摘要:
A photoresist dispensing system used in a photoresist coating machine includes a pump, a switch valve, a sucking-back valve, a solenoid valve, a first set of speed controllers a second set of speed controllers and a sucking-back speed controller. The pump is used to transport liquid photoresist to a wafer through the switch valve. The sucking-back valve is controlled by solenoid valve through the sucking-back speed controller to produce or release a sucking force on the liquid photoresist to prevent it from undesired dropping onto the wafer. The solenoid valve also controls the switch valve and the pump to start or stop photoresist dispensing. The first set of speed controllers is coupled between the switch valve and the solenoid valve and the second set of speed controller is coupled between the pump and the solenoid valve. The sucking-back speed controller is coupled between the sucking-back valve and the route, which is between the first set of speed controller and the switch valve so that the sucking-back valve has a sufficient delay time to effectively suck the liquid photoresist in a proper time order of operation.
摘要:
A cup rinse with a valvular ring according to the invention is disclosed. The valvular ring has a plurality of valves in the center thereof. When an inlet tube is inserted through the valvular ring, the valves are forced to open thereby to allow a chemical liquid to flow into the cup resin via the inlet tube. Inversely when the inlet tube is completely pulled out of the valvular ring, the valves are tightly closed without a chemical liquid leakage. Accordingly, the cup rinse of the invention can prevent peripheral precision instruments, such as a motor, from damage by a leaky chemical liquid. Thus, the cup rinse of the invention cannot cause any unnecessary cost consumption.
摘要:
A speed controller with scales according to the invention is used to adjust the amount of an air flow thereby to control the amount of a chemical liquid sprayed. The speed controller includes a housing, a controller body and a transparent tube. The controller body is partly inserted in the housing and has a rotary button located at one end thereof and outside the housing. The rotary button has a slot and an indicator thereon, wherein the indicator is located at one end of the slot. The transparent tube, having a vertical scale on the side thereof and a circular scale on the top circumference thereof, encloses the rotary button. In the invention, the position of the rotary button can be determined by reading the vertical scale and the circular scale so as to precisely control the amount of a chemical liquid sprayed, thereby increasing yield and improving engineering analysis.
摘要:
The present invention is to provide a handheld electronic device comprising a phone body including an LCD display screen and a keypad disposed on a front surface thereof, and at least one first cutting surface formed at a corner between two adjacent side surfaces; and at least one padding block made of a shockproof material and each having a first joining surface being adapted to matingly fit onto the first cutting surface for securing the padding block to the corner of the phone body. By utilizing this, the padding block may collide with a hard object first when the handheld electronic device having the padding blocks falls thereto so as to lessen the effect or absorb the force of shocks and jarring and prevent the handheld electronic device from being damaged.
摘要:
A spray coating device for coating a rotating wafer according to the invention is disclosed. The spray coating device comprises a spray head having a plurality of spray holes which are located on one end thereof with more in number on both sides than on the center of the end for uniformly spraying a chemical liquid on the rotated wafer. Since spray holes are more in number on the both sides than on the center of the end, the rotated wafer can be uniformly spray coated with the chemical liquid even though several spray holes are congested.
摘要:
A preparation method for caffeine control and device thereof, mainly consisting of: a. mixing coffee powder and water in a container; b. applying a vibration force to the container for an acting time, and maintaining the operating temperature during this stage within a first working temperature range; c. compressing the space within the container to cause specific components in the coffee powder to be extracted and form coffee liquid; d. heating the coffee liquid obtained from step c to a second working temperature. Accordingly, vibration extraction and compression process at the first working temperature and the further heating process at the second working temperature are used to control the caffeine content of hot coffee.
摘要:
A method of automatic dispatch for a batch manufacturing tool fed by carriers. The method first compares carrier occupancy with a predetermined optimum occupancy. If a result obtained is less than the optimum, distribution information of the objects is reserved and the objects in the carriers are combined. Next, the combined objects are processed in the manufacturing tool. After processing, the objects are separated in the carriers according to the distribution information.
摘要:
A flexible recipe modeling system and method is provided for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment including associated different chambers of a multi-chamber processing machine by allowing a responsible engineer to add or modify individual recipe clusters including grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and providing a material execute system having a recipe cluster management engine (RCME) for management of the RCMS.
摘要:
The present invention is to provide a handheld electronic device comprising a phone body including an LCD display screen and a keypad disposed on a front surface thereof, and at least one first cutting surface formed at a corner between two adjacent side surfaces; and at least one padding block made of a shockproof material and each having a first joining surface being adapted to matingly fit onto the first cutting surface for securing the padding block to the corner of the phone body. By utilizing this, the padding block may collide with a hard object first when the handheld electronic device having the padding blocks falls thereto so as to lessen the effect or absorb the force of shocks and jarring and prevent the handheld electronic device from being damaged.
摘要:
A method to handle operation exceptions in an automated manufacturing system is achieved. The method comprises providing an automated manufacturing system comprising a means to track progress of work in process against standard process flows and a means to select product lots for processing from the work in process and to select equipment for processing the product lots based on next step information from the standard process flows. The automated manufacturing system is monitored for operation exception events. The product lots must deviate from the standard process flows. A floating process flow is selected corresponding to the operation exception event and the product lots from a floating process flow database. The floating process flow is linked to the standard process flow such that the next step is derived from the floating process flow. Manufacturing is continued using the floating process flow. The floating process flow is unlinked from the standard process flow such that the next step is derived from the standard process flow when the floating process flow is completed. A control system apparatus for handling operation exceptions in an automated manufacturing plant is achieved.