公开(公告)号：US07245388B2

公开(公告)日：2007-07-17

申请号：US10732064

申请日：2003-12-10

申请人： Hisashi Isozaki ,  Takuji Sato ,  Yoshiyuki Enomoto ,  Hiroyuki Maekawa

发明人： Hisashi Isozaki ,  Takuji Sato ,  Yoshiyuki Enomoto ,  Hiroyuki Maekawa

IPC分类号： G01B11/28

CPC分类号： G01N21/9501

摘要： A method for surface inspection, comprising the step of projecting at least two laser beams with different wavelengths to a same point to be inspected via a same projecting lens, the step of setting incident angles of the two laser beams so that fluctuations of values of reflectivity of the laser beams are complementary to each other, and the step of detecting reflected scattered light components.

摘要翻译： 一种用于表面检查的方法，包括以下步骤：通过相同的投影透镜将具有不同波长的至少两个激光束投影到相同的待检查点;设置两个激光束的入射角的步骤，使得反射率值的波动 的激光束彼此互补，并且检测反射的散射光分量的步骤。

公开(公告)号：US08243264B2

公开(公告)日：2012-08-14

申请号：US12857874

申请日：2010-08-17

申请人： Hisashi Isozaki ,  Yoshiyuki Enomoto

发明人： Hisashi Isozaki ,  Yoshiyuki Enomoto

IPC分类号： G01N21/00

CPC分类号： G01B11/245 ,  G01B11/25

摘要： A measuring apparatus measuring a surface shape of a target includes a projection optical system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, an optical imaging system to cause the reflected line beam to form an image on a receiving surface of the imaging device to acquire a shape of the line beam on the target, and a splitting mechanism to split the reflected line beam so as to acquire the shape of the line beam on the target at different positions in an extending direction of the line beam and guide the split reflected line beams to the imaging device. A plurality of segments are set on the receiving surface while each segment in which at least one region is set as a reception region is partitioned into a plurality of regions, and the optical imaging system causes the split reflected line beams to form images on the reception regions in the different segments, respectively.

摘要翻译： 测量目标的表面形状的测量装置包括：投射光学系统，用于辐射目标上的线束;成像装置，用于获取从目标物体反射的反射线束;光学成像系统，用于使反射线束形成 获取成像装置的接收面上的图像，以获取目标上的线束的形状，以及分割机构，以分割反射线束，以便获得目标在不同位置上的线束的形状 延伸线束的方向，并将分离的反射线束引导到成像装置。 将多个片段设置在接收表面上，其中将至少一个区域设置为接收区域的每个片段被划分为多个区域，并且光学成像系统使分割的反射线束在接收时形成图像 分别在不同部分的区域。

公开(公告)号：US07046353B2

公开(公告)日：2006-05-16

申请号：US10252763

申请日：2002-09-23

申请人： Hisashi Isozaki ,  Yoshiyuki Enomoto

发明人： Hisashi Isozaki ,  Yoshiyuki Enomoto

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/9501

摘要： A surface inspection system for projecting a laser beam to a surface of a substrate and for detecting a foreign object by detecting scattered reflection light of the laser beam, comprising a light source unit having a plurality of light emitting sources for emitting the laser beams, and a projecting optical system for projecting the laser beam from each of the light emitting sources to the surface of the substrate.

公开(公告)号：US07064820B2

公开(公告)日：2006-06-20

申请号：US10393833

申请日：2003-03-21

申请人： Hisashi Isozaki ,  Michihiro Yamazaki ,  Hiroshi Yoshikawa ,  Naoto Miki ,  Hiroyuki Maekawa ,  Naohiro Takahashi

发明人： Hisashi Isozaki ,  Michihiro Yamazaki ,  Hiroshi Yoshikawa ,  Naoto Miki ,  Hiroyuki Maekawa ,  Naohiro Takahashi

IPC分类号： G01N21/00 ,  G01J4/00

CPC分类号： G01N21/21 ,  G01N21/94

摘要： A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are coated by changing a photodetection polarizing angle by the photodetection polarizing angle changing means, and the step of performing surface inspection by setting the photodetection polarizing angle to a condition where an S/N ratio of photodetection output is at the highest.

