Dispense system of a photoresist coating machine
    1.
    发明授权
    Dispense system of a photoresist coating machine 失效
    光刻胶涂布机分配系统

    公开(公告)号:US6012607A

    公开(公告)日:2000-01-11

    申请号:US185436

    申请日:1998-11-03

    摘要: A photoresist dispensing system used in a photoresist coating machine includes a pump, a switch valve, a sucking-back valve, a solenoid valve, a first set of speed controllers a second set of speed controllers and a sucking-back speed controller. The pump is used to transport liquid photoresist to a wafer through the switch valve. The sucking-back valve is controlled by solenoid valve through the sucking-back speed controller to produce or release a sucking force on the liquid photoresist to prevent it from undesired dropping onto the wafer. The solenoid valve also controls the switch valve and the pump to start or stop photoresist dispensing. The first set of speed controllers is coupled between the switch valve and the solenoid valve and the second set of speed controller is coupled between the pump and the solenoid valve. The sucking-back speed controller is coupled between the sucking-back valve and the route, which is between the first set of speed controller and the switch valve so that the sucking-back valve has a sufficient delay time to effectively suck the liquid photoresist in a proper time order of operation.

    摘要翻译: 在光致抗蚀剂涂布机中使用的光刻胶分配系统包括泵,开关阀,回吸阀,电磁阀,第一组速度控制器,第二组速度控制器和吸回速度控制器。 该泵用于通过开关阀将液体光致抗蚀剂输送到晶片。 吸回阀由电磁阀通过吸回速度控制器控制,以产生或释放液体光致抗蚀剂上的吸力,以防止其不希望掉落到晶片上。 电磁阀还控制开关阀和泵启动或停止光刻胶分配。 第一组速度控制器耦合在开关阀和电磁阀之间,第二组速度控制器耦合在泵和电磁阀之间。 回吸速度控制器连接在第一组速度控制器和开关阀之间的回吸阀和路线之间,使得吸回阀具有足够的延迟时间以有效地吸入液态光致抗蚀剂 适当的时间顺序。

    Cup rinse with a valvular ring
    2.
    发明授权
    Cup rinse with a valvular ring 失效
    杯子用阀瓣冲洗

    公开(公告)号:US6076569A

    公开(公告)日:2000-06-20

    申请号:US193513

    申请日:1998-11-17

    IPC分类号: B05C11/08 F16K15/14 B65B1/04

    CPC分类号: F16K15/147 B05C11/08

    摘要: A cup rinse with a valvular ring according to the invention is disclosed. The valvular ring has a plurality of valves in the center thereof. When an inlet tube is inserted through the valvular ring, the valves are forced to open thereby to allow a chemical liquid to flow into the cup resin via the inlet tube. Inversely when the inlet tube is completely pulled out of the valvular ring, the valves are tightly closed without a chemical liquid leakage. Accordingly, the cup rinse of the invention can prevent peripheral precision instruments, such as a motor, from damage by a leaky chemical liquid. Thus, the cup rinse of the invention cannot cause any unnecessary cost consumption.

    摘要翻译: 公开了根据本发明的用阀瓣冲洗的杯子。 瓣环在其中心具有多个阀。 当入口管插入阀瓣环时,阀被迫打开,从而允许化学液体通过入口管流入杯形树脂。 相反,当入口管完全拉出阀瓣环时,阀门被紧密关闭而没有化学液体泄漏。 因此,本发明的杯子冲洗可以防止诸如电动机的周边精密仪器被泄漏的化学液体损坏。 因此,本发明的杯子冲洗不能造成任何不必要的成本消耗。

    Speed controller with scales
    3.
    发明授权
    Speed controller with scales 失效
    速度控制器与秤

    公开(公告)号:US6015096A

    公开(公告)日:2000-01-18

    申请号:US181100

    申请日:1998-10-28

    IPC分类号: F16K37/00 B67D5/08

    摘要: A speed controller with scales according to the invention is used to adjust the amount of an air flow thereby to control the amount of a chemical liquid sprayed. The speed controller includes a housing, a controller body and a transparent tube. The controller body is partly inserted in the housing and has a rotary button located at one end thereof and outside the housing. The rotary button has a slot and an indicator thereon, wherein the indicator is located at one end of the slot. The transparent tube, having a vertical scale on the side thereof and a circular scale on the top circumference thereof, encloses the rotary button. In the invention, the position of the rotary button can be determined by reading the vertical scale and the circular scale so as to precisely control the amount of a chemical liquid sprayed, thereby increasing yield and improving engineering analysis.

