有用于储存处理液的储存部分（20），用于喷射处理液体的狭缝形开口部分（41）和具有狭缝形横截面的连接通道（42） 所述狭缝状开口部（41）的所述收纳部（20）具有：阀体部（50），其设置在所述收纳部（20）中，以覆盖所述连结通路（42），形成间隙 ）与存储部（20）的下壁（43）一起，使得处理液通过间隙（22）流入连接通道（42）; 第一弯曲表面部分（44a），其将所述存储部分（20）的下壁（43）的表面平滑地连接到所述连接通道（42）的内壁表面（42a）; 以及设置在阀体部分（50）上以与第一曲面部分（44a）相同的一侧突出的第二弯曲表面部分（51a）。 利用这种构造，可以防止气泡与从狭缝状开口部（41）喷出的处理液混合。

公开(公告)号：US08210196B2

公开(公告)日：2012-07-03

申请号：US12986119

申请日：2011-01-06

申请人： Hiroshi Itafuji ,  Masayuki Kouketsu

发明人： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC分类号： G05D11/00

CPC分类号： H01L21/6719 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/2562 ,  Y10T137/2572 ,  Y10T137/7758 ,  Y10T137/7761 ,  Y10T137/777

摘要： A vacuum control system using a vacuum pump to control a vacuum pressure and a flow of a processing gas in a vacuum chamber. The vacuum control system includes: a plurality of vacuum control valves, each of the valves being connected between each of a plurality of gas discharge ports and the vacuum pump; a pressure measurement unit configured to measure the vacuum pressure of the processing gas supplied to the object; and a controller configured to manipulate respective openings of the valves in accordance with the measured vacuum pressure.

摘要翻译： 一种使用真空泵来控制真空室中的真空压力和处理气体流的真空控制系统。 真空控制系统包括：多个真空控制阀，每个阀连接在多个排气口和真空泵中的每一个之间; 压力测量单元，被配置为测量供给到所述物体的处理气体的真空压力; 以及控制器，其被配置为根据所测量的真空压力来操纵所述阀的相应开口。

公开(公告)号：US20110285125A1

公开(公告)日：2011-11-24

申请号：US13108909

申请日：2011-05-16

申请人： Hiroshi Itafuji ,  Masayuki Kouketsu

发明人： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC分类号： F16L55/00

CPC分类号： F16K27/003 ,  F16K27/0236 ,  Y10T137/4259 ,  Y10T137/8158 ,  Y10T137/87249 ,  Y10T137/87925

摘要： This invention provides a chemical fluid flow channel coupling apparatus that couples and decouples chemical fluid flow channels. The coupling apparatus includes a first coupling unit; and a second coupling unit. The first coupling unit includes a first chemical fluid valve member chamber and a first valve member configured to open and close a first chemical fluid opening communicated with the first chemical fluid flow channel; and a purging fluid supply control valve configured to open and close the purging fluid supply flow channel. The second coupling unit includes a second chemical fluid valve member chamber, and a second valve member configured to open and close a second chemical fluid opening connected to the second chemical fluid flow channel; and a purging fluid discharge control valve.

摘要翻译： 本发明提供一种化学流体流动通道联接装置，其耦合和分离化学流体流动通道。 联接装置包括：第一联接单元; 和第二耦合单元。 第一联接单元包括第一化学流体阀构件室和构造成打开和关闭与第一化学流体流动通道连通的第一化学流体开口的第一阀构件; 以及构造成打开和关闭清洗流体供给流动通道的清洗液供应控制阀。 第二联接单元包括第二化学流体阀构件室和构造成打开和关闭连接到第二化学流体流动通道的第二化学流体开口的第二阀构件; 和清洗液排出控制阀。