公开(公告)号：US08009286B2

公开(公告)日：2011-08-30

申请号：US12442879

申请日：2007-12-04

申请人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

发明人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9505 ,  G01N2201/06113

摘要： A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

摘要翻译： 光源部分输出具有短波长和长波长的两种波长的光通量，同时强度可变。 在照射长波长的光通量时，将照射具有短波长的光束的来自第一光强度检测部的输出与来自第一光强检测部的输出进行比较。 计算来自内部对象的检测信号消失的点附近的消失水平。 具有长波长的光通量的第一强度被设置为高于消失水平的水平。 基于通过具有第一强度的长波长的光通量获得的来自第一光强检测部的输出，测量被检体内的被检体。

公开(公告)号：US20100007872A1

公开(公告)日：2010-01-14

申请号：US12442879

申请日：2007-12-04

申请人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

发明人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

IPC分类号： G01N21/956 ,  H01L21/66 ,  G01J3/00 ,  G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9505 ,  G01N2201/06113

摘要： A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The optical flux is made incident to a detected surface of a body to be detected at a predetermined incident angle simultaneously or alternatively. Based on a type of optical flux outputted from the light source section and an output from a first light intensity detecting section, at least the intensity of the optical flux having a long wavelength outputted from the light source section is adjusted. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A signal that appears only in the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength is identified as a detected signal from an internal subject. The intensity of optical flux having a long wavelength is adjusted. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

摘要翻译： 光源部分输出具有短波长和长波长的两种波长的光通量，同时强度可变。 光通量以预定的入射角同时或交替地入射到要检测的身体的检测表面。 基于从光源部输出的光通量和第一光强检测部的输出，至少从光源部输出的具有长波长的光通量的强度被调整。 在照射长波长的光通量时，将照射具有短波长的光束的来自第一光强度检测部的输出与来自第一光强检测部的输出进行比较。 作为来自内部被检体的检测信号，识别仅在来自第一光强检测部的输出中出现的长波长的光束的信号。 调整长波长的光通量的强度。 计算来自内部对象的检测信号消失的点附近的消失水平。 具有长波长的光通量的第一强度被设置为高于消失水平的水平。 基于通过具有第一强度的长波长的光通量获得的来自第一光强检测部的输出，测量被检体内的被检体。

公开(公告)号：US06204918B1

公开(公告)日：2001-03-20

申请号：US09285259

申请日：1999-04-02

申请人： Hisashi Isozaki ,  Yutaka Shida ,  Takuji Sato

发明人： Hisashi Isozaki ,  Yutaka Shida ,  Takuji Sato

IPC分类号： G01N2100

CPC分类号： G01N21/8851

摘要： An apparatus for surface inspection according to the invention comprises an irradiating optical system for throwing an irradiating light beam from a light source onto the surface of an object of inspection, a light receiving optical system for receiving a scattered light beam reflected from the surface of the object of inspection irradiated by the irradiating optical system, a photosensing portion for forming a surface data signal from the scattered light beam received by the light receiving optical system, a displacement portion for displacing the surface of the object of inspection relative to the irradiating optical system, plus the light receiving optical system, continuously in the main scanning direction and intermittently in the sub-scanning direction, and a foreign matter detecting portion for detecting a foreign matter present on the surface of the object of inspection on the basis of the maximum value level of the surface data signal and obtaining the position, in the sub-scanning direction, of the foreign matter present on the surface of the object of inspection on the basis of at least two adjoining surface data signals in the sub-scanning direction.