    摘要翻译: 使用根据本发明的具有鳞片的速度控制器来调节空气流量从而控制喷射的化学液体的量。 速度控制器包括壳体,控制器主体和透明管。 控制器主体部分地插入壳体中,并且具有位于其一端和壳体外部的旋转按钮。 旋转按钮在其上具有狭槽和指示器,其中指示器位于狭槽的一端。 在其一侧具有垂直刻度的透明管和其顶部圆周上的圆形鳞片包围旋转按钮。 在本发明中,可以通过读取垂直刻度和圆形刻度来确定旋转按钮的位置,以精确地控制喷射的化学液体的量,从而提高产量并改进工程分析。

    Handheld electronic device with shockproof mechanism
    4.
    发明申请
    Handheld electronic device with shockproof mechanism 有权
    带防震机构的手持式电子设备

    公开(公告)号:US20070161420A1

    公开(公告)日:2007-07-12

    申请号:US11329084

    申请日:2006-01-11

    申请人: Hsien-Jung Hsu

    发明人: Hsien-Jung Hsu

    IPC分类号: H04M1/00

    CPC分类号: H04M1/0202 H04M1/185

    摘要: The present invention is to provide a handheld electronic device comprising a phone body including an LCD display screen and a keypad disposed on a front surface thereof, and at least one first cutting surface formed at a corner between two adjacent side surfaces; and at least one padding block made of a shockproof material and each having a first joining surface being adapted to matingly fit onto the first cutting surface for securing the padding block to the corner of the phone body. By utilizing this, the padding block may collide with a hard object first when the handheld electronic device having the padding blocks falls thereto so as to lessen the effect or absorb the force of shocks and jarring and prevent the handheld electronic device from being damaged.

    摘要翻译: 本发明提供一种手持式电子装置,其包括电话本体,其包括LCD显示屏和设置在其前表面上的键盘,以及形成在两个相邻侧表面之间的拐角处的至少一个第一切割表面; 以及至少一个由防震材料制成的填充块,并且每个填充块具有适于匹配地配合到第一切割表面上的第一接合表面,用于将填充块固定到电话主体的角部。 通过利用这种情况,当具有填充块的手持式电子设备落在其上时,填充块可能首先与硬物体碰撞,以便减轻冲击和振动的作用或吸收冲击力并防止手持式电子设备被损坏。

    Spray coating device
    5.
    发明授权
    Spray coating device 有权
    喷涂装置

    公开(公告)号:US6139636A

    公开(公告)日:2000-10-31

    申请号:US189846

    申请日:1998-11-12

    IPC分类号: B05B1/14 B05C11/08 B05B13/04

    CPC分类号: B05B1/14 B05C11/08

    摘要: A spray coating device for coating a rotating wafer according to the invention is disclosed. The spray coating device comprises a spray head having a plurality of spray holes which are located on one end thereof with more in number on both sides than on the center of the end for uniformly spraying a chemical liquid on the rotated wafer. Since spray holes are more in number on the both sides than on the center of the end, the rotated wafer can be uniformly spray coated with the chemical liquid even though several spray holes are congested.

    摘要翻译: 公开了一种用于涂覆根据本发明的旋转晶片的喷涂装置。 喷涂装置包括喷头,喷头具有多个喷孔,该多个喷孔位于其一端,其两侧的数量多于末端的中心,用于均匀地喷洒旋转的晶片上的化学液体。 由于喷孔在两侧的数量多于端部的中心,即使几个喷孔堵塞,旋转的晶片也可以均匀地喷涂有化学液体。

    Preparation method for caffeine control and device thereof
    6.
    发明申请
    Preparation method for caffeine control and device thereof 审中-公开
    咖啡因控制的制备方法及其装置

    公开(公告)号:US20100272870A1

    公开(公告)日:2010-10-28

    申请号:US12385932

    申请日:2009-04-24

    IPC分类号: A23L1/48 A47J31/44

    摘要: A preparation method for caffeine control and device thereof, mainly consisting of: a. mixing coffee powder and water in a container; b. applying a vibration force to the container for an acting time, and maintaining the operating temperature during this stage within a first working temperature range; c. compressing the space within the container to cause specific components in the coffee powder to be extracted and form coffee liquid; d. heating the coffee liquid obtained from step c to a second working temperature. Accordingly, vibration extraction and compression process at the first working temperature and the further heating process at the second working temperature are used to control the caffeine content of hot coffee.

    摘要翻译: 一种咖啡因控制的制备方法及其装置,主要包括:a。 将咖啡粉和水混合在容器中; b。 向所述容器施加振动力作用时间,并且将所述工作温度在该阶段期间保持在第一工作温度范围内; C。 压缩容器内的空间以使咖啡粉中的特定组分被提取并形成咖啡液; d。 将从步骤c获得的咖啡液体加热至第二工作温度。 因此,使用在第一工作温度下的振动提取和压缩处理以及在第二工作温度下的进一步加热处理来控制热咖啡的咖啡因含量。

    Method and system of automatic dispatch
    7.
    发明申请
    Method and system of automatic dispatch 审中-公开
    自动调度方法与系统

    公开(公告)号:US20060074522A1

    公开(公告)日:2006-04-06

    申请号:US10954505

    申请日:2004-09-30

    IPC分类号: G06F7/00

    CPC分类号: G06Q10/10

    摘要: A method of automatic dispatch for a batch manufacturing tool fed by carriers. The method first compares carrier occupancy with a predetermined optimum occupancy. If a result obtained is less than the optimum, distribution information of the objects is reserved and the objects in the carriers are combined. Next, the combined objects are processed in the manufacturing tool. After processing, the objects are separated in the carriers according to the distribution information.