摘要翻译： 根据本发明的用于表面检查的装置包括：照射光学系统，用于将来自光源的照射光束投射到检查对象的表面上;光接收光学系统，用于接收从所述光源的表面反射的散射光束; 由照射光学系统照射的检查对象物，用于由受光光学系统接收的散射光形成表面数据信号的光敏部分，用于使检查对象的表面相对于照射光学系统移位的位移部分 加上受光光学系统，在主扫描方向上连续地并且在副扫描方向上间歇地，以及异物检测部分，用于根据最大值检测存在于检查对象表面上的异物 水平的表面数据信号并获得位置，在sub sca 基于在副扫描方向上的至少两个邻接表面数据信号存在于检查对象表面上的异物的方向。

公开(公告)号：US08692194B2

公开(公告)日：2014-04-08

申请号：US13165046

申请日：2011-06-21

申请人： Hisashi Isozaki ,  Hirotaka Tanaka

发明人： Hisashi Isozaki ,  Hirotaka Tanaka

IPC分类号： H01J37/28 ,  H01J37/22

CPC分类号： H01J37/228 ,  H01J37/226 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for receiving the fluorescent light passing through the wavelength filter and performing optical-electric conversion, wherein the light amount of the illumination light in the wavelength range passing through the wavelength filter does not exceed a limit of deterioration of the scanning electron image.

摘要翻译： 本发明提供了一种电子显微镜装置，包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测从扫描的样本8发出的电子11的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，光学显微镜具有用于照射照明光的发光源13，并且光学显微镜将照明光照射到 并且通过接收来自试样的反射光获取光学图像，并且其中电子检测器具有用于电子 - 光转换的荧光物质层，用于限制使得荧光的全部或几乎全部波长范围的波长滤波器 来自荧光物质层的光通过，并且是波长 用于接收通过波长滤波器的荧光并进行光电转换的检测元件，其中通过波长滤波器的波长范围内的照明光的光量不超过扫描电子图像的劣化极限。

公开(公告)号：US08097849B2

公开(公告)日：2012-01-17

申请号：US12653324

申请日：2009-12-11

申请人： Fumio Ohtomo ,  Hisashi Isozaki

发明人： Fumio Ohtomo ,  Hisashi Isozaki

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  G02B21/06 ,  G02B21/365 ,  H01J37/22 ,  H01J37/265 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electrons issued from a specimen 8 scanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion where the electron beam is projected beyond the scanning area, and the scanning electron microscope acquires a scanning electron image based on electrons issued when the electron beam scans over the scanning area.

摘要翻译： 本发明提供一种电子显微镜装置1，其包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测扫描的试样8发出的电子的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，其中光学显微镜向样本投射照明光，接收来自样本的反射光并获取光学图像， 并且其中扫描电子显微镜的光轴7在试样的观察点处与光学显微镜的光轴6交叉，其中扫描装置以比扫描宽度宽的扫描宽度投影扫描电子束 光学显微镜投射照明光并获取光学图像 电子束突出超过扫描区域的超越部分，扫描电子显微镜根据电子束扫描扫描区域时发出的电子获取扫描电子图像。

公开(公告)号：US20100163728A1

公开(公告)日：2010-07-01

申请号：US12653324

申请日：2009-12-11

申请人： Fumio Ohtomo ,  Hisashi Isozaki

发明人： Fumio Ohtomo ,  Hisashi Isozaki

IPC分类号： G01N23/225 ,  G02B21/06

CPC分类号： H01J37/28 ,  G02B21/06 ,  G02B21/365 ,  H01J37/22 ,  H01J37/265 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electrons issued from a specimen 8 scanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion where the electron beam is projected beyond the scanning area, and the scanning electron microscope acquires a scanning electron image based on electrons issued when the electron beam scans over the scanning area.

摘要翻译： 本发明提供一种电子显微镜装置1，其包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测扫描的试样8发出的电子的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，其中光学显微镜向样本投射照明光，接收来自样本的反射光并获取光学图像， 并且其中扫描电子显微镜的光轴7在试样的观察点处与光学显微镜的光轴6交叉，其中扫描装置以比扫描宽度宽的扫描宽度投影扫描电子束 光学显微镜投射照明光并获取光学图像 电子束突出超过扫描区域的超越部分，扫描电子显微镜根据电子束扫描扫描区域时发出的电子获取扫描电子图像。