    摘要翻译: 一种用于由运输公司馈送的批量生产工具的自动调度方法。 该方法首先将载波占用率与预定的最佳占用率进行比较。 如果获得的结果小于最优值,则保留对象的分布信息并且将载体中的对象组合。 接下来,组合的对象在制造工具中被处理。 在处理之后,根据分发信息在载体中分离对象。

    Flexible recipe modeling and recipe cluster management system
    8.
    发明授权
    Flexible recipe modeling and recipe cluster management system 失效
    灵活的配方建模和配方集群管理系统

    公开(公告)号:US06968245B2

    公开(公告)日:2005-11-22

    申请号:US10217510

    申请日:2002-08-13

    摘要: A flexible recipe modeling system and method is provided for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment including associated different chambers of a multi-chamber processing machine by allowing a responsible engineer to add or modify individual recipe clusters including grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and providing a material execute system having a recipe cluster management engine (RCME) for management of the RCMS.

    摘要翻译: 提供了一种灵活的配方建模系统和方法,用于通过定制由包括多室处理机的相关联的不同室的制造设备处理的配方,通过允许负责的工程师添加或修改包括分组在内的各个配方集群来提高制造过程的处理可靠性 的配方表示为一个制造设备的相同的处理能力,并且提供具有用于管理RCMS的配方集群管理引擎(RCME)的材料执行系统。

    Handheld electronic device with shockproof mechanism
    9.
    发明授权
    Handheld electronic device with shockproof mechanism 有权
    带防震机构的手持式电子设备

    公开(公告)号:US07447532B2

    公开(公告)日:2008-11-04

    申请号:US11329084

    申请日:2006-01-11

    申请人: Hsien-Jung Hsu

    发明人: Hsien-Jung Hsu

    IPC分类号: H04M1/00

    CPC分类号: H04M1/0202 H04M1/185

    摘要: The present invention is to provide a handheld electronic device comprising a phone body including an LCD display screen and a keypad disposed on a front surface thereof, and at least one first cutting surface formed at a corner between two adjacent side surfaces; and at least one padding block made of a shockproof material and each having a first joining surface being adapted to matingly fit onto the first cutting surface for securing the padding block to the corner of the phone body. By utilizing this, the padding block may collide with a hard object first when the handheld electronic device having the padding blocks falls thereto so as to lessen the effect or absorb the force of shocks and jarring and prevent the handheld electronic device from being damaged.

    摘要翻译: 本发明提供一种手持式电子装置,其包括电话本体,其包括LCD显示屏和设置在其前表面上的键盘,以及形成在两个相邻侧表面之间的拐角处的至少一个第一切割表面; 以及至少一个由防震材料制成的填充块,并且每个填充块具有适于匹配地配合到第一切割表面上的第一接合表面,用于将填充块固定到电话主体的角部。 通过利用这种情况,当具有填充块的手持式电子设备落在其上时,填充块可能首先与硬物体碰撞,以便减轻冲击和振动的作用或吸收冲击力并防止手持式电子设备被损坏。

    Floating process flow control system to handle operation events in a full automation plant
    10.
    发明授权
    Floating process flow control system to handle operation events in a full automation plant 有权
    浮动过程流程控制系统,用于处理全自动化工厂的运行事件

    公开(公告)号:US07039482B2

    公开(公告)日:2006-05-02

    申请号:US10694683

    申请日:2003-10-28

    IPC分类号: G06F19/00

    摘要: A method to handle operation exceptions in an automated manufacturing system is achieved. The method comprises providing an automated manufacturing system comprising a means to track progress of work in process against standard process flows and a means to select product lots for processing from the work in process and to select equipment for processing the product lots based on next step information from the standard process flows. The automated manufacturing system is monitored for operation exception events. The product lots must deviate from the standard process flows. A floating process flow is selected corresponding to the operation exception event and the product lots from a floating process flow database. The floating process flow is linked to the standard process flow such that the next step is derived from the floating process flow. Manufacturing is continued using the floating process flow. The floating process flow is unlinked from the standard process flow such that the next step is derived from the standard process flow when the floating process flow is completed. A control system apparatus for handling operation exceptions in an automated manufacturing plant is achieved.

    摘要翻译: 实现了在自动化制造系统中处理操作异常的方法。 该方法包括提供一种自动化制造系统,其包括用于跟踪标准工艺流程跟踪工作进度的装置,以及用于从正在进行的工作中选择用于处理的产品批次并根据下一步骤信息选择用于处理产品批次的设备的手段 从标准工艺流程。 监控自动化制造系统的操作异常事件。 产品批次必须偏离标准工艺流程。 从浮动流程数据库中选择对应于操作异常事件和产品批次的浮动流程。 浮动流程链接到标准流程,以便下一步骤从浮动流程中获得。 使用浮动流程继续制造。 浮动工艺流程与标准工艺流程取消联系,从而当浮动工艺流程完成时,下一步骤将从标准工艺流程中获得。 实现了用于处理自动化制造工厂中的操作异常的控制系统装